On-chip Spectrometer Research Articles

Folded Digital Meta-Lenses for on-Chip Spectrometer.

In-plane diffractive optical networks based on meta-surfaces are promising for on-chip application. The design constraints of regular antenna unit place ultimate limits on the functionalities of the meta-systems. This fundamental limitation has been reflected by the large footprints of cascaded meta-surfaces. Here, we propose a digital meta-lens with a large degree of design freedom, enabling significantly improved beam focusing, collimation, and deflection capabilities. A highly dispersive and compact diffractive optical system is constructed for spectrometer via five layers of meta-lenses in a folded configuration. The device only occupies a 100 μm × 100 μm chip area on a silicon photonic platform. Sparse and continuous spectra reconstruction is achieved over a 35 nm bandwidth. Fine spectral lines separated by 0.14 nm are resolved. In addition to such a compact and high-resolution on-chip spectrometer, it is also expected to be promising for imaging, optical computing, and other applications due to the great versatility of the digital lens design.

High-performance, intelligent, on-chip speckle spectrometer using 2D silicon photonic disordered microring lattice

High-performance integrated spectrometers are highly desirable for applications ranging from mobile phones to space probes. Based on silicon photonic integrated circuit technology, we propose and demonstrate an on-chip speckle spectrometer consisting of a 15×15, 2D disordered microring lattice. The proposed 2D, disordered microring lattice was simulated by the transfer-matrix method. The fabricated device featured a spectral resolution better than 15 pm and an operating bandwidth larger than 40 nm. We also demonstrated that, based on the speckle patterns, our device can perform a spectrum classification using machine learning algorithms, which will have a huge potential in fast, intelligent material and chemical analysis.

Imaging-based intelligent spectrometer on a plasmonic rainbow chip

Compact, lightweight, and on-chip spectrometers are required to develop portable and handheld sensing and analysis applications. However, the performance of these miniaturized systems is usually much lower than their benchtop laboratory counterparts due to oversimplified optical architectures. Here, we develop a compact plasmonic “rainbow” chip for rapid, accurate dual-functional spectroscopic sensing that can surpass conventional portable spectrometers under selected conditions. The nanostructure consists of one-dimensional or two-dimensional graded metallic gratings. By using a single image obtained by an ordinary camera, this compact system can accurately and precisely determine the spectroscopic and polarimetric information of the illumination spectrum. Assisted by suitably trained deep learning algorithms, we demonstrate the characterization of optical rotatory dispersion of glucose solutions at two-peak and three-peak narrowband illumination across the visible spectrum using just a single image. This system holds the potential for integration with smartphones and lab-on-a-chip systems to develop applications for in situ analysis.

Low temperature sensitivity on-chip Fourier-transform spectrometer based on dual-layer Si3N4 spiral waveguides

On-chip Fourier-transform spectrometers (FTSs) based on Mach–Zehnder interferometer (MZI) arrays suffer from severe central wavelength and fringe contrast variation due to fabrication errors. Even though a calibration matrix can be employed to correctly retrieve the input spectra, environmental temperature variation greatly degrades the retrieving performance. In this paper, we devise a dual-layer Si3N4 waveguide interferometer to reduce the temperature sensitivity. The beating of the even and odd supermodes in the dual-layer waveguide generates periodic intensity fluctuations in the spectrum. Since these two modes have similar modal profiles, their thermal sensitivity and propagation loss are relatively balanced, leading to a low temperature sensitivity and a high interference extinction ratio. We designed and fabricated a passive FTS based on a 32-channel dual-layer Si3N4 waveguide array. Experimental results show that the temperature sensitivity is reduced to 10 pm/°C, which is almost half that of single-layer Si3N4 MZI-based FTSs. With this chip, we accurately reconstructed various types of optical spectra, including single and two sparse laser lines, and broadband optical spectra. Our method can fit a wide wavelength range, which is a promising technology to improve the practical applications of on-chip FTSs.

