Non-metallic Thin Films Research Articles

Improvement of Electrical Properties of Carbon Nanowall by the Deposition of Thin Film.

In this study, the improvement of the electrical properties of carbon nanowalls (CNWs) by the deposition of nonmetallic thin films such as carbon (C), silicon (Si), and silicon carbide (SiC) was investigated. The CNWs were synthesized on a Si wafer substrate using microwave-plasma-enhanced chemical vapor deposition (PECVD). The thin films were deposited through RF magnetron sputtering with a 4-inch target (C, Si, and Sic) on the grown CNWs. The surficial and cross-sectional conditions were examined using the images obtained from a field emission scanning electron microscope (FESEM). The structural characteristics were analyzed through Raman analysis. The analysis of the electric characteristics confirmed that the resistivity decreased for the nonmetallic-thin-film-coated samples, and that the mobility increased in the order of the as-deposited sample and the C-, SiC-, and Si-thin film-deposited samples. It was also confirmed that the deposition of the SiC thin films resulted in the lowest resistivity at 13.6 × 10-3 Ωcm, and that the deposition of the Si thin films showed the highest mobility at 304 cm2/VS.

Monte Carlo Study of Phonon Transport in Solid Thin Films Including Dispersion and Polarization

The Boltzmann Transport Equation (BTE) for phonons best describes the heat flow in solid nonmetallic thin films. The BTE, in its most general form, however, is difficult to solve analytically or even numerically using deterministic approaches. Past research has enabled its solution by neglecting important effects such as dispersion and interactions between the longitudinal and transverse polarizations of phonon propagation. In this article, a comprehensive Monte Carlo solution technique of the BTE is presented. The method accounts for dual polarizations of phonon propagation, and non-linear dispersion relationships. Scattering by various mechanisms is treated individually. Transition between the two polarization branches, and creation and destruction of phonons due to scattering is taken into account. The code has been verified and evaluated by close examination of its ability or failure to capture various regimes of phonon transport ranging from diffusive to the ballistic limit. Validation results show close agreement with experimental data for silicon thin films with and without doping. Simulation results show that above 100 K, transverse acoustic phonons are the primary carriers of energy in silicon.

Processing and parameters of sol-gel PZT thin-films for GaAs memory applications

Polymeric sol-gel processing represents an IC technology compatible route to fabricate defect-free and compositionally adjustable inorganic non-metallic thin-films at relatively low temperatures.The critical physico-chemical issues which affect the reproducible fabrication of PZT thin-films are outlined. The low field behavior and the high field switching and stability characteristics of PZT thin-films were studied for radiation hard and nonvolatile memory applications. Performance data of integrated PZT thin-films on solid Pt and sputtered Pt layer on silicon-nitrided GaAs substrates are presented and discussed. A compositionally adjustable low field permittivity of 1200, a dielectric break-down strength exceeding 100 V/μm, ∼1012 polarization reversal cycles, and tm ∼ 100 ns were observed. Compatibility of non-linear PZT thin-film element processing with GaAs JFET planar VLSI technology is addressed.

Adhesion measurement of non-metallic thin films using a scratch method

A new scratch method based on a vibrating diamond stylus motion was applied to measuring the adhesion of MgO, TiN and carbon films on glass substrates. The adhesion force and the adhesion energy were evaluated to be of the order of 1 GPa and 1 Jm −2 respectively. The adhesion was not uniform but exhibited considerable inhomogeneity on the substrate. The adhesion distribution was investigated and the scatter of the experimental data often observed in topple or pull tests was interpreted in terms of the inhomogeneity of the adhesion.

The Deposition of Metallic and Non-Metallic Thin Films Through the Use of Boron Clusters.

