Silicon Nitride Particles Research Articles

(Invited) Particles Removal on Challenging Surfaces

In semiconductor manufacturing, particle removal is critical for high yield. This study investigates cleaning efficiency on challenging surfaces like deep trenches, wafer bevel, and bonded dies, using various methods. Intentional contamination was applied using silica, silicon nitride, and ceria particles. Cleaning methods tested include high-velocity biphasic sprays, cryogenic processes, and polymer peel techniques. Results show that while polymer peeling offers excellent particle removal efficiency (PRE) on blanket surfaces and wafer bevels, it struggles with high aspect ratio features due to polymer film dewetting. The study provides a new methodology for generating cleaning tool fingerprints and highlights the importance of key contamination parameters, such as particle nature, media characteristics, and queue time. The findings underscore the need for evolving cleaning processes to address the complexities of modern semiconductor surfaces.

Effects of silicon nitride (Si3N4) incorporation on physicochemical, bioactivity and antibacterial properties of 45S5 bioactive glass

In this study, silicon nitride (Si3N4, SN) particles (10–30 wt%) were introduced into 45S5 bioactive glass (BG), and the impact of the incorporation on thermal and physicochemical features of the composite was analyzed. SN inclusion shifted the crystallization temperature of BG to higher temperatures, thus, the viscous flow of the glassy phase enhanced the sintering-ability and eventually reduced the sintering temperature from 1050 °C to 900 °C. XRD results revealed that increased SN fractions sustained higher amorphous content while decreasing the fraction of the main BG crystallization phase (combeite). BG + SN composites were cytocompatible with MG-63 cells. A higher number of cells was visualized on the BG + SN pellets, yet no statistically significant viability difference was determined between the BG + SN and BG samples. SN addition also endowed antibacterial activity to the BG + SN composites against S. aureus and E. coli pathogens, revealing that SN addition to BG is an alternative approach to developing biocompatible, bioactive, and antibacterial materials.

Influence of Si3N4 fillers and pyrolysis profile on the microstructure of additively manufactured silicon carbonitride ceramics derived from polyvinylsilazane

ABSTRACT In this work, various methods were used to improve the printability of a photocurable polyvinylsilazane resin filled with silicon nitride particles for digital light processing. The developed resin was used as a preceramic polymer for polymer-to-ceramic conversion. The pyrolysis-induced structural changes of the additively manufactured objects were evaluated by comparing samples with different thicknesses, filler amounts and heating profiles. The printed green body retained its original geometry better and showed fewer cracks due to the addition of silicon nitride particles to the resin. Based on the thermally induced changes in a polyvinylsilazane resin system, a customized heating profile for the pyrolysis process was developed, which contributed to the reduction of pores and cracks while the average pyrolysis heating rate remained relatively high. This work provides insight into the pyrolysis of additively manufactured preceramic polymer green bodies and highlights various strategies for additive manufacturing of polymer-derived ceramics.

Applying the Alkali-Activation Method to Encapsulate Silicon Nitride Particles in a Bioactive Matrix for Augmented Strength and Bioactivity.

The development of bioactive ceramics still poses challenges in finding a good compromise between bioactivity and mechanical robustness. Moreover, a facile, low-cost and energy-saving synthesis technique is still needed. This study concerns the synthesis of a bioactive material by growing a bioactive Na-Ca-Mg-Si-based ceramic matrix produced using the alkali-activation method on silicon nitride (Si3N4) particles. This technique simultaneously forms the matrix precursor and functionalizes the Si3N4 particles' surface. The optimal strength-bioactivity compromise was found for the composition containing 60 wt.% Si3N4 and 40 wt.% of the matrix exhibiting good compressive strength of up to 110 MPa and extensive precipitation of hydroxyapatite on the sample surface after 7 days of soaking in simulated body fluid. This innovative approach merging strong non-oxide binary ceramics with the versatile and low-cost alkali-activation method holds great expectations for the future in biomaterials.

Study on Machinability Behaviour and Simultaneous Optimisation of Multiple Responses Using Taguchi‐Based Grey Relational Analysis in End Milling of Aluminum Hybrid Composites

The present work reveals the machinability characteristics of Al7068/Si3N4/BN hybrid composite materials. The composite materials were prepared through the liquid metallurgy technique with various weight fractions (0, 5, 10) of silicon nitride and hexagonal boron nitride particles. The experimental studies were performed on a CNC milling machine by varying cutting speed (600, 1200 and 1800 rpm), feed rate (150, 300 and 450 mm/min), and depth of cut (0.8, 1.2 and 1.6 mm). Taguchi’s plan of experiments (L27 orthogonal array design) and analysis of variance (ANOVA) were employed to investigate the effect of process parameters on surface roughness (Ra), cutting temperature, and material removal rate (MRR). Taguchi‐based grey relational analysis (GRA) was performed to identify the best process parameters combination for optimising the multiple responses simultaneously. ANOVA results revealed that the weight fraction of Si3N4 is the most contributing parameter for multiple response characteristics.