A horn-coupled millimetre-wave on-chip spectrometer based on lumped-element kinetic inductance detectors

Context. Millimetre-wave astronomy is an important tool for both general astrophysics studies and cosmology. A large number of unidentified sources are being detected by the large field-of-view continuum instruments operating on large telescopes. Aims. New smart focal planes are needed to bridge the gap between the large bandwidth continuum instruments operating on single-dish telescopes and high spectral and angular resolution interferometers (e.g. ALMA in Chile and NOEMA in France). The aim is to perform low to medium spectral resolution observations and select a lower number of potentially interesting sources (i.e. high-redshift galaxies) for further follow-up. Methods. We have designed, fabricated, and tested an innovative on-chip spectrometer sensitive in the 85–110 GHz range. It contains 16 channels, each of which covers a frequency band of about 0.2 GHz. A conical horn antenna coupled to a slot in the ground plane collects the radiation and guides it to a millimetre-wave microstrip transmission line placed on the other side of the mono-crystalline substrate. The millimetre-wave line is coupled to a filter-bank spectrometer. Each filter is capacitively coupled to a lumped-element kinetic inductance detector (LEKID). The microstrip configuration provides the benefit of low loss, due to the mono-crystalline substrate, and protects the LEKIDs from illumination by stray un-filtered light. Results. The prototype spectrometer exhibits a spectral resolution R = λ/Δλ ≈ 300. The optical noise equivalent power is in the low 10−16 W Hz−1/2 range for an incoming power of about 0.2 pW per channel. The device is polarisation-sensitive, with a cross-polarisation lower than 1% for the best channels.

Biosensing with Silicon Nitride Microring Resonators Integrated with an On-Chip Filter Bank Spectrometer.

Wearable, mobile, and point-of-care (POC) sensors comprise a rapidly expanding field of devices aimed at improving human health by relaying real-time biometric data such as heart rate and glucose levels. The current scope of what these devices can offer healthcare is limited by their inability to measure biomarkers associated with inflammation, well-being, and disease. Photonic biosensors that integrate sensing elements directly with spectrometers, lasers, and detectors are an attractive approach to enabling POC sensors, with distinct advantages in terms of size, weight, power consumption, and cost. Here, we have demonstrated for the first time the integration of photonic microring resonator biosensors with an on-chip microring filter bank spectrometer for the controlled detection of inflammatory biomarker C-reactive protein (CRP) in serum. We demonstrate that sensor and spectrometer performance is tolerant of temperature variation, as temperature dependence moves in parallel. Finally, we assess the impact of manufacturing variability on the 300 mm wafer scale on the performance of the spectrometer. Taken together, these results suggest that integration of on-chip ring filter bank spectrometers with ring resonator-based biosensors constitutes an attractive approach toward cost-effective integrated sensor development.

On-chip Raman spectrometers using narrow band filter array combined with CMOS image sensors

Recent advancements in nanotechnology raise the feasibility of a miniaturized, portable Raman spectrometer with promising applications such as material identification, food safety monitoring, and health care. Miniaturizing Raman spectrometers has remained a challenge owing to the inevitable weakness of Raman signals and the conflict between small size and spectral resolution. In this study, we present a portable mini-Raman spectrometer comprising a complementary metal–oxide semiconductor (CMOS) image sensor (CIS) integrated with an array of filter sets, a confocal probe, and a laser diode that successfully meets the miniaturization challenge. We also report successful measurement of Raman spectra using the CIS-based mini-spectrometer, measuring cyclohexane liquid, tylenol pills, and vitamin-C pills with high spectral resolution. Our mini-Raman spectrometer, which can measure Raman signals in a two-dimensional (2D) image format in a single-shot, can be embedded into commercial mobile phones and transformed into a promising Raman camera.

An On-Chip Photon-Counting Reconstructive Spectrometer with Tailored Cascaded Detector Array

The hybrid integration of superconducting nanowire single-photon detectors (SNSPDs) on various substrates and photonic structures has great potential on developing complicated photonic devices based on single-photon detections, such as photon-counting reconstructive spectrometers for the spectral sensing of single-photon level faint light. In this paper, we introduce the cascaded absorption effect of SNSPDs to develop a photon-counting reconstructive spectrometer. The device includes a Rowland grating as the spatial dispersion element and a tailored cascaded SNSPD array in the focusing region of the grating. The spectral responses of the SNSPDs could be flexibly modulated by their coiled patterns and the cascaded absorption in the array, which are used as the bases for spectral reconstruction. A prototype device was designed and fabricated to demonstrate the principle of the scheme. The experiment results showed the feasibility of the spectral response modulations by the coiled pattern design and the cascaded absorption effect of the SNSPD array. It supports the spectral measurement and reconstruction in the wavelength range of 1,495 to 1,515 nm, with a spectral resolution of 0.4 nm. The proposed scheme achieves the bases for spectral reconstruction only by the design of SNSPDs and without the spectral modulation effects of additional photonic structures. It provides an interesting and promising way to develop devices with high photon utilization.

