p -nickel oxide (NiOx)∕n-indium tin oxide heterostructure p-n junction diodes were fabricated on glass substrates and showed rectifying characteristics or negative differential resistance (NDR) characteristics depending on the content of oxygen in the NiOx films. After annealing the heterojunction diodes at 450°C in air for about 30min, the characteristics of NDR disappeared and transparent rectifying diodes were observed. The oxygen content could be observed by inspecting the characteristics of the NiOx films before and after annealing using x-ray photoelectron spectrum and thermogravimetric analysis as well as atomic force microscopy. The released oxygen in the NiOx films could be responsible for the disappearance of NDR characteristics and the change of the nonideal rectifying diode characteristics.