ABSTRACTNew borane clusters and their corresponding transition and rare earth metal complexes are currently being investigated in our laboratories for their utility as unique source materials for the formation of both metallic and non-metallic thin films. These borane cluster complexes exhibit highly favorable properties for use in OMVPE processes, such as; (1) relatively high volatility, (2) anticipated high stability of the ligand itself to provide clean ligand-metal dissociations, (3) high temperature stabilities of the complexes, (4) readily preparable in significant quantities, and (5) availability of theoretical and spectroscopic probes of structure-reactivity relationships. In this work, we have prepared both non-metallic thin films, including materials such as boron nitride, and metallic thin films (both the transition and rare earth metals) through the use of these unique cluster materials.Boron nitride has been investigated as a potential hard coating for use as an insulating electrical layer and protective coating. We have investigated plasma enhanced chemical vapor deposition and pyrolytic deposition of boron nitride from readily available and easily handled borane clusters. Auger electron spectroscopy was used to show that the film was high purity boron nitride of uniform composition.The deposition of transition and rare earth metal thin-film materials of controlled stoichiometry has recently received considerable interest. We have discovered the borane cluster-assisted deposition (CAD) of metallic thin-films involving both transition and rare earth metal materials. Through the use of this unprecedented borane cluster chemical transport process, films ranging in thickness from 100 nm to several microns have been straightforwardly and systematically prepared for numerous metal and mixed-metal boroncontaining systems with controlled composition at relatively low temperatures. These new materials have been characterized by SEM and other techniques.

A method for the determination of the complex refractive index of non-metallic thin films using photometric measurements at normal incidence

A method is proposed for the determination of the complex refractive index of non-metallic thin films using photometric measurements at normal incidence over an extended wavelength interval. A necessary condition for the applicability of the method is the existence of maxima and minima in the reflectance due to interference effects. The problem of multiple solutions is analysed and the optical thicknesses at the extrema are used for choosing the correct solutions. For absorbing films two alternative procedures are described. One procedure requires an approximate value of the film thickness to start with and refines it during the calculation. The other procedure does not depend on a previous knowledge of the thickness but gives it as a result together with n(λ) and k(λ). A separate procedure is proposed for transparent and almost transparent films. An application of the method is carried out in which excellent agreement is obtained between calculated and experimental results.

