The Cu2O thin films were prepared from copper (II) acetylacetonate (Cu(acac)2) by the mist chemical vapor deposition (mist-CVD) method, depending on the pH value of the prepared solution. It was confirmed that the well-oriented Cu2O thin films were grown at a dominant (111) peak according to X-ray diffraction (XRD) measurement using an alkaline precursor solution. The pH of the prepared solution drastically affected the surface morphology of the Cu2O thin films, and the lowest Root Means Square (RMS) was found for pH-10 of the precursor solution. The confocal Raman spectrum confirmed the formation of the cubic Cu2O crystal structures for each pH value of the precursor solution. The very transparent Cu2O thin films that were grown. The highest transmittance, 70%, was obtained at 1100 nm from the absorption spectrum for Sample B. The optical energy band gaps of Cu2O thin films were determined using Tauc's method and found to vary within a range of 2.53 to 2.49 eV, indicating a change in the material's electronic structure. The study demonstrated the crucial role of the pH level of the prepared solution in the growth of the Cu2O thin film. Specifically, it was found that a higher pH level resulted in a greater concentration of hydroxide ions (OH−), which was a crucial factor in the growth process. These findings can be significant in using p-type Cu2O thin films prepared based on mist-CVD for optoelectronic applications.
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