Cold gas dynamic spray, usually called as cold spray, is a new technique that provides dense and low oxide content metallic coating. In order to evaluate the possibility of on-site repair of aluminum components, residual stress distribution of an aluminum coating and a substrate that produced by low pressure type cold spraying were investigated. The residual stress distribution of the aluminum coating and the substrate in thickness direction were performed by the strain scanning method in synchrotron radiation facility SPring-8. As a result, the maximum compressive residual stress was obtained at the coating surface, and the residual stress inside the coating were approximately zero. On the other hand, the residual stress of the substrate were tensile. The compressive residual stress at the surface of the coating role of closing a crack.