We have constructed a laser superconducting quantum interference device (SQUID) microscope for imaging photo-induced magnetic fields by focused laser beam. This system can improve the spatial resolution for semiconductor samples at room temperature. Our system consists of the following essential components, a laser diode, a high temperature superconductor SQUID gradiometer, a piezo driving non-magnetic ceramics XY stage, a lock-in amplifier and a video system. Under the practical condition without using a magnetic shield, the p–n junction of single crystal silicon was measured. The magnetic field gradient (d B z /d x) of 600 fT/cm was obtained as images with spatial resolution of 20 μm. The laser SQUID microscope has the possibility of becoming a new tool for evaluation, because it offers noninvasive and non-contact access to semiconductors.
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