Five organic CO2-philic functional groups were incorporated in silica matrixes for preparation of functionalized silica membranes to explore the CO2 separation performance. Chemical groups including acetate, trifluoromethyl, methacrylate, urea and vinyl groups were anchored in the silica network using the co-condensation method.The information from 29Si solid-state NMR and FTIR analyses indicates the successful formation of a covalent bond between functional groups and the silica network. The thickness of the functionalized silica layers was measured by SEM and the thermal stability of the organic groups was determined by thermogravimetric analysis (TGA).The gas permeance and mixed gas selectivity of CO2/N2 was measured in the temperature range of 253–373 K with a feed pressure of 9 bar. A maximum selectivity of as high as 10 was observed for a trifluoromethyl functionalized silica membrane with a CO2 permeance of 5.5 × 10−7 mol s−1 m−2 Pa−1. Permporometry measurements indicated that the contribution of flow through micropores to the total flow for all the functionalized silica membranes varied between 62 and 82%. All membranes were CO2 selective.