Core-level XPS spectra for clean surfaces of Ni 3Al, NiAl, and NiAl 3 alloys were studied. The clean surfaces were obtained by fracturing in the ultra-high vacuum chamber. The positive chemical shifts of Ni 2p 3/2 peak for NiAl and NiAl 3 from Ni metal were 0.2 and 1.0 eV, respectively. The negative shift for Al 2p peak and the positive shift for Ni 3p peaks increased with the decreasing concentration of the corresponding elements. The peak position of the bulk plasmon loss peak for Al 2s peak shifted toward higher energy side, and further, the intensity ratio decreased with the decrease in aluminum concentration. Both the peak intensity ratios of Al 2p to Ni 3p determined by factor analysis and convenient separation are proportional to the atomic ratio of aluminum to nickel. The results indicate that the intensity ratio of Al 2p to Ni 3p determined by these two methods can be applied to the quantification for the surface of the nickel–aluminum alloys.
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