Development of Superconducting On-chip Fourier Transform Spectrometers.

Superconducting On-chip Fourier Transform Spectrometers (SOFTS) are broadband, ultra-compact and electronic interferometers. SOFTS will enable kilo-pixel spectro-imaging focal planes, enhancing sub-millimeter astrophysics and cosmology. Particular applications include cluster astrophysics, cosmic microwave background (CMB) science, and line intensity mapping. This article details the development, design and bench-marking of radio frequency (RF) on-chip architecture of SOFTS for Ka and W-bands.

Sub-terahertz silicon-based on-chip absorption spectroscopy using thin-film model for biological applications

Spectroscopy in the sub-terahertz (sub-THz) range of frequencies has been utilized to study the picosecond dynamics and interaction of biomolecules. However, widely used free-space THz spectrometers are typically limited in their functionality due to low signal-to-noise ratio and complex setup. On-chip spectrometers can revolutionize THz spectroscopy allowing integration, compactness, and low-cost fabrication. In this paper, a low-loss silicon-based platform is proposed for on-chip sub-THz spectroscopy. Through functionalization of silicon chip and immobilization of bio-particles, we demonstrate the ability to characterize low-loss nano-scale biomolecules across the G-band (0.14–0.22 THz). We also introduce an electromagnetic thin-film model to account for the loading effect of the immobilized biomolecules, i.e. dehydrated streptavidin and immunoglobulin antibody, as two key molecules in the biosensing discipline. The proposed platform was fabricated using a single mask micro-fabrication process, and then measured by a vector network analyzer (VNA), which offers high dynamic range and high spectral resolution measurements. The proposed planar platform is general and paves the way towards low-loss, cost-effective and integrated sub-THz biosensors for the detection and characterization of biomolecules.

Super-Resolution Displacement Spectroscopic Sensing over a Surface "Rainbow".

Subwavelength manipulation of light waves with high precision can enable new and exciting applications in spectroscopy, sensing, and medical imaging. For these applications, miniaturized spectrometers are desirable to enable the on-chip analysis of spectral information. In particular, for imaging-based spectroscopic sensing mechanisms, the key challenge is to determine the spatial-shift information accurately (i.e., the spatial displacement introduced by wavelength shift or biological or chemical surface binding), which is similar to the challenge presented by super-resolution imaging. Here, we report a unique "rainbow" trapping metasurface for on-chip spectrometers and sensors. Combined with super-resolution image processing, the low-setting 4× optical microscope system resolves a displacement of the resonant position within 35 nm on the plasmonic rainbow trapping metasurface with a tiny area as small as 0.002 mm2. This unique feature of the spatial manipulation of efficiently coupled rainbow plasmonic resonances reveals a new platform for miniaturized on-chip spectroscopic analysis with a spectral resolution of 0.032 nm in wavelength shift. Using this low-setting 4× microscope imaging system, we demonstrate a biosensing resolution of 1.92 × 109 exosomes per milliliter for A549-derived exosomes and distinguish between patient samples and healthy controls using exosomal epidermal growth factor receptor (EGFR) expression values, thereby demonstrating a new on-chip sensing system for personalized accurate bio/chemical sensing applications.

