This paper focuses on the grain growth mechanisms and magnetic properties of FePt thin films during an annealing process. The grain size and grain orientation distribution have been quantitatively investigated by electron backscatter diffraction (EBSD), and the grain growth kinetics of thin films were described by the phenomenological kinetic grain growth model. The results show that the grain growth exponent and activation energy of the FePt thin films were 4.26 and 136 kJ/mol respectively, indicating that the grain growth mechanism is mainly controlled by the stochastic jumping of atoms crossing the grain boundaries. X-ray diffraction (XRD) results show that disorder-order transformation was concurrent with grain growth during the annealing process, slowing down the velocity of grain growth. The hysteresis loops reveal that the out-of-plane coercivity and squareness is enhanced with increasing annealing temperature and this can be attributed to the improvement of L10-ordered phase volume fraction and texture intensity.