Method for increasing of mechanical properties of hot-deformed powder steels with ultrafine particles

A method has been proposed to increase the mechanical properties of hot-deformed powder steels, which consists of additional plastic deformation with a degree of deformation at which the intragranular intergrowth of the material is preserved. The influence of ultrafine silicon nitride particles on the formation of the structure and properties of hot-deformed powder steels is considered.

Exploring the morphologies and corrosion performances of AZ31 alloy composites reinforced with silicon nitride

In this study, the effects of silicon nitride (Si3N4) particles on the microstructure and corrosion characteristics of AZ31 matrix composites in a 3.5% NaCl solution are examined with the help of an electrochemical test. Varying wt.% of Si3N4 particles (2, 4, 6, 8, 10, and 12 %) is used to fabricate matrix composites via a vacuum-assisted stir-casting approach. The developed composites and base alloys are characterized by energy dispersive X-ray analysis (EDAX) and scanning electron microscopy (SEM). Microscopic images demonstrate that the addition of reinforcement enhances the microstructural interfacial integrity between the Si3N4 and AZ31 matrix. EDAX results confirm the presence of Si3N4 particles in composites. The findings of electrochemical studies confirmed that AZ31's corrosion resistance substantially improved as its Si3N4 content increased. AZ31-10%Si3N4 exhibits a more tremendous corrosion potential (Ecorr) and a two-order-of-magnitude lower corrosion current density (icorr). Compared to the other samples, AZ31-10%Si3N4 exhibits superior polarization resistance. Compared to AZ31-2%Si3N4, AZ31-10%Si3N4 exhibits a 3.5-fold increase in polarization resistance. The results show that the AZ31 alloy with 10% Si3N4 exhibits superior corrosion resistance, followed by the AZ31-12%Si3N4, AZ31-8%Si3N4, AZ31-6%Si3N4, AZ31-4%Si3N4, and AZ31-2%Si3N4. The collective outcomes of the investigation indicate that the AZ31-10%Si3N4 composite may have the potential to enhance the corrosion behavior of AZ31 alloys.

Effect of Silicon Nitride Particles on the Sliding Wear Characteristics of Functionally Graded Aluminium Composite

Effect of Silicon Nitride Particles on the Sliding Wear Characteristics of Functionally Graded Aluminium Composite

Effect of fine silicon powders addition on improving nitridation of coarse silicon powders

AbstractThe fabrication of large silicon nitride particles via direct nitride is time‐consuming. In this work, the effect of adding fine silicon powders (5 μm) on improving the nitridation of coarse silicon powders (50, 150 μm) at 1450°C in a thermogravimetric analyzer was investigated. The addition of fine silicon particles prevents the coalescence of the melted coarse silicon particles, due to them converting to silicon nitride particles more quickly. Less time is required to complete the nitridation of coarse silicon as the amount of fine silicon increases. The nitridation of coarse silicon (150 μm) is completed in less than 23 min at 1450°C with adding 50% fine silicon. The nitridation products consist of particles similar in size to the raw silicon particles.

Damping capacity of magnesium matrix composites fabricated by ultrasonic-assisted stir casting

In this study, the ultrasonic-assisted stir casting technique was utilized to produce magnesium (Mg) composites, wherein silicon nitride (Si3N4) particles were incorporated in low proportions. The primary aim of this investigation was to examine the effect of introducing these Si3N4 particles in small amounts on the damping capability of pure Mg. Examination of the scanning electron microscope images verified that the Si3N4 particles were uniformly dispersed with minimal agglomeration. The damping capacity of both pure Mg and the composites was assessed at room temperature using a resonance frequency damping analyzer. The findings indicated that the inclusion of Si3N4 particles amplified the damping capacity of pure Mg. Remarkably, the Mg/Si3N4 composite demonstrated the highest damping capacity, surpassing that of pure Mg by 1.5 times.

