Oxide Vapor Research Articles

Self-Aligned Nanopatterning and Controlled Lateral Growth by Dual-Material Orthogonal Area-Selective Deposition of Poly(3,4-ethylenedioxythiophene) and Tungsten

Despite recent advances in area-selective deposition (ASD) processes, most studies have focused on single-material ASD. Multi-material ASD processes could provide additional flexibility for fabricating semiconductor devices. In this work, we identify process requirements to sequentially combine two intrinsic ASD processes: (1) poly(3,4-ethylenedioxythiophene) (PEDOT) ASD on SiO2 vs Si–H via oxidative chemical vapor deposition and (2) W ASD on Si–H vs SiO2 via atomic layer deposition. Using ex situ X-ray photoelectron spectroscopy, we show that a preferred orthogonal ASD sequence involves PEDOT ASD on SiO2 vs Si–H, followed by W ASD on Si–H vs PEDOT. We find that the properties of the individual PEDOT and W ASD materials, including resistivity, surface roughness, and growth rate, are affected by the ASD sequence. Furthermore, we successfully demonstrate that orthogonal ASD can be extended to nanoscale starting patterns. The cross-sectional scanning transmission electron microscopy (STEM) with energy-dispersive X-ray spectroscopy analysis shows that the resulting PEDOT thickness on SiO2 depends on feature geometry and dimension. Finally, we demonstrate the feasibility that the PEDOT layer can control the lateral growth of W onto the non-growth surface.

Oxidation properties of complex concentrated alloys FeAlCrV and FeAlCrMo

Complex concentrated alloys (CCAs) are attracting considerable interest due to their potential applications under extreme conditions. This study focuses on two complex concentrated alloys, the FeAlCrV and the FeAlCrMo alloys, which already exhibited exceptional mechanical properties at high temperatures. In this regard, room temperature corrosion resistance and high-temperature oxidation were studied to investigate their potential applicability in harsh environments. It is shown that the corrosion resistance of both CCAs is much higher than that of AISI 304 and P91 steels in 0.5 M H2SO4 solution, while in 3.5% NaCl solution was comparable. On the contrary, high-temperature oxidation of CCAs was unsatisfactory, especially exceeding 700 °C. The intensive analysis of the formed oxide scales revealed that the protective oxide layer is not being formed at temperatures above 700 °C, primarily because of the occurrence of vanadium corrosion (FeAlCrV) and evaporation of Mo oxides (FeAlCrMo). The results of this study unambiguously showed the importance of studying oxidation properties at high temperatures parallel with the mechanical properties for the development of CCAs for cutting-edge technical applications.

Secondary Ion Mass Spectrometry Study of Hydrogenated Amorphous Silicon Layer Disintegration upon Rapid (Laser) Annealing

Double layers of deuterated and hydrogenated amorphous silicon (a‐Si:H) on glass are heated in the ambient by scanning with a green (532 nm) continuous wave laser. The hydrogen diffusion length in the laser spot is obtained from the deuterium (D)–hydrogen (H) interdiffusion measured by secondary ion mass spectrometry (SIMS), the temperature in the laser spot is obtained by calculation. Under certain conditions, detachment of the deuterated layer from the hydrogenated layer is observed in the SIMS depth profiles, visible by rising oxygen and carbon signals at the D/H interface attributed to in‐diffusion of atmospheric gas species like water vapor, oxygen, and carbon oxide. Stacks involving both undoped and boron‐doped a‐Si:H films show disintegration. The results suggest that the parameters leading to the disintegration effects are the presence of a plane of reduced material cohesion at the D/H interface, a sizeable H diffusion length and a rather high heating rate. Herein, it is likely considered that the observed layer disintegration process is involved in the peeling of a‐Si:H films upon fast heating. Furthermore, the results show that rapid laser heating can be used to detect planes of reduced material cohesion which may compromise the electronic properties of a‐Si:H‐based stacks.

Effect of soy protein isolate nanoparticles loaded with litsea cubeba essential oil on performance of lentinan edible films

Environmental issues caused by plastic packaging materials have gotten increasingly severe, and substantial research has been conducted on environmentally friendly active packaging materials. In this study, the Litsea cubeba essential oil loaded soy protein isolate nanoparticles (LSNPs) with appropriate particle size, high storage stability and salt solution stability were fabricated. The LSNPs with the highest encapsulation efficiency of 81.76 % were added into the lentinan edible film. The microstructures of the films were observed by scanning electron microscopy. The physical properties of the films were measured. The results show that the lentinan film with LSNPs in the volume ratio of 4:1 (LF-4) had the highest elongation at break of 196 %, the lowest oxygen permeability of 12 meq/kg, and good tensile strength, water vapor barrier property, antibacterial property, oxidation resistance and thermal stability. The study suggested that LF-4 film could inhibit the growth of bacteria and delay the oxidation of lipid and protein on beef surface for 7 d.

