Low-temperature plasmas (LTPs) are attractive sources for atomic and molecular mass spectrometry (MS). In the past, the LTP probe, which was first described by Harper et al., was used successfully for direct molecular mass spectrometric analysis with minimal sample pretreatment in a variety of applications. Unfortunately, the desorption/ionization source itself is commercially not available and custom-built LTP set-ups with varying geometry and operational configurations were utilized in the past.In the present study, a rapid chemometrics approach based on systematic experiments and multivariate data analysis was used to optimize the LTP probe geometry and positioning relative to the atmospheric-pressure inlet of a mass spectrometer. Several parameters were studied including the probe geometry, electrode configuration, quartz tube dimensions, probe positioning and operating conditions. It was found that the plasma-to-MS-inlet distance, the plasma-to-sample-plate distance, and the angle between the latter are very important. Additional effects on the analytical performance were found for the outer electrode width, the positioning of the electrodes, the inner diameter of the quartz tube, the quartz wall thickness, and the gas flow. All experiments were performed using additional heating of the sample to enhance thermal desorption and maximize the signal (T=150°C). After software-assisted optimization, attractive detection limits were achieved (e.g., 1.8×10−7mol/L for 4-acetamidothiophenol). Moreover, relative standard deviation (RSD) improved from values of up to 30% before optimization to <15% RSD after the procedure was completed. This chemometrics approach for method optimization is not limited to LTP-MS and considered to be attractive for other plasma-based instrumentation as well.