On-chip Generation Research Articles

Microwave-resonator-enabled broadband on-chip electro-optic frequency comb generation

Optical frequency combs play a crucial role in optical communications, time-frequency metrology, precise ranging, and sensing. Among various generation schemes, resonant electro-optic combs are particularly attractive for their excellent stability, flexibility, and broad bandwidths. In this approach, an optical pump undergoes multiple electro-optic modulation processes in a high-Q optical resonator, resulting in cascaded spectral sidebands. However, most resonant electro-optic combs to date make use of lumped-capacitor electrodes with relatively inefficient utilization of the input electrical power. This design also reflects most electrical power back to the driving circuits and necessitates costly radio-frequency (RF) isolators in between, presenting substantial challenges in practical applications. To address these issues, we present an RF circuit friendly electro-optic frequency comb generator incorporated with on-chip coplanar microwave resonator electrodes, based on a thin-film lithium niobate platform. Our design achieves more than three times electrical power reduction with minimal reflection at the designed comb repetition rate of ∼25 GHz. We experimentally demonstrate broadband electro-optic frequency comb generation with a comb span of >85 nm at a moderate electrical driving power of 740 mW (28.7 dBm). Our power-efficient and isolator-free electro-optic comb source could offer a compact, low-cost, and simple-to-design solution for applications in spectroscopy, high-precise metrology, and optical communications.

Controllable on-chip generation and detection of path-entangled microwave photons

Controllable on-chip generation and detection of path-entangled microwave photons

Highly coherent on-chip mid-infrared supercontinuum generation from 1.5 to 25 μm in CdTe-based Rib waveguide

Highly coherent on-chip mid-infrared supercontinuum generation from 1.5 to 25 μm in CdTe-based Rib waveguide

Simultaneous on-chip generation of violet, blue, cyan, green, yellow, orange, and red light from an octave-spanning infrared frequency comb

Simultaneous on-chip generation of violet, blue, cyan, green, yellow, orange, and red light from an octave-spanning infrared frequency comb

On-Chip Thermoelectric Devices Based on Standard Silicon Processing.

The strong reduction of thermal conductivity with respect to bulk silicon makes nanostructured silicon one of the best materials for highly efficient direct conversion of heat into electrical power and vice-versa. The widespread technologies for the integration of silicon devices can be used to define on-chip micro thermoelectric generators (scavengers); similar structures could also be used for precise and well-localized cooling through the reverse process of heat pumping. However, the road to the fabrication of integrated thermal energy scavengers or cooler, based on silicon, is still very long. In this work, the design and the fabrication process of on-chip thermoelectric devices based on a large number of interconnected monocrystalline silicon nanobeams, very tall (>1 µm) and thin (less than 200 nanometers), arranged in large areas combs is shown. The small width of the nanobeams gives a reduced thermal conductivity, and the height perpendicular to the substrate allows the definition of a highly dense collection of nanostructures. The total cross-sectionis far broader than that of other nanostructures, a characteristic that guarantees both mechanical stability and larger deliverable power per unit area.

CMOS compatible TeO2—coated Si3N4 inverse parabolic rib waveguide for on-chip supercontinuum generation and high resolution OCT

CMOS compatible TeO2—coated Si3N4 inverse parabolic rib waveguide for on-chip supercontinuum generation and high resolution OCT

Hybrid III-V/Silicon Quantum Photonic Device Generating Broadband Entangled Photon Pairs

The demand for integrated photonic chips combining the generation and manipulation of quantum states of light is steadily increasing, driven by the need for compact and scalable platforms for quantum information technologies. While photonic circuits with diverse functionalities are being developed in different single material platforms, it has become crucial to realize hybrid photonic circuits that harness the advantages of multiple materials while mitigating their respective weaknesses, resulting in enhanced capabilities. Here, we demonstrate a hybrid III-V/silicon quantum photonic device combining the strong second-order nonlinearity and direct band gap of the III-V semiconductor platform with the high maturity and CMOS compatibility of the silicon photonic platform. Our device embeds the spontaneous parametric down-conversion (SPDC) of photon pairs into an AlGaAs source and their vertical routing to an adhesively bonded silicon-on-insulator circuitry, within an evanescent coupling scheme managing both polarization states. This enables the on-chip generation of broadband (>40 nm) telecom photons by type-0 and type-2 SPDC from the hybrid device, at room temperature and with internal pair generation rates exceeding 105s−1 for both types, while the pump beam is strongly rejected. Two-photon interference with 92% visibility (and up to 99% upon 5-nm spectral filtering) proves the high energy-time entanglement quality of the produced quantum state, thereby enabling a wide range of quantum information applications on chip, within a hybrid architecture compliant with electrical pumping and merging the assets of two mature and highly complementary platforms in view of out-of-the-lab deployment of quantum technologies. Published by the American Physical Society 2024

Modal phase-matching in thin-film lithium niobate waveguides for efficient generation of entangled photon pairs.