Synergistic effect of xSi-TiO2 ceramic membrane on photocatalytic oxidation and water vapor recovery of high humidity NO

Photocatalytic membranes were prepared by hydrothermal method using in situ growth of silica-doped titanium dioxide nanorods with different molar ratios on the surface of hollow ceramic membranes. The removal of nitrogen oxides from high humidity flue gas at ppm level and the recovery of flue gas water vapor were investigated for the first time. The optimized 0.2Si-TiO2 photocatalytic membrane achieved complete conversion of 50 ppm NO carrying saturated water vapor in only 11 min under UV light source irradiation, and the generation of toxic intermediate product NO2 was significantly reduced to 4.2 ppm. Further studies have shown that the presence of water vapor can facilitate the conversion of the toxic intermediate NO2 to nitrate. Moreover, the water vapor recovery flux was 4.18 kg·m−2·h−1, and the water vapor recovery efficiency reached 7.04%. The main water vapor recovery method was membrane condensation. Mechanistic analysis showed that hydroxyl radicals and superoxide radicals are the main components of photocatalytic oxidation, and this work provides a reference for enhancing the photocatalytic conversion of NO and suppressing the emission of toxic intermediates NO2 in the process.

Proton /oxygen ion conductivity ratio of Nd containing La10W2O21/γ-La6W2O15 tungstates

The search for new materials with pronounced proton or oxygen-ion conductivities is of great importance for the development of solid state ionic and electrochemistry fields. Here, we studied the structure, phase transitions, and ionic (oxygen-ion and proton) conductivity of the pure and Nd containing γ-La6W2O15-based composites and pseudorhombohedral La14-xNdxW4O33 (x = 12, 14) solid solutions. The proton conductor La14W4O33 (5 × 10−5 S/cm at 600 °C) was found to be a two-phase material consisting of an anion-deficient La10W2O21 fluorite-related phase and the γ-La6W2O15 orthorhombic phase. The phase content of the pure La10W2O21 cubic phase was ∼18 wt% for the γ-La6W2O15-based composite. A high degree of Nd content in γ-La6W2O15-based composite leads to formation of solid solutions based on a pseudorhombohedral phase in La14-xNdxW4O33 with x = 12 and 14. The Nd -containing γ-La6W2O15-based composites exhibited proton conductivity, which gradually decreased with increasing Nd content, whereas La14-xNdxW4O33 (x = 12, 14) pseudorhombohedral solid solutions were identified as oxygen-ion conductors. Nd14W4O33 has the oxygen -ion conductivity of ∼4 × 10−4 S/cm at 700 °C (1.0 × 10−3 S/cm at 900 °C). In contrast to the γ-La6W2O15 phase, the γ-La6W2O15-based composite undergoes only a single reversible phase transition at around 910 °C, which can, however, initiate cracks in ceramics. According to DSC and SEM data, the phase transition near 910 °C can be suppressed by introducing Nd into the γ-La6W2O15-based composites. The cracking process is enhanced by evaporation of tungsten oxide at T ≥ 1450 °C.

Efficient and stable subzero operation of a PEM fuel cell with a composite anode using hydrogen-methanol composition during freeze/thaw cycles

The present research deals with the adaptation of hydrogen-air fuel cells with proton exchange membrane (PEMFC) to autonomous periodic operation at subzero ambient temperatures. The main goal of the research is to limit the influence of subzero temperatures on component integrity and electrochemical performance stability of PEMFC in the cause of the freeze-thaw (F/T) cycling test. The MEAs stability in cycling from subzero (−35 °C) to operating temperature (+35 °C) was ensured without any specific preparatory operations modeling the PEMFC stop and “cold start” procedure. This is provided through the use of hydrogen-methanol compositions (no more than 4 vol % of methanol vapor) as fuel and a composite anode. Advanced membrane-electrode assembly (MEA) based on the composite anode layer (Pt 40 /C + Pt 20 /10 wt%–SnO 2 /C) for efficient and stable subzero operation during F/T cycling. High stability of electrochemical performance of the MEA with the composite anode at subzero ambient temperatures is shown. Advantages of use a two-component fuel PEMFC for autonomous periodic operation at subzero ambient temperatures are highlighted. • The hydrogen-methanol composition is applied as a fuel for cold start procedure. • Efficiency of two-component anode in methanol vapor oxidation has been proven. • Stability of fuel cell electrochemical performance at subzero temperatures is ensured.

