Single-crystalline ZnO nanocrystals were fabricated by room-temperature photo-chemical vapor deposition (PCVD). We further enhanced the growth of high-quality single-crystalline ZnO nanocrystals using dressed photons and phonons (DPPs). This resulted in greater position control and the growth of high-quality ZnO nanocrystals. The ZnO nanocrystals produced with DPPs had excellent cathodoluminescence characteristics, indicating that the near-field PCVD process could be a promising technique for nanophotonic integrated circuit production.