Surface effects usually remarkably affect the mechanical response of ultra-thin micro-/nano-structures. However, the mechanisms of surface effects on the fracture characteristics of ultra-thin films are still not fully understood. To this end, this paper develops a modeling framework to investigate the fracture of ultra-thin films at microscales or below. Such a framework couples the Gurtin–Murdoch theory with a phase-field fracture model, in which the former is adopted to introduce the surface effects, i.e., the surface residual stress and surface elasticity of a thin film, and the latter is able to model crack evolution without requiring predefined crack paths or any criteria. Furthermore, a novel crack driving force is introduced, which encompasses the tensile components of both bulk elastic energy and surface elastic energy. Several numerical examples including the biaxial tension test as well as the single-edge notched tension/shear test are performed. The simulation results indicate that the surface strain energy plays a major role in the total elastic strain energy of an ultra-thin film when its thickness is at a micro level, thus demonstrating the significance of surface effects. Moreover, the mode-I fracture test shows that the surface elasticity and surface residual stress have a remarkable influence on the displacement at failure, while for the mode-II fracture test, the surface residual stress significantly influences the fracture characteristics such as the crack path and failure displacement. The developed model paves the way for revealing the fracture mechanisms of ultra-thin micro-/nano-films and conducting their safety assessment.
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