Ammonia gas-sensing behavior of uniform nanostructured PPy film prepared by simple-straightforward in situ chemical vapor oxidation

Abstract A highly uniform nanostructured polypyrrole (PPy) film prepared by a simple, straightforward in situ route of chemical vapor oxidation has been demonstrated as a sensitive substrate for NH3 gas sensing. The structure of PPy film was investigated by scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray diffraction (XRD). The binding characteristics of the functional groups of the PPy film were examined by Fourier transform infrared and Raman spectroscopy. NH3 sensing properties of the PPy film were evaluated by its resistive response to gas concentrations from 45 to 350 ppm at different temperatures ranging from 25 to 100°C. The sensing response maximum value was 142.6% when exposed to 350 ppm of NH3 gas at room temperature (25°C). The sensing response of PPy film shows an excellent linear relationship and high selectivity toward NH3. The NH3 sensing mechanism is due to the physisorption and chemisorption interactions of NH3 molecules and the adsorptive sites of PPy (polaron and bipolaron charging carriers).

M2‐SCREAM: A Stratospheric Composition Reanalysis of Aura MLS Data With MERRA‐2 Transport

AbstractThe MERRA‐2 Stratospheric Composition Reanalysis of Aura Microwave Limb Sounder (M2‐SCREAM) is a new reanalysis of stratospheric ozone, water vapor, hydrogen chloride (HCl), nitric acid (HNO3) and nitrous oxide (N2O) between 2004 and the present (with a latency of several months). The assimilated fields are provided at a 50‐km horizontal resolution and at a three‐hourly frequency. M2‐SCREAM assimilates version 4.2 Microwave Limb Sounder (MLS) profiles of the five constituents alongside total ozone column from the Ozone Monitoring Instrument. Dynamics and tropospheric water vapor are constrained by the MERRA‐2 reanalysis. The assimilated species are in excellent agreement with the MLS observations, except for HNO3 in polar night, where data are not assimilated. Comparisons against independent observations show that the reanalysis realistically captures the spatial and temporal variability of all the assimilated constituents. In particular, the standard deviations of the differences between M2‐SCREAM and constituent mixing ratio data from The Atmospheric Chemistry Experiment Fourier Transform Spectrometer are much smaller than the standard deviations of the measured constituents. Evaluation of the reanalysis against aircraft data and balloon‐borne frost point hygrometers indicates faithful representations of small‐scale structures in the assimilated water vapor, HNO3 and ozone fields near the tropopause. Comparisons with independent observations and a process‐based analysis of the consistency of the assimilated constituent fields with the MERRA‐2 dynamics and with large‐scale stratospheric processes demonstrate the utility of M2‐SCREAM for scientific studies of chemical and transport variability on time scales ranging from hours to decades. Analysis uncertainties and guidelines for data usage are provided.

Corrosion behaviour of MgO-based refractories by different existence states of manganese-containing volatile phases

Medium/high manganese steel is great interest because of its excellent energy absorption and strength. Further, it has emerged as a potential advanced high-strength steel in automobiles. In this study, the corrosion behaviour of MgO-based refractories by different existence states of manganese-containing volatile phases was systematically investigated via laboratory experiments of the vacuum treatment of medium/high manganese steel. The dissection of a magnesia crucible indicated that the manganese-containing volatile phases exist in three states: manganese vapour, liquid manganese and manganese oxides. The corrosion mechanism models of the MgO-based refractories were established as follows: (1) For the manganese vapour, the periclase was dissociated into the fine blocks when the magnesia-carbon brick was continuously exposed to the manganese vapour. (2) For the liquid manganese, a MnO layer was detected near the manganese metal, which was resulted from the MgO oxidation, and a further reaction took place to form a MnO·MgO solid solution layer at elevated temperatures, which led to the poor binding ability of the MgO crucibles. (3) For the manganese oxides, the Al2O3 crucibles were preferentially corroded by the molten manganese oxides, which are attributed to the superior thermodynamic driving force for the formation of MnAlO4. Moreover, a reaction layer composed of a MnO·MgO solid solution and a low-melting-point silicic acid phase was formed at the interface between the manganese oxides and the magnesia-carbon brick along the decarburized infiltrated zone. In addition, the molten manganese oxides infiltrated along the periclase grain boundaries into the magnesia-carbon brick and to form a reactive metamorphic layer. Consequently, under the attack of physical and chemical corrosion, the refractory particles were loosened and dropped into the corrosive manganese oxides, causing the irreversible damage of the refractory. This work provides a strong theoretical basis for the qualitative evaluating damage of MgO-based refractories by manganese-containing volatile phases.

