The reactivity of Ba2YCu3O7 to metal oxides and carbonates was studied to develop a substrate material for superconducting oxide films, The superconducting oxide of Ba2YCu3O7 reacted with most of the conventional substrate materials to form oxide compounds. BaZrO3, SrCO3, and CaSiO3 were less reactive to Ba2YCu3O7, and the onset critical temperature of Ba2YCu3O7 remained unaltered after heating with these materials at 1223K. Zero resistivity temperature (Tc (end)), however, decreased depending on these materials. Coexistence of the substrate materials during heating increased the amount of oxygen vacancies in Ba2YCu3O7, resulting in an increased lattice constant of c axis of Ba2YCu3O7, The substrate materials for preparing high Tc superconducting oxide films require no interaction with the amount of oxygen vacancy of Ba2YCu3O7 in addition to the low chemical reactivity to Ba2YCu3O7, CaSiO3 and BaZrO3 were excellent substrate materials.