With the successive development of free electron laser (FEL) facilities based on superconducting technology, the advance and diversity of beamline optical design have posed more stringent challenges to the controlling of thermal deformation for key optical elements. In this article, an adaptive thermal shape correction structure is presented, which converts the thermal stress into a bending moment to correct the mirror thermal bump by utilizing the difference in coefficient of thermal expansion (CTE) between materials, and the location relative to the mirror neutral plane. This moment is involved owing to the temperature rise derived from the FEL heat load, which has a certain adaptability to various thermal surface profile and can be precisely controlled by a chiller temperature regulation. In this work, we optimize the dimensions and position of the thermal shape correction blocks by analytical method and FEA simulation respectively. Eventually, this force-compensation-based adaptive scheme can achieve sub-nano sensitivity (∼ 0.1 nm) of mirror shape control, considering factors such as ease of engineering implementation and operational feasibility, even under repetition rates up to 100 kHz.
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