Thin-film lithium niobate (TFLN) waveguides have emerged as a pivotal platform for on-chip spontaneous parametric down-conversion (SPDC), serving as a crucible for the generation of entangled photon pairs. The periodic poling of TFLN, while capable of generating high-efficiency SPDC, demands intricate fabrication processes that can be onerous in terms of scalability and manufacturability. In this work, we introduce a novel approach to the generation of entangled photon pairs via SPDC within TFLN waveguides, harnessing the principles of modal phase-matching (MPM). To address the challenge of efficiently exciting pump light typically in a higher-order mode, we have engineered a mode converter that couples two asymmetrically dimensioned waveguides. This converter adeptly transforms the fundamental mode into a higher-order mode, demonstrating a conversion loss of 1.55 dB at 785 nm with a 3 dB bandwidth exceeding 30 nm. Subsequently, we have showcased the device's capabilities by characterizing the pair generation rate (PGR), coincidences-to-accidentals ratio (CAR), and spectral profile of the entangled photon source. Our findings present a simplified and versatile method for the on-chip generation of entangled photon sources, which may pave the way for the application in the realms of quantum information processing and communication technologies.

Efficient photon-pair generation in layer-poled lithium niobate nanophotonic waveguides

Integrated photon-pair sources are crucial for scalable photonic quantum systems. Thin-film lithium niobate is a promising platform for on-chip photon-pair generation through spontaneous parametric down-conversion (SPDC). However, the device implementation faces practical challenges. Periodically poled lithium niobate (PPLN), despite enabling flexible quasi-phase matching, suffers from poor fabrication reliability and device repeatability, while conventional modal phase matching (MPM) methods yield limited efficiencies due to inadequate mode overlaps. Here, we introduce a layer-poled lithium niobate (LPLN) nanophotonic waveguide for efficient photon-pair generation. It leverages layer-wise polarity inversion through electrical poling to break spatial symmetry and significantly enhance nonlinear interactions for MPM, achieving a notable normalized second-harmonic generation (SHG) conversion efficiency of 4615% W−1cm−2. Through a cascaded SHG and SPDC process, we demonstrate photon-pair generation with a normalized brightness of 3.1 × 106 Hz nm−1 mW−2 in a 3.3 mm long LPLN waveguide, surpassing existing on-chip sources under similar operating configurations. Crucially, our LPLN waveguides offer enhanced fabrication reliability and reduced sensitivity to geometric variations and temperature fluctuations compared to PPLN devices. We expect LPLN to become a promising solution for on-chip nonlinear wavelength conversion and non-classical light generation, with immediate applications in quantum communication, networking, and on-chip photonic quantum information processing.

High-Q integrated lithium tantalate microring resonators for on-chip comb generation.

Lithium tantalate on insulator (LTOI), taking advantage of high cost-effectiveness, ultra-low optical loss, and prominent electro-optic (EO) coefficient, shows great potential as an integrated waveguide-based optical platform for commercialization. Further research on monolithic nonlinear source generators with tunable features is crucial in its early stages. Here, we fabricate low-loss microring resonators (intrinsic Q value above 4 × 106) via universal subtractive manufacturing. Both Kerr and EO combs are realized based on X-cut LTOI high-Q resonators. Specifically, we elucidate the complicated synergy caused by a photorefractive (PR) effect and thermo-optic modulation, observing the soliton step using the facile laser scanning technique. Furthermore, the preliminary experimental result of the static EO comb is also exploited in a 20 GHz free spectral range (FSR) LTOI microring resonator, verifying the versatility of this unique photonic platform for on-chip microcomb generation.

Off-Normal Polarized Single-Photon Emission with Anisotropic Holography Metasurfaces.

Solid-state quantum emitters (QEs) with arbitrary direction emission and well-defined polarization are critical for scalable single-photon sources and quantum information processing. However, the design strategy for on-chip generation of off-normal photon emission with high-purity polarization characteristics has so far remained elusive. Here, we introduce the anisotropic holography metasurfaces for efficiently manipulating the emission direction and polarization of QE. The proposed method offers a flexible way to realize phase matching in surface plasmon scattering with spatially varying filling factors and provides an efficient route for designing advanced QE-coupled metasurfaces. By nonradiatively coupling nanodiamonds with metasurfaces, we experimentally demonstrate on-chip generation of well-collimated single-photon emission propagating along off-normal directions (i.e., 20° and 30°) featuring a divergence angle lower than 2.5°. The experimental average degree of linear polarization attains up to >0.98, thereby revealing markedly high polarization purity. This study facilitates applications of QEs in the deployment of integrated quantum networks.