Local biocompatibility and biochemical profile of hepatic cytolysis in subcutaneous implantation of polylactide matrices

The aim of the study was to investigate local biocompatibility and systemic effects of nonwoven polylactide (PLA) matrices on blood and liver parameters after their subcutaneous implantation in Wistar rats.Materials and methods. Bioabsorbable fibrous PLA matrices were produced by electrospinning and had dimensions (10 × 10 mm², thickness of no more than 0.5 mm; fiber diameter in the matrix ~1 μm) appropriate for subcutaneous implantation in white laboratory rats. Polymer implants were sterilized in ethylene oxide vapor. Thirty days after the implantation of PLA matrices, local biocompatibility according to GOST ISO 10993-6-2011, cellular parameters (total leukocyte count, hemogram, erythrocyte count, hemoglobin concentration), and biochemical blood parameters (lactate concentration, alanine aminotransferase (ALT) and aspartate aminotransferase (AST) levels) were studied, and a standard histologic evaluation of the liver was performed.Results. PLA matrix samples were mild local irritants on a scale of 1–1.9 points according to GOST ISO 10993-6-2011 criteria 30 days after the subcutaneous implantation. The median density of distribution of multinucleated giant cells (MNGCs) in the connective tissue around and in PLA matrices was 1,500 (1,350; 1,550) per 1 mm² of a slice. Pronounced leukocytic reaction due to lymphocytosis was noted (an increase by 1.7 times compared with a sham-operated (SO) control group, р < 0.02). The absence of a significant neutrophil count in the blood revealed sterile inflammation proceeding in the subcutaneous tissue around the PLA materials. Normalization of hepatic cytolysis markers (ALT and AST activity) in the blood without pronounced changes in the structure of the liver and the number of binuclear hepatocytes was noted. These markers were increased in SO controls (ALT up to 123% and AST up to 142%, p < 0.001 compared with values in the intact group).Conclusion. Nonwoven PLA matrices are biocompatible with subcutaneous tissue, undergo bioresorption by MNGCs, and have a distant protective effect on the functional state of the liver in laboratory animals. Hypotheses on the detected systemic effect during subcutaneous implantation of PLA matrices were discussed; however, specific mechanisms require further study.

Effect of Oxygen on Water Vapor Oxidation of Fe by Oxygen Partial Pressure Control Using Gas Sensor

An oxygen pump sensor was installed in front of an oxidation furnace to supply and discharge oxygen to the Ar–H2O atmosphere and accurately control the oxygen partial pressure in the atmosphere. Furthermore, the oxidation rate was set after the oxidation furnace. It was measured by an oxygen sensor and a hydrogen sensor. Pure iron was used as the sample. The purpose of this study was to clarify the oxidation behavior of water vapor and oxygen. As a result, it was clarified that the amount of hydrogen generated by the oxidation of water vapor and Fe decreases when oxygen is supplied. In addition, when the oxygen supply amount increased, oxidation by the water vapor did not occur. On the other hand, it was clarified that when oxygen in the atmosphere is discharged, oxidation by oxygen is suppressed and only oxidation by the water vapor occurs. In the cross-sectional microstructure after oxidation, Fe3O4 was formed in the outer layer in the environment where the oxygen was discharged, but by supplying oxygen, the oxide layer became thicker and Fe2O3 was formed in the outer layer. The mass gain increased as the oxygen was supplied. Considering the ratio of oxidation by water vapor and oxidation by oxygen, it was clarified by this method that the mass gain is greater when the oxidation by oxygen is dominant.

Incorporation of tritium by pepper and eggplant cultures with short-term exposure to tritium oxide

Incorporation of tritium by pepper and eggplant cultures with short-term exposure to tritium oxide

Identification of Nano-Metal Oxides That Can Be Synthesized by Precipitation-Calcination Method Reacting Their Chloride Solutions with NaOH Solution and Their Application for Carbon Dioxide Capture from Air-A Thermodynamic Analysis.

