In response to the problems of wrinkling and fracture in the single-stage micro deep drawing of TA1 pure titanium (Ti) foils, a blanking and multi-stage micro deep drawing (MMDD) forming system has been developed to facilitate the production of micro parts directly from sheet metal. In this study, the influence of size effect on the deformation behavior of TA1 pure Ti foils (50 μm) and the surface quality of the formed cups during MMDD was investigated. It is found that MMDD includes blank bending and the ironing effect during the continuous drawing stages. The deformation forces generated in the second and third stages exceed those resulting in the first stage, and the size effect appeared during the first stage. However, the uncertainty of the ironing effect leads to the attenuation of the size effect in the continuous stages. Moreover, {101̅0} and {112̅0} textures, are identified in the planar direction of the as-received material and contribute to wrinkling and earing, damaging the quality of parts. Subsequently, annealing at 600 °C for 60minutes results in a weakening of the {101̅0} and {112̅0} textures, with the emergence of the {0001} texture. This transformation improves the anisotropy of pure Ti and the quality of parts. But, annealing at 650 °C and 700 °C, the non-uniform plastic deformation of coarse grains adversely impacts the quality of parts, leading to wrinkling or even fracture. Consequently, the optimal annealing temperature for TA1 pure Ti foil blanks in MMDD is 600 °C.
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