In this work, we consider the effect of irradiation in Ar+ → O+ and O+ → Ar+ sequences on changes in the chemical compound, type of chemical bond and the local atomic structure of ultrathin (~20 nm) iron surface layers. Investigation of the chemical compound and the type of chemical bond of the ion-modified surface was carried out by the XPS (X-ray photoelectron spectroscopy) and Auger electron spectroscopy. The study of changes in the local atomic structure was carried out by an XAFS-like method — electron energy loss fine structure (EELFS) spectroscopy. The parameters of the local atomic environment of oxygen and iron — partial interatomic distances, dispersion parameters, and coordination numbers — were obtained by analyzing atomic pair correlation functions. Analysis of experimental data showed that the two-stage irradiation of iron significantly changes the chemical compound and local atomic structure of the initial surface. This leads to formation of an oxide layer of greater depth than in the case of irradiation with only oxygen ions.
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