Porous aluminum anodic oxide films fabricated by anodizing in phosphoric acid electrolyte containing organic acid were investigated by scanning electron microscope (SEM) and Atomic Force Microscopy (AFM). The results showed that the pores with circular or near elliptical honeycomb structure did not grow along the processing direction of the matrix and present an optimum ordering. It also indicated that the adding of the organic acid reduces the defects during the oxide film growing process and increases the stability and uniformity of the oxide film, and the thickness of the oxide film is significantly increased.