A glassy carbon (GC) substrate was irradiated by Pt ions using a coaxial arc plasma gun in vacuum. The structure of the substrate was studied in the atomic scale using high‐resolution transmission electron microscopy (HRTEM) and electron energy loss spectroscopy (EELS) with a thin foil specimen prepared by cross‐sectioning using focused ion beam milling. HRTEM combined with the EELS measurements of the cross‐sectioned sample indicated a disordering of the GC substrate surface and the detection of phenol‐type species, carbon atoms in aliphatic chain molecules, and carboxyl groups, which are considered to have been formed by chemical reaction between the carbon atoms of the GC substrate surface and hydrogen or oxygen atoms. Penetrated Pt atoms were observed inside the GC substrate, and the surface position of the GC substrate was located from the depth profiles of the EELS spectra. STEM‐EELS analyses of a pristine GC substrate without Pt ion irradiation were also conducted for reference.