Several metal oxide nanoparticles (NPs) were already obtained by mixing NaOH solution with chloride solution of the corresponding metal to form metal hydroxide or oxide precipitates and wash-dry-calcine the latter. However, the complete list of metal oxide NPs is missing with which this technology works well. The aim of this study was to fill this knowledge gap and to provide a full list of possible metals for which this technology probably works well. Our methodology was chemical thermodynamics, analyzing solubilities of metal chlorides, metal oxides and metal hydroxides in water and also standard molar Gibbs energy changes accompanying the following: (i) the reaction between metal chlorides and NaOH; (ii) the dissociation reaction of metal hydroxides into metal oxide and water vapor and (iii) the reaction between metal oxides and gaseous carbon dioxide to form metal carbonates. The major result of this paper is that the following metal-oxide NPs can be produced by the above technology from the corresponding metal chlorides: Al2O3, BeO, CaO, CdO, CoO, CuO, FeO, Fe2O3, In2O3, La2O3, MgO, MnO, Nd2O3, NiO, Pr2O3, Sb2O3, Sm2O3, SnO, Y2O3 and ZnO. From the analysis of the literature, the following nine nano-oxides have been already obtained experimentally with this technology: CaO, CdO, Co3O4, CuO, Fe2O3, NiO, MgO, SnO2 and ZnO (note: Co3O4 and SnO2 were obtained under oxidizing conditions during calcination in air). Thus, it is predicted here that the following nano-oxides can be potentially synthesized with this technology in the future: Al2O3, BeO, In2O3, La2O3, MnO, Nd2O3, Pr2O3, Sb2O3, Sm2O3 and Y2O3. The secondary result is that among the above 20 nano-oxides, the following five nano-oxides are able to capture carbon dioxide from air at least down to 42 ppm residual CO2-content, i.e., decreasing the current level of 420 ppm of CO2 in the Earth's atmosphere at least tenfold: CaO, MnO, MgO, CdO, CoO. The tertiary result is that by mixing the AuCl3 solution with NaOH solution, Au nano-particles will precipitate without forming Au-oxide NPs. The results are significant for the synthesis of metal nano-oxide particles and for capturing carbon dioxide from air.

Vapor-based fabrication of PEDOT coating for wearable strain sensors with excellent sensitivity and self-cleaning capability

Poly(3,4-ethylenedioxythiophene) (PEDOT) coating is advantageous in constructing flexible sensors, due to its good flexibility, high conductivity, and excellent physical and chemical stability. Traditional solution-based coating methods, however, are difficult to retain the micro- and nanostructures of the substrates, thus decreasing the sensitivity of the resulted sensors. In this work, we prepared superhydrophobic (SHB) strain sensors using a piezoresistive composite made from consecutive vapor deposition of conformal polymer coatings, i.e. PEDOT and poly(perfluorodecyl acrylate-co-ethylene glycol diacrylate) on fabrics using oxidative and initiated chemical vapor deposition methods. Compared with the pristine fabric sample, the composite materials displayed significantly improved initial currents, which are attributed to more conductive paths created by PEDOT coating. The resulted strain sensor displayed great flexibility, large sensitivity, wide sensing range, and excellent reliability. Furthermore, the sensor has been successfully employed to monitor various human motions in real time. The hydrophobic outer layer endows the sensor self-cleaning and durability capacities, indicating possible applications under harsh environment.

Multilevel view of charge transport in oCVD polymers

We report for the first time, a multilevel structure-property examination of three doped, unsubstituted polymers, polythiophene, polyaniline, and polypyrrole, deposited using oxidative chemical vapor deposition. Transmission electron micrographs (TEM) of each polymer not only indicate each forms a uniquely structured film, ranging from wires to symmetric platelets, but we also—for the first time—leverage energy dispersive TEM to examine the spatial distribution of the dopant atoms. The examination dives deeper and continues with a variable range hopping analysis of AC Hall data to calculate charge hopping distance and activation energy.

Oxidative chemical vapor deposition for synthesis and processing of conjugated polymers: a critical review

Oxidative chemical vapor deposition (oCVD) has developed progressively in the last two decades as a solvent-free (or dry) methodology for synthesis and thin film deposition of conjugated polymers.