On-chip mid-infrared dispersive wave generation at targeted molecular absorption wavelengths

On-chip mid-infrared dispersive wave generation at targeted molecular absorption wavelengths

High-order Autler–Townes splitting in electrically tunable photonic molecules

Whispering gallery mode optical microresonators represent a promising avenue for realizing optical analogs of coherent light–atom interactions, circumventing experimental complexities. All-optical analogs of Autler–Townes splitting have been widely demonstrated, harnessing coupled optical microresonators, also known as photonic molecules, wherein the strong coupling between resonant fields enables energy level splitting. Here, we report the characterizations of Autler–Townes splitting in waveguide-coupled microring dimers featuring mismatched sizes. By exploiting backscattering-induced coupling via Rayleigh and Mie scatterers in individual rings, high-order Autler–Townes splitting has been realized, yielding supermode hybridization in a multi-level system. Upon resonance detuning using an integrated phase shifter, intra-cavity coupling-induced splitting becomes almost indistinguishable at the zero-detuning point where the strong inter-cavity coupling counteracts the imbalance of backscattering strengths in individual rings. Through demonstrations on the maturing silicon photonics platform, our findings establish a framework of electrically tunable photonic molecules for coupling-mediated Autler–Townes splitting, offering promising prospects for on-chip signal generation and processing across classical and quantum regimes.

Wireless Frequency-Multiplexed Acoustic Array-based Acoustofluidics.

Acoustofluidics has shown great potential in enabling on-chip technologies for driving liquid flows and manipulating particles and cells for engineering, chemical, and biomedical applications. To introduce on-demand liquid sample processing and micro/nano-object manipulation functions to wearable and embeddable electronics, wireless acoustofluidic chips are highly desired. This paper presents wireless acoustofluidic chips to generate acoustic waves carrying sufficient energy and achieve key acoustofluidic functions, including arranging particles and cells, generating fluid streaming, and enriching in-droplet particles. To enable these functions, our wireless acoustofluidic chips leverage mechanisms, including inductive coupling-based wireless power transfer (WPT), frequency multiplexing-based control of multiple acoustic waves, and the resultant acoustic radiation and drag forces. For validation, the wirelessly generated acoustic waves are measured using laser vibrometry when different materials (e.g., bone, tissue, and hand) are inserted between the WPT transmitter and receiver. Moreover, our wireless acoustofluidic chips successfully arrange nanoparticles into different patterns, align cells into parallel pearl chains, generate streaming, and enrich in-droplet microparticles. We anticipate this research to facilitate the development of embeddable wireless on-chip flow generators, wearable sensors with liquid sample processing functions, and implantable devices with flow generation and acoustic stimulation abilities for engineering, veterinary, and biomedical applications.

Mesenchymal Stem Cell and Hematopoietic Stem and Progenitor Cell Co-Culture in a Bone-Marrow-on-a-Chip Device toward the Generation and Maintenance of the Hematopoietic Niche.

Bone marrow has raised a great deal of scientific interest, since it is responsible for the vital process of hematopoiesis and is affiliated with many normal and pathological conditions of the human body. In recent years, organs-on-chips (OoCs) have emerged as the epitome of biomimetic systems, combining the advantages of microfluidic technology with cellular biology to surpass conventional 2D/3D cell culture techniques and animal testing. Bone-marrow-on-a-chip (BMoC) devices are usually focused only on the maintenance of the hematopoietic niche; otherwise, they incorporate at least three types of cells for on-chip generation. We, thereby, introduce a BMoC device that aspires to the purely in vitro generation and maintenance of the hematopoietic niche, using solely mesenchymal stem cells (MSCs) and hematopoietic stem and progenitor cells (HSPCs), and relying on the spontaneous formation of the niche without the inclusion of gels or scaffolds. The fabrication process of this poly(dimethylsiloxane) (PDMS)-based device, based on replica molding, is presented, and two membranes, a perforated, in-house-fabricated PDMS membrane and a commercial poly(ethylene terephthalate) (PET) one, were tested and their performances were compared. The device was submerged in a culture dish filled with medium for passive perfusion via diffusion in order to prevent on-chip bubble accumulation. The passively perfused BMoC device, having incorporated a commercial poly(ethylene terephthalate) (PET) membrane, allows for a sustainable MSC and HSPC co-culture and proliferation for three days, a promising indication for the future creation of a hematopoietic bone marrow organoid.

