Cleavage faces of LiF single crystals were studied by the Berg-Barrett method of X-rays. (i) Boundary lines of subgrains with small tilt angle show the intensity enhancement. The intensity enhancement is also seen for boundaries lying closely to the surface. (ii) As to deformations produced by cleaving, more informations such as slip directions are obtained than in etce-pit photographs. (iii) Furthermore, outcrops of individual dislocations arrayed in a boundary line or scattered in the interior of a grain are resolved. Dislocation half-loops lying closely to the surface in a slip line are also observed. In each type of the defects above mentioned the direction of Burgers vector is determined.