An Assessment of Climate Smart Approaches to Reduce Emission of Greenhouse Gasses

Greenhouse gases (GHGs) are natural occurring gases in the atmosphere which interact with the sun to trap heat. This keeps the earth warmer and makes it a habitable planet to living organism. Example of these gases are carbon dioxide (CO2), methane (CH4), nitrous oxide (N2O), and water vapor. Over the years there has been a spike in human activities as the human world advances and more technological breakthrough are being achieved, these result in emission of increasingly large amount of these gases to the atmosphere. These gases are increasingly trapped in the earth surface, this trapped gasses result in an effect that increase the earth climate and temperature, the heightening temperature result makes the environment unfavorable to human, plant and animal. A lot of strategies have been employed in reducing greenhouse effect such as afforestation, changing the energy source but as a result of developing increasing human activities, the effect are becoming less or minimal. Excessive evaporation of water, increase in rainfall, desertification of some environment and flooding of others, drought, erosion are some of the impact of GHGs to the environment. This also causes migration of animals to cooler region and evolution of some plants to adapt to the constant changing weather. This has impacted heavily on the ecosystem displacing balance of the biogeochemical circles. Many researchers over the time have discovered the role of GHGs in earth atmosphere. This paper examined the methods in mitigating GHGs and its impact on the environment. Different method has been employed in mitigating greenhouse effect but due to the high concentration of CO2 most of these method are centralized in it reduction, capturing or introduction of new renewable energy that will not increase the concentration of GHGs in the atmosphere but most of these strategies are unable to be employed on a large scale. Another method is the use of living organism such as plant and microorganism. Plant generally use CO2 as energy source and are able to utilize it and reduce the concentration in the atmosphere, in this method plant is use to capture the CO2 in the atmosphere. Microorganisms has a wide range of adaptability to different environments, this is own to their capability to utilize different source of energy for growth and their ability to evolve in an extreme environment. Microorganism plays a key role in biogeochemical cycle, fostering plant development, degradation of organic matter, fixing atmospheric nitrogen and carbon, thereby reducing the emitted GHGs in the atmosphere. There is need for constant monitoring of the environment and developing suitable, low cost method in mitigating the GHGs emission in the atmosphere.

Measuring the efficiency of greenhouse gases to absorb heat

Greenhouse gases are a very important part of the Earth’s atmosphere that cause the Earth to warm enough to support life, but when they are too abundant can also cause global warming. To find out which greenhouse gas has the greatest effect on temperature, we measured the percent temperature change over time in three of the four major greenhouse gases (water vapor, carbon dioxide, and nitrous oxide) compared to regular air when exposed to the sun. We measured this by putting a thermometer in bottles containing each of the gases. We hypothesized that carbon dioxide would have the greatest percent temperature change. Indeed, we found the temperature of the bottle containing carbon dioxide went up by 41.64%, which was higher than the other gases. We also observed that nitrous oxide had the lowest percentage change, which was 32.19%. Our results suggested that carbon dioxide has the greatest effect on temperature, which could have many ramifications. Carbon dioxide is present everywhere in the atmosphere. This means that the warming effect of carbon dioxide applies globally. Given that there is a large amount of carbon dioxide in the atmosphere and that carbon dioxide emissions are increasing, global warming will increase more leading to ice caps melting, resulting in harm to the environment and all life on Earth.

Thermal laser evaporation of elemental metal sources in oxygen

Thermal laser epitaxy (TLE) is a novel film growth technique capable of fabricating ultrapure films of many material systems. For growing oxide films with TLE, the impact of source oxidation on the evaporation rate is a central issue, which, however, has not yet been explored systematically. Here, we report a systematic, experimental study of the role of source oxidation on source evaporation at various oxygen pressures and source temperatures in TLE. The volatility of the oxidized metal sources affects the source evaporation rate. When the oxidized metal source is more volatile than the metal, the source evaporation rate increases with the oxygen supply. In a strongly oxidizing environment, stable oxides with lower volatility tend to form and decrease the evaporation rate of the source. Increasing the laser power—and thereby the source temperature—tends to prevent the formation of stable oxides. At even higher source temperatures, the metal vapor pressure can dominate the oxide vapor pressure even in a high oxygen pressure atmosphere. A power-law relation between deposition rate and oxidizing gas pressure is found in case the formation and evaporation of volatile oxides of the elemental source material dominates the total evaporation process. The exponent of this law is a measure of the relevance of source oxidation for the evaporation of the source.