Near-field Microwave Microscope Research Articles

Near-Field Probing of Microwave Oscillators with Josephson Microscopy.

Voltage-controlled oscillators, serving as fundamental components in semiconductor chips, find extensive applications in diverse modules such as phase-locked loops, clock generators, and frequency synthesizers within high-frequency integrated circuits. This study marks the first implementation of superconducting Josephson probe microscopy for near-field microwave detection on multiple voltage-controlled oscillators. Focusing on spectrum tracking, various phenomena, such as stray spectra and frequency drifts, were found under nonsteady operating states. Parasitic electromagnetic fields, originating from power supply lines and frequency divider circuits, were identified as sources of interference between units. The investigation further determined optimal working states by analyzing features of the microwave distributions. Our research not only provides insights into the optimization of circuit design and performance enhancement in oscillators but also emphasizes the significance of nondestructive near-field microwave microscopy as a pivotal tool in characterizing integrated millimeter-wave chips.

Near-Field Microwave Microscopy for 3D Surface Assessment of Manufactured Structures

Using near-field scanning microwave microscopy as a contact and non-contacting investigative tool for 3D surface metrology with three differing measurement modes, it has been possible to analyse structures that may be difficult for existing metrology systems. The system utilizes the small change in capacitance between a coaxial resonant probe (at around 2 GHz) ending in an open circuit tip, and the sample surface. This is measured in the frequency domain by the shift in the resonance frequency of the voltage transmission coefficient |S <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">21</sub> |. It is also possible to investigate various materials (metallics, plastics etc.) owing to their differing dielectric properties. The probe has been tested on a computer-controlled 3D stage but is suitable for incorporation into a commercial co-ordinate measurement machine (CMM) to enhance its capability to inspect the inside surfaces of structures, e.g., threads in small bores.

Fabrication of Ultra-Sharp Tips by Dynamic Chemical Etching Process for Scanning Near-Field Microwave Microscopy.

This work details an effective dynamic chemical etching technique to fabricate ultra-sharp tips for Scanning Near-Field Microwave Microscopy (SNMM). The protruded cylindrical part of the inner conductor in a commercial SMA (Sub Miniature A) coaxial connector is tapered by a dynamic chemical etching process using ferric chloride. The technique is optimized to fabricate ultra-sharp probe tips with controllable shapes and tapered down to have a radius of tip apex around ∼1 μm. The detailed optimization facilitated the fabrication of reproducible high-quality probes suitable for non-contact SNMM operation. A simple analytical model is also presented to better describe the dynamics of the tip formation. The near-field characteristics of the tips are evaluated by finite element method (FEM) based electromagnetic simulations and the performance of the probes has been validated experimentally by means of imaging a metal-dielectric sample using the in-house scanning near-field microwave microscopy system.

Boxcar Averaging Scanning Nonlinear Dielectric Microscopy.

Scanning nonlinear dielectric microscopy (SNDM) is a near-field microwave-based scanning probe microscopy method with a wide variety of applications, especially in the fields of dielectrics and semiconductors. This microscopy method has often been combined with contact-mode atomic force microscopy (AFM) for simultaneous topography imaging and contact force regulation. The combination SNDM with intermittent contact AFM is also beneficial for imaging a sample prone to damage and using a sharp microscopy tip for improving spatial resolution. However, SNDM with intermittent contact AFM can suffer from a lower signal-to-noise (S/N) ratio than that with contact-mode AFM because of the shorter contact time for a given measurement time. In order to improve the S/N ratio, we apply boxcar averaging based signal acquisition suitable for SNDM with intermittent contact AFM. We develop a theory for the S/N ratio of SNDM and experimentally demonstrate the enhancement of the S/N ratio in SNDM combined with peak-force tapping (a trademark of Bruker) AFM. In addition, we apply the proposed method to the carrier concentration distribution imaging of atomically thin van der Waals semiconductors. The proposed method clearly visualizes an anomalous electron doping effect on few-layer Nb-doped MoS2. The proposed method is also applicable to other scanning near-field microwave microscopes combined with peak-force tapping AFM such as scanning microwave impedance microscopy. Our results indicate the possibility of simultaneous nanoscale topographic, electrical, and mechanical imaging even on delicate samples.

