The calculation is implemented for the fiber collection efficiencies due to diffusion of nanoparticles in model filters, i.e., separate rows of fibers with an elliptic cross section located normal to the flow at different orientations of the ellipse axes with respect to the flow. The Stokes flow field in the system of the fibers is found by the method of fundamental solutions. The concentration field of Brownian particles and the efficiency of their deposition onto the fibers are determined from the numerical solution of the equation for the convective diffusion. The dependence of the capture coefficient on the Peclet number for elliptic fibers is shown to have the form η = APe−m, where exponent m changes from 2/3 to 3/4 at the parallel and normal orientation of the major axes of the ellipses with respect to the flow, respectively. It is shown that, from the viewpoint of aerosol nanoparticle capture, the best filters are those in which the fibers have a maximum midsection at the same cross-sectional area.