SuperSpec: On-Chip Spectrometer Design, Characterization, and Performance

SuperSpec is an integrated, on-chip spectrometer for millimeter and sub-millimeter astronomy intended to pave the way for large-scale, multi-beam spectrometer instruments. SuperSpec is demonstrating a three beam, dual-polarization instrument for observing star formation in distant galaxies on the Large Millimeter Telescope , a 50 m telescope on Volcan Sierra Negra in Mexico. SuperSpec provides moderate resolution ( $$R \sim 270-290$$ ) in the 1 mm atmospheric window (200–300 GHz) with a lithographically patterned filterbank on a 3.5 cm x 5.5 cm chip. The filterbank intended for deployment is implemented in niobium, fed by a lensed antenna, and using a extremely low-volume ( $$2.6 \mu m^3$$ ) titanium nitride lumped element kinetic inductor detectors (LEKIDs) as the sensors. The small size of the spectrometer and inherent multiplexibility of the kinetic inductance detectors will allow the future use of SuperSpec in larger, multi-pixel/multi-object spectrometers far beyond the three-pixel spectrometer being demonstrated soon. We report the design of the spectrometer, laboratory characterization of devices for the upcoming SuperSpec deployment. This involves laboratory testing of the filterbank spectral response, and observing noise in the TiN KIDs.

Guided mode resonance aided polarization insensitive in-plane spectral filters for an on-chip spectrometer.

We demonstrate an on-chip in-plane polarization independent multi-spectral color filter in the visible to near-infrared wavelength band. We experimentally show a four-channel transmission and in-plane spectral filter characteristics spanning a 400-nm spectral range. Engineered 2D guided mode resonance structures in a silicon nitride-on-sapphire substrate are used to realize the filters. The in-plane color filters could provide the necessary impetus for developing robust integrated photonic platforms for on-chip devices and applications.

Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist

We present a “mix-and-match” process to create large structures with submicrometer features by combining UV contact lithography and 100 kV electron-beam lithography in a single layer of negative-tone resist: Micro-Resist-Technology ma-N1405. The resist is successfully applied for the fabrication of an on-chip terahertz spectrometer, where the design requires 450 nm wide lines and 300 nm wide trenches in a 150 nm thick niobium-titanium-nitride layer, tolerating errors of ±30 nm. We use a resist thickness of 500 nm, optimized to allow reliable SF6/O2-based reactive ion etching of structures with 30 nm accuracy. We find that resist requires an electron-beam cross-linking dose of 1100 μC/cm2 for an acceleration voltage of 100 kV in combination with a 180 s 100 °C bake on a hot plate and 45 s development. The smallest resist bars made with our dedicated recipe are 100 nm wide, with the smallest gaps about 300 nm. The difference between the designed and realized feature size is between 2 and 30 nm for structures up to 700 nm wide. The optical exposure dose is 300 mJ/cm2 for the same development time and is optimized to produce a positive sloped edge profile allowing good step coverage for subsequent layers. The resist can be applied, shipped, and processed in a time span of a couple of days without notable deterioration of patterning quality.

A Single-Dot Perovskite Spectrometer.

There are significant applications for miniature on-chip spectrometers in many fields. However, at present, on-chip spectrometers have to utilize an integrated strategy to achieve spectral analysis, which undoubtedly squanders the photosensitive area and adds pressure to the miniaturization of the spectrometer. Here, a unique spectrometer design that adopts a single detection point with in situ modulation realized by the photogain control at various bias voltages is demonstrated. With micrometer-level footprints, this single-dot spectrometer processes a resolution of about 5nm and a response time down to about 197 µs. This is the first in situ perovskite modulation strategy that breaks the footprint-resolution restriction of spectrum analysis and demonstrates a new design direction for functional perovskite devices.

How to Impede Hydrogen Evolution on Carbon Based Materials?

Hydrogen is a highly attractive zero-emission energy sector. However, in many electrochemical systems, such as carbon dioxide reduction, batteries and supercapacitors hydrogen evolution reaction (HER) is an undesired competing reaction. It is therefore important to tailor these electrochemical systems in order to minimise hydrogen production. Carbon black materials are often added to the catalyst layers as they are low cost, abundant, inert, and have a high conductivity and surface area. This work has investigated HER activities for seven different commercial carbon materials to identify the required structural properties of carbon for minimizing the hydrogen evolution reaction.Rotating disk electrode, X-ray diffraction, and nitrogen adsorption/ desorption were used to determine the electrochemical and physical characteristics of the carbon materials. An on-chip electrochemical mass spectrometer was used to further probe the gaseous products being produced at the electrode insitu; we established that the exact onset of the HER at -0.4 V vs RHE, as shown in Figure 1. Furthermore, we have correlated our electrochemical experiments to earlier characterization data on the same carbon materials, including: X-ray photoelectron spectroscopy, elemental analysis (e.g. Fe, H, S, C) using neutron activation analysis.1 Our results indicate that the most graphitic carbons with low amount of metal impurities are the best for inhibiting H2 evolution. V Čolić, S. Yang, Z Révay, I E L Stephens & I Chorkendorff, Electrochim Acta, 2018, 272, 192–202. Figure 1

