The paper presents studies of the mechano-structural characteristics of the atomically ordered Cu3Pd alloy subjected to severe plastic deformations (SPDs) at room and cryogenic temperatures combined with subsequent annealings. Transmission and scanning electron microscopy (TEM and SEM), X-Ray diffraction (XRD) analysis and microhardness tests were used as research methods. The mechanical characteristics of the synthesized Cu3Pd alloy were compared after preliminary SPDs at room and cryogenic temperatures as well as during subsequent annealings. The significant acceleration of the atomic ordering kinetics and, consequently, effective diffusion during recrystallization annealing after cryodeformation was found. The developed deformation-thermal method can be used to synthesize high-strength nanostructured resistive and electrocontact materials.