Characterization of pulse electric current sintered Ti-6Al-4V ternary composites: Role of YSZ-Si3N4 ceramics addition on structural modification and hydrogen desorption

In this study, we fabricated Ti-6Al-4V composites using pulse electric current (spark plasma) sintering technique and examined the influence of yttria-stabilized zirconia (YSZ) and silicon nitride (Si3N4) particles on microstructural, mechanical properties. Moreover, we investigated the effects of YSZ and Si3N4 on hydrogen uptake rate of the fabricated composites. The formation of new phases in addition to the parent α and β phases corroborates the increased hardness property exhibited by the Ti-6Al-4V composites. Further, the improvement in the hardness property was ascribed to Orowan strengthening effect due to resistance offered by cross dislocation pinning effect of closely packed particles. From the nanomechanical test, the penetration depth of the unreinforced Ti-6Al-4V alloy was maximum at a value of 272.57 nm, while all the reinforced alloys exhibited reduced penetration depth, thereby increasing the stiffness and strength of the Ti-6Al-4V composites. Other nanomechanical analyses such as nanohardness, elastic modulus, and creep were also improved in the reinforced composites in comparison with the Ti-6Al-4V alloy. The amount of hydrogen absorbed by the specimens was measured, and the Ti-6Al-4V composite with the highest proportion of Si3N4 reinforcement exhibited the highest hydrogen concentration.

Silicon Carbide–Silicon Nitride Refractory Materials: Part 1 Materials Science and Processing

Silicon carbide and silicon nitride materials were intensively studied in the end of the past century, yet some aspects of its physical chemistry require investigation. The strength characteristics of Si3N4-SiC refractories are moderate; however, these materials sometimes demonstrate “stress–strain” behavior, more typical for composite materials than for the brittle ceramics. These materials may be considered to be ceramic composites because they consist of big grains of silicon carbide surrounded by small grains of silicon nitride, with strict interfaces between them. There is no direct certainty whether Si3N4-SiC compositions may be called composite materials or brittle ceramic materials from the viewpoint of mechanics and strength. The balance of α/β modifications of silicon nitride in Si3N4-SiC composite material and, the occurrence and the role of silicon oxynitride Si2ON2 are also a matter of scientific interest in processing of Si3N4-SiC composite material. The same may be said about the particles of silicon nitride between the grains of silicon carbide—there is no direct understanding whether silicon nitride grains will be isometric grains or needle-like crystals.

Effects of tertiary ceramic additives on the micro hardness and wear characteristics of Al2618 + Si3N4-B4C-Gr hybrid composites for automotive applications

In innovative materials engineering, one of the most important areas of research is the process of incorporating the appropriate combinations of reinforcements into matrix material. These innovative materials have enhanced strength as well as improved wear properties. In light of this, the purpose of the current work was to construct hybrid composites utilizing Al2618 by integrating varied quantities of Boron Carbide (B4C), silicon nitride (Si3N4), and graphite particles by a liquid casting. The manufactured composites were subjected to scanning electron microscopy coupled with XRD analysis, micro hardness test, and wear evaluations. An examination of the microstructure of the material has shown that the reinforcement is evenly dispersed throughout the base alloy. The impact of different reinforcing mixtures on mechanical characteristics and wear behavior was also investigated.

Effect of Microstructure on Mechanical Behaviors of Al6061 Metal Matrix Composite Reinforced with Silicon Nitride (Si3N4) and Silicon Carbide (SiC) Micro Particles

Effect of Microstructure on Mechanical Behaviors of Al6061 Metal Matrix Composite Reinforced with Silicon Nitride (Si3N4) and Silicon Carbide (SiC) Micro Particles

Compatibilized bio-based polybutylene-succinate blended composites filled with surface modified Si3N4 for improved rigidity and thermal performance

In this study, polybutylene succinate was melt blended with polypropylene (PP) to fabricate partially bio-based and miscible composites filled with various loading silicon nitride (Si3N4) particles. Oleic acid and PP-grafted maleic anhydride were used as a functionalizing agent for Si3N4 and as a compatibilizer for polymer blends, respectively. The surface functionalization of the Si3N4 particles enhanced the interfacial adhesion between the filler and the blended polymers, affecting the thermal and mechanical properties of the composites. The thermal conductivity of the composite filled with only 18.6 vol% surface-treated Si3N4 increased by 342% compared to that of the blended polymer. In addition, the surface treatment of Si3N4 significantly improved the Young’s modulus, tensile strength, and thermal stability of the corresponding composites. However, the temperature-dependent storage modulus was unaffected by the surface treatment of Si3N4 and increased as the loading content of the Si3N4 particles increased.

Experimental interrogations on morphologies and mechanical delineation of silicon nitride fortified Mg-Al-Zn alloy composites

The smart material used in aerospace and automotive industries has to withstand high load with minimum structural weight. Nowadays, in search of new lightweight materials for the industrial application, magnesium is rapidly replacing aluminium-based alloys. In this research, magnesium (AZ31) matrix composite reinforced with ceramic silicon nitride (Si3N4) particle is fabricated by vacuum stir casting. The proportion of strengthening particle was assorted to a maximum of 10 % in steps of 2 % variation in weight. Microstructural analysis carried out through optical microscope exposes the occurrence and near-uniform spread of Si3N4. The mechanical properties for various weight proportions are studied; microhardness and strength are enhanced at the expense of ductility reduction with rising Si3N4 content in the magnesium metal matrix. The porous nature and composites density rises with higher weight % of Si3N4 particles in the magnesium matrix. The corrosion characteristic was studied by salt spray and cyclic potentiodynamic polarization test, which demonstrates that increasing the reinforcement limits the corrosion by forming phases of Mg2Si intermetallics with galvanic corrosion mechanism. The inferences present that the fabricated composite are ideal for many industrial plans where less structural weight material is required.