Visible (400- to 700-nm) chirped-grating-coupled waveguide spectrometer.

An integrable on-chip spectrometer, based on a transversely-chirped-grating waveguide-coupler for the 400- to 700-nm visible spectral range is demonstrated. For a fixed angle of incidence, the coupling wavelength is dependent on the local grating period and the waveguide structure. The transversely-chirped-input grating is fabricated on a SiO2-Si3N4-SiO2 waveguide atop a Si substrate by interferometric lithography in two sections on a single silicon substrate. A uniform period grating, separated from the input coupler by a propagation region, is provided for out-coupling to a 2048 element CMOS detector array. The incident light with wavelength spanning 400- to 700-nm is coupled into waveguide at 33.5° through the chirped grating coupler. A resolution of ∼ 1.2 nm is demonstrated without any signal processing reconstruction.

Cascaded nanobeam spectrometer with high resolution and scalability

An on-chip reconstruction spectrometer provides a powerful approach for miniaturized and portable applications. Owing to the cross-correlation and line shape of broadband responses, the reconstruction spectrometer exhibits limited resolution and a fixed bandwidth. Here we demonstrate a cascaded nanobeam spectrometer with assistance of a reconstruction algorithm. The transmissions of tunable Fano-enhanced nanobeams (FENs) are of good orthogonality and have improved quality factors. We retrieved a narrowband signal of 0.16 nm linewidth and a dual peak at 0.32 nm distance for resolution characterization. This result breaks the limit of the full width at half maximum for narrowband filter spectrometers. An expanded bandwidth is realized by a three-channel cascaded device, and signal spectra in the 16 nm range are reconstructed successfully. Each FEN unit has an ultra-compact footprint of 18 × 18 µ m 2 . In view of the improved performance and flexibility, our concept is an ideal candidate for precise and miniaturized applications.

How to Minimise Hydrogen Evolution on Carbon Based Materials?

In many electrochemical systems, such as carbon dioxide reduction, batteries and supercapacitors, hydrogen evolution reaction is an undesired competing reaction. Herein, we investigate the factors controlling the hydrogen evolution reaction (HER) on seven different commercial carbon materials commonly found in many of these systems. The electrochemical HER response was determined by rotating disk electrode potential hold measurements in acidic media, and correlated with the physical characteristics of the carbon materials determined nitrogen adsorption/desorption, as well as previous experiments on the same materials. An on-chip electrochemical mass spectrometer was used to probe the gaseous products produced at the electrode in situ, which allowed HER to be distinguished from other competing reaction and the onset of the reaction was established to be −0.38 V vs RHE. The results indicate that carbons with low amount of metal impurities have the lowest H2 evolution rates.

SPT-SLIM: A Line Intensity Mapping Pathfinder for the South Pole Telescope

The South Pole Telescope Summertime Line Intensity Mapper (SPT-SLIM) is a pathfinder experiment that will demonstrate the use of on-chip filter-bank spectrometers for mm-wave line intensity mapping (LIM). The SPT-SLIM focal plane consists of 18 dual-polarization R=300 filter-bank spectrometers covering 120-180 GHz, coupled to aluminum kinetic inductance detectors. A compact cryostat holds the detectors at 100 mK and performs observations without removing the SPT-3G receiver. SPT-SLIM will be deployed to the 10-m South Pole Telescope for observations during the 2023-24 austral summer. We discuss the overall instrument design, expected detector performance and sensitivity to the LIM signal from CO at 0.5 < z < 2. The technology and observational techniques demonstrated by SPT-SLIM will enable next-generation LIM experiments that constrain cosmology beyond the redshift reach of galaxy surveys.