In the present study, monosubstituted structures with 16 substitutions in the ortho, meta, and para positions of silabenzene have been comprehensively compared with similar structures in benzene. This study aimed to investigate the effect of Si atom incorporation in the benzene ring. This comparison investigated the chemical properties, including structural geometries of molecules, molecular orbitals and reactivity, ring aromaticity, and excitation energy of each monosubstituted silabenzene and benzene structure. The density functional theory (DFT) at the B3LYP/6–311G++(d,p) level of theory was used to perform all relevant calculations. In addition to changes in ring geometry values and electron donating, the results showed that the Si atom incorporation in benzene ring and its monosubstituted derivatives in different positions caused a significant decrease in LUMO, chemical hardness, ring aromaticity, excitation energy, and a significant increase in HOMO, electrophilicity, nucleophilicity, and NMR chemical shift values. Among the positions of the substituents concerning the Si atom in the ring, the ortho and para positions exhibited the most optimal values. In contrast, the meta position displayed different values compared to the ortho and para positions. This difference is attributed to the electron-withdrawing effects of the substituents. Also, among substitutions, electron-donating substitutions especially -NH2 compared to electron-withdrawing substitutions especially -NO2 decreased HOMO, electrophilicity, excitation energy, and increased LUMO, chemical hardness, nucleophilicity, and ring aromaticity.