Tribological behavior of silicon nitride reinforced polycarbonate nanocomposites

AbstractPolycarbonate (PC) matrix nanocomposites containing 0–20 vol.% nanosize silicon nitride (Si3N4) particles have been prepared by solution mixing method. A combination of X‐ray diffractometry and transmission electron microscopy has been used to characterize phase purity and morphology of Si3N4 nanoparticles. The prepared nanocomposites have been investigated for density, microstructure, microhardness, and tribological behavior. Density and microhardness have been found to increase with increasing volume percent of nanoparticles. The experimental values of density of composites fall close to those of theoretical values predicted from the rule of mixtures thereby suggesting that prepared nanocomposites were nearly pore free. The maximum improvement of microhardness of 189% has been found for nanocomposite with 20 vol.% Si3N4 particles as compared to neat PC. Experimental data of microhardness correlated well with the modified rule of mixtures (with strengthening efficiency factor β = 0.09). Scanning electron micrographs indicated well dispersion of nanoparticles in PC matrix. Tribological (friction and wear) behavior have been evaluated using pin‐on‐disc method. It has been found that 20 vol.% nanocomposite exhibited lowest friction coefficient and highest (~ 68%) wear resistance as compared to neat PC. Based on the results, the prepared nanocomposites are suggested to be used in cams, gears, boat and pump impellers.

Influence of Microstructure on Tribological Behaviors of Al6061 Metal Matrix Composite Reinforced with Silicon Nitride (Si3N4) and Silicon Carbide (SiC) Micro Particles

Dual step stir casting method was utilized to develop Al6061 composite reinforced with SiC (micron) and Si3N4 (submicron) particles in varying proportion and weight percentage. A homogeneous and uniform distribution of hybrid reinforcement without significant porosity was observed in the microstructure of the composites. X-ray diffraction (XRD) results manifest that Si3N4 and SiC particles are thermodynamically stable during the processing and no unwanted phases were detected. Elemental mapping was also performed for phase identification. With reference to the base alloy significant improvement was noticed in physical and tribological properties of hybrid composites. Maximum rise in hardness was 54.64%. Abrasive wear test results from pin on disc reveals that wear resistance get enhanced for all composition and load is found to be most dominating factor affecting wear behavior.

Additive manufacturing of flexible polymer-derived ceramic matrix composites

ABSTRACT It remains challenging to broaden the application fields of ceramics, largely because the hardness and brittleness of ceramics mean that they cannot undergo shape reconfiguration. In this study, we developed an ultraviolet light-curable preceramic polymer slurry, and this slurry was used for digital light processing printing of flexible green parts in designed shapes. These parts were subsequently transformed into complex structures by an assisted secondary molding strategy that enabled the morphology of their green and pyrolyzed forms to be well controlled. The collapse of bulk pyrolyzed parts was avoided by impregnating their precursors with silicon nitride (Si3N4) particles. The effects of different proportions of Si3N4 on the weight loss, shrinkage, density, porosity, and mechanical properties of the pyrolyzed composites were investigated, and the bending strength and Vickers hardness of the composites with 10 wt.% Si3N4 were found to be 130.61 ± 16.01 MPa and 6.43 ± 0.12 GPa, respectively.

Improvement in osteogenesis, vascularization, and corrosion resistance of titanium with silicon-nitride doped micro-arc oxidation coatings.

Titanium (Ti) implants have been widely used for the treatment of tooth loss due to their excellent biocompatibility and mechanical properties. However, modifying the biological properties of these implants to increase osteointegration remains a research challenge. Additionally, the continuous release of various metal ions in the oral microenvironment due to fluid corrosion can also lead to implant failure. Therefore, simultaneously improving the bioactivity and corrosion resistance of Ti-based materials is an urgent need. In recent decades, micro-arc oxidation (MAO) has been proposed as a surface modification technology to form a surface protective oxide layer and improve the comprehensive properties of Ti. The present study doped nano silicon nitride (Si3N4) particles into the Ti surface by MAO treatment to improve its corrosion resistance and provide excellent osteoinduction by enhancing alkaline phosphatase activity and osteogenic-related gene expression. In addition, due to the presence of silicon, the Si3N4-doped materials showed excellent angiogenesis properties, including the promotion of cell migration and tubule formation, which play essential roles in early recovery after implantation.