Flow cytometry-based measurement techniques have been widely used for single-cell characterizations, such as impedance, size, and dielectric properties. However, in the measurement process, the reliability of the output measurement signal directly affects the ability of the microsystem to judge the characteristics of single cells. Here, we designed a multiple nonparallel electrode structure for single-cell 3D localization. The performance of the structures was studied by analyzing the changes in electric field strength and the output differential current. The effects of microchannel height, sensing electrode distance, electrode inclination angle, and electrode width on output signals are investigated by analyzing the current change and electric field strength of single cells passing from the center of the microchannel. The numerical simulation results indicate that, when the microchannel height is 20 µm, the distance of the sensing electrodes is 100 µm, the inclination angle is 30°, the electrode width is 20 µm, and the optimal signal quality can be obtained. Reducing the height of the flow channel and shortening the sensing electrode spacing can significantly improve the signal amplitude. When the channel height is 20 µm, the signal intensity increases by 80% than that of 30 µm. The signal intensity of induced current with the sensing electrode spacing of 100 µm is 42% higher than that with the spacing of 120 µm. We analyzed the presence of multiple independent cells and adherent cells in the detection area and demonstrated through simulation that the signal changes caused by multi-cells can be superimposed by multiple single-cell signals. The induced current signal intensity of the same volume of cells with an ellipticity of 1 is 49% lower than that of cells with an ellipticity of 4. Based on the numerical investigation, we expect that the optimal geometry structure design will aid in the development of better performance signal cell impedance cytometry microsystems.
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