Nonlinear difference frequency generation (DFG) is a key mechanism for realizing terahertz (THz) sources. Utilization of DFG within micro- and nano-structures can circumvent the phase-matching limitations while supporting device miniaturization and integrability, thus the DFG is made a significant area of research. Enhancing the local electric fields through resonant modes in micro- and nano-structures has become a promising approach to achieving efficient and tunable THz sources across a broad wavelength range. In this work, the mechanism of DFG in high-Q-factor grating-waveguide structures for efficientlytuning THz radiation over a wide spectral range is investigated by using numerical simulations based on the finite element method (COMSOL Multiphysics). Theoretical analysis reveals that modulating the positional perturbation of one of the adjacent gratings effectively doubles the grating period, causing Brillouin zone to fold. This folding shifts the dispersion curve of the guided mode (GM) within the waveguide layer above the light cone, forming a guided mode resonance (GMR) with an ultra-high Q-factor, thereby significantly enhancing THz generation in a broad spectral range. Taking a cadmium sulfide (CdS) grating-waveguide structure for example, numerical simulations demonstrate that the THz conversion efficiency reaches an order of 10<sup>–8</sup>W<sup>–1</sup> when both fundamental frequency beams have an intensity of 100 kW/cm<sup>2</sup>, which is 10<sup>9</sup> times higher than the conversion efficiency of a CdS film of the same thickness. Moreover, the fundamental frequency resonance wavelength can be widely tuned by adjusting the incident angle. High-Q-factor resonance modes enable various fundamental frequency combinations by changing the incident angles of the two fundamental frequency beams, facilitating the generation of THz waves with arbitrary frequencies. This approach ultimately enables a highly efficient and tunable THz source in a wide spectral range, providing valuable insights for generating THz sources on micro- and nanophotonic platforms.
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