Book reviews

Abstract Electric and Magnetic Fields. By Sir Charles Oatley. (Cambridge University Press, 1977.) [Pp. 262.] Hardback £9.76. Paperback £3.50. Scope: Textbook. Level: Undergraduate. The structure of Non-crystalline Materials. Edited by P. H. Gasxell. (Taylor 6 Francis Ltd, 1977.) [Pp. 272.] £16.00. Crystal Growth and Characterization. Edited by R. Ueda and J. B. Mullin. (North-Holland, 1955.) [Pp. vii+419.] Scope: Conference proceedings/treatise. Level: Specielist/post-graduate. Modern Theory of Critical Phenomena. By Sheng Kanq Ma. (W. A. Benjamin, 1976.) [Pp. xxix+559.] Cloth $2460; paper $1460. Advanced Ground Transport+ Review of Research Possibilities. (The Science Research Council 1976.) [Pp. 73.] Scope: Survey. Level: Specialist/postgraduate. Integral Equations: a Short Course. By Ll. G. Chamber. (International Textbook Co., 1976.) [Pp. 198.] £7.00. Scope: Treatise/textbook; library. Level: Specialist/postgraduate under-graduate. Refrigeration and Thermometry below 1 K. By D. S. Betts. (Sussex University Press, 1976.) [Pp. x+283.] £8.00. Scope: Treatise/textbook. Level: Specialist/postgraduate. Theory of Complex Nuclei. By V. U. Soloviev. (Pergamon Press, 1976.) [Pp. x+460.] $35.00; £17.50. Scope: Treatise; library (reference). Level: Specialist/postgraate. Lasers and their Applications. By M. J. Beesley. (Taylor & Francis, 1976.) [Pp. xii+253.] £7.75. Scope: Textbook. Level: Undergraduate. Computing Developments in Experimental and Numerical Stress Analysis. Edited by P. Stanley. (Applied Science Publishers, 1976.) [Pp. ix+ 239.] £10.00. Scope: Conference proceedings. Level: For specialists only. High Power Gas Lasers 1975. Edited by E. R. Pike. (The Institute of Physics, 1976.) [Pp. x+ 333.] £19.00; $45.00. Scope: Conference proceedings. Level: Specialist/postgraduate. Interfacial Phenomena in Metals and Alloys. By L. E. Murr. (Addison-Wesley, 1975.) [Pp. xiv+376.] Cloth $24.50; Paper $14.50. Scope: Treatise. Level: Postgraduate. Interplanetary Dust and Zodiacal Light. Edited by H. Elsasser and H. Fechtig. (Springer Verlag, 1976.) [pp. xii+496.] Scope: Conference proceedings. Level: Specialist/post-graduate. Schwarz Löcher-das Schicksal Schwerer Sterne. By J. Audretsch. (University of Constance Press, 1976.) [Pp. 54.] Scope: Survey. Level: General reader. Magnetohydrodynamics. By T. G. Cowling. (Adam Hilger, 1976.) [Pp. x+136.] £10.00. Scope: Treatise/textbook. Level: Specialist/post-graduate; undergraduate. Linear and Non-Linear Electron Transport in Solids. Edited by J. T. Devreeye and V. E. Van Doren. (Plenum Publishing Corporation, 1976.) [Pp. ixf 634.] $59.40. Scope: Conference proceedings. Level: Specialist/postgraduate. A Unitary Calculus for Electronic Orbitals, By W. G. Harter and W. Patterson. (Springer-Verlag, 1976.) [Pp. xii+144.] DM 18; $7.40. Scope: Treetise/Text,book. Level: Specitdist/postgraduate. Nuclear and Particle Physics at Intermediate Energies. Edited by J. B. Warren. (Plenum Pres, 1976.) [Pp. viii+608.] $69.40. Scope: Conference proceedings; library (reference). Level: Specialist/postgraduate. Table of Laser Lines in Gases and Vapours. By R. Beck, W. Englisch and K. Gürs. (Springer-Verlag, 1976.) [Pp. 130.] Scope: Library (reference). Level: For specialists only. Atomic Energy Levels Grotrian Diagrams (Hydrogen 1- Phosphorus XV). By S. Bashkin and J. O. Stoner Jr. (North-Holland, 1975.) [Pp. xix+ 616.] Scope: Library (reference). Level: Specialist/postgraduate. Thermal Conductivity 14. Edited by P. G. Klexens and T. K. Chu. (Plenum Press, 1978.) [Pp. 586.] Scope: Conference proceedings; library. Level: For specialists only. Three Phases of Matter. By A. J. Walton. (McGraw-Hill 1976.) (PP. xiii+492]. £5.95 (£ 18.00 hard cover.) Scope: Textbook. Level: Undergraduate. Negative Ions (Third Edition). By H. S. W. Masses. [Pp. xvii+741.] £30.00. Scope: Treatise/textbook. Level: Specialist/postgraduate. (Cambridge University Press, 1976.) Physics of Nonmetallic Thin Films. Edited by C. H. S. Dupuy and A. Cachard. (Plenum Press, 1976.) [Pp. viii+510.] $59.40. Scope: Conference proceedings. Level: Specialist/postgraduate.

Physics of nonmetallic thin filmsedited by C. H. S. Dupuy and A. Cachard

<i>Physics of nonmetallic thin films</i>edited by C. H. S. Dupuy and A. Cachard

The Physics of Track Registration in Solids

During the last ten years many observations of charged particle tracks in solids have been reported, and the utilization of this phenomenon in several fields of physics has grown apace. For example, Fleischer, Price, Walker, and their many collaborators have demonstrated the usefulness of track formation as a tool in nuclear physics, radiation dosimetry, geochronology and cosmic-ray physics. All the more reason, then, that one should endeavour to understand the basic mechanisms of track production in different kinds of solids. To do this, one must investigate the relationship between stopping power and track formation, the nature of the damaged region comprising a track, and the annealing behavior of the tracks. The electron microscope can furnish much of the necessary information provided that one is able to interpret the diffraction-contrast image of the tracks.Linear damage regions have been found both in thin films and in bulk samples. While tracks appear in metallic and nonmetallic thin films they have only been found in nonmetallic bulk solids. The latter include a wide variety of plastics, glasses and minerals.

Conference on non-metallic thin films Chelsea, September 1965

The Conference was sponsored jointly by the Electronics Group and the Vacuum Physics Group of The Institute of Physics and The Physical Society and was held at Chelsea College of Science and Technology on the 23rd and 24th September, 1965. The meeting filled a need to discuss the problems associated with the preparation of these materials which, in many cases, are irreproducible in their electrical properties. Twenty-one papers were presented, of which six were invited reviews, on aspects of major importance, such as preparation, structure, electrical properties, and device applications.