A cryogenic on-chip microwave pulse generator for large-scale superconducting quantum computing

For superconducting quantum processors, microwave signals are delivered to each qubit from room-temperature electronics to the cryogenic environment through coaxial cables. Limited by the heat load of cabling and the massive cost of electronics, such an architecture is not viable for millions of qubits required for fault-tolerant quantum computing. Monolithic integration of the control electronics and the qubits provides a promising solution, which, however, requires a coherent cryogenic microwave pulse generator that is compatible with superconducting quantum circuits. Here, we report such a signal source driven by digital-like signals, generating pulsed microwave emission with well-controlled phase, intensity, and frequency directly at millikelvin temperatures. We showcase high-fidelity readout of superconducting qubits with the microwave pulse generator. The device demonstrated here has a small footprint, negligible heat load, great flexibility to operate, and is fully compatible with today’s superconducting quantum circuits, thus providing an enabling technology for large-scale superconducting quantum computers.

Avoiding lateral mode leakage in thin film lithium niobate waveguides for the generation of spectrally pure photons at telecom wavelengths

Photonic integrated optical components, notably straight waveguides, serve as pivotal elements for on-chip generation and manipulation of quantum states of light. In this work, we focus on optimizing waveguides based on lithium niobate on insulator (LNOI) to generate photon pairs at telecom wavelengths using spontaneous parametric down-conversion (SPDC). Specifically, we investigate lateral leakage for all possible SPDC processes involving type 0, type I, and type II phase matching conditions in an X-cut lithium niobate waveguide and provide a recipe to avoid leakage loss for the interacting photons. Furthermore, focusing on type II phase matching, we engineer the waveguide in the single-mode regime such that it also satisfies group index matching for generating spectrally pure single photons with high purity (99.33%). We also address fabrication imperfections of the optimized design and find that the spectral purity of the generated photons is robust to fabrication errors. This work offers guidance for the suitable selection of morphological parameters to obtain lossless, single-mode LNOI waveguides for building linear optical circuits and photon pair generation at telecom wavelengths using desired phase-matching conditions.

Nonlinear photonics on integrated platforms.

Nonlinear photonics has unveiled new avenues for applications in metrology, spectroscopy, and optical communications. Recently, there has been a surge of interest in integrated platforms, attributed to their fundamental benefits, including compatibility with complementary metal-oxide semiconductor (CMOS) processes, reduced power consumption, compactness, and cost-effectiveness. This paper provides a comprehensive review of the key nonlinear effects and material properties utilized in integrated platforms. It discusses the applications and significant achievements in supercontinuum generation, a key nonlinear phenomenon. Additionally, the evolution of chip-based optical frequency combs is reviewed, highlighting recent pivotal works across four main categories. The paper also examines the recent advances in on-chip switching, computing, signal processing, microwave generation, and quantum applications. Finally, it provides perspectives on the development and challenges of nonlinear photonics in integrated platforms, offering insights into future directions for this rapidly evolving field.

Observation of topological frequency combs.

On-chip generation of optical frequency combs using nonlinear ring resonators has enabled numerous applications of combs that were otherwise limited to mode-locked lasers. Nevertheless, on-chip frequency combs have relied predominantly on single-ring resonators. In this study, we experimentally demonstrate the generation of a novel class of frequency combs, the topological frequency combs, in a two-dimensional lattice of hundreds of ring resonators that hosts fabrication-robust topological edge states with linear dispersion. By pumping these edge states, we demonstrate the generation of a nested frequency comb that shows oscillation of multiple edge state resonances across ≈40 longitudinal modes and is spatially confined at the lattice edge. Our results provide an opportunity to explore the interplay between topological physics and nonlinear frequency comb generation in a commercially available nanophotonic platform.

Single-drive electro-optic frequency comb source on a photonic-wire-bonded thin-film lithium niobate platform.

Stable pulse and flat-top frequency comb generation are an indispensable component of many photonic applications, from ranging to communications. Lithium niobate on insulator is an excellent electro-optic (EO) platform, exhibiting high modulation efficiency and low optical loss, making it a fitting candidate for pulse generation through electro-optic modulation of continuous-wave (CW) light, a commonly utilized method for generating ultrashort pulses. Here, we demonstrate an on-chip electro-optic comb generation module on thin-film lithium niobate (TFLN) consisting of a Mach-Zehnder interferometer (MZI) amplitude modulator (AM) and a cascaded phase modulator (PM) system driven by a single-electrode drive. We show that when operated in the correct regime, the lithium niobate chips can generate frequency combs with excellent spectral power flatness. In addition, we optically package one of the pulse generator chips via photonic wire bonding. The pulses generated by the photonic-wire-bonded device are compressed to 840 fs pulse duration using an optical fiber and show extremely stable operation.