Spatially and time-resolved detection of gallium atoms formed in the laser photochemical vapor deposition process of trimethylgallium by laser-induced fluorescence: Decomposition in the adsorbed state

Abstract

Spatially and time-resolved detection of gallium atoms formed in the excimer-laser photochemical vapor deposition (CVD) process of trimethylgallium at 248 nm was made by the laser-induced fluorescence technique. The result shows the importance of chemically adsorbed species in the photo-CVD process. The presence of a thermally assisted effect in the photochemical decomposition was indicated.