Imaging of magnetic excitations in nanostructures with near-field microwave microscopy

We present images of spin-wave excitations in a patterned yttrium iron garnet (YIG) thin film obtained by use of near-field microwave microscopy, which can achieve spatial resolution as high as 50 nm. Visualization of magnetic excitations is an enticing prospect for high-speed, high-density magnetic logic and storage applications, which has spurred the development of new magnetic microscopy and imaging techniques in recent years. Here we present a novel approach for local imaging of magnetic modes excited at room temperature with sub-diffraction-limited spatial resolution. This approach is based on a special atomic force microscope with broadband GHz capability for imaging the spatial distribution of dynamic magnetic excitations in patterned magnetic structures. Due to the inherent sub-wavelength, nanometer-scale spatial resolution of near-field scanning probe techniques, this approach has potential for a significant improvement in spatial resolution over optical techniques.

An approach to determine solution properties in micro pipes by near-field microwave microscopy

In this article, we propose a quantitative, non-destructive and noninvasive approach to obtain electromagnetic properties of liquid specimens utilizing a home-designed near-field microwave microscopy. The responses of aqueous solutions can be acquired with varying concentrations, types (CaCl2, MgCl2, KCl and NaCl) and tip–sample distances. An electromagnetic simulation model also successfully predicts the behaviors of saline samples. For a certain type of solutions with varying concentrations, the results are concaves with different bottoms, and the symmetric graphs of concave extractions can clearly identify different specimens. Moreover, we obtain electromagnetic images of capillaries with various saline solutions, as well as a Photinia × fraseri Dress leaf.

Developments and Recent Progresses in Microwave Impedance Microscope

Microwave impedance microscope (MIM) is a near-field microwave technology which has low emission energy and can detect samples without any damages. It has numerous advantages, which can appreciably suppress the common-mode signal as the sensing probe separates from the excitation electrode, and it is an effective device to represent electrical properties with high spatial resolution. This article reviews the major theories of MIM in detail which involve basic principles and instrument configuration. Besides, this paper summarizes the improvement of MIM properties, and its cutting-edge applications in quantitative measurements of nanoscale permittivity and conductivity, capacitance variation, and electronic inhomogeneity. The relevant implementations in recent literature and prospects of MIM based on the current requirements are discussed. Limitations and advantages of MIM are also highlighted and surveyed to raise awareness for more research into the existing near-field microwave microscopy. This review on the ongoing progress and future perspectives of MIM technology aims to provide a reference for the electronic and microwave measurement community.

Developments and Recent Progresses in Microwave Impedance Microscope

Microwave impedance microscope (MIM) is a near-field microwave technology which has low emission energy and can detect samples without any damages. It has numerous advantages, which can significantly suppress the common-mode signal as the sensing probe separates from the excitation electrode, and it is a powerful tool to characterize electrical properties with high spatial resolution. This article reviews the major theories of MIM in detail which involve basic principles and instrument configuration. Besides, this paper summarizes the improvement of MIM properties, and its cutting-edge applications in quantitative measurements of nanoscale permittivity and conductivity, capacitance variation and electronic inhomogeneity. The relevant implementations in recent literature and prospects of MIM based on the current requirements are discussed. Limitations and advantages of MIM are also highlighted and surveyed to raise awareness for more research into the existing near-field microwave microscopy. This review on the ongoing progress and future perspectives of MIM technology aims to provide reference for the electronic and microwave measurement community.

Near-Field Microwave Microscopy: Subsurface Imaging for In Situ Characterization

The centuries-old field of microscopy has revolutionized and is now indispensable in the natural sciences, medicine, and many branches of technology. New techniques and approaches used for visualizing small objects and measuring their physical or chemical properties and their structures are in demand and constantly being developed. In the suite of modern microscopy techniques, nondestructive methods are especially important. One of the challenging tasks of microscopic imaging, independent of the employed physical principle, is the imaging of nanoscale objects in situ and in operando, in the medium of their natural existence or operation. These are cases when an object of interest is in some sort of interaction with its surrounding medium and its form and operation are either based on or fundamentally dependent upon this interaction. Examples of this include integrated circuits, living objects such as biological cells in water-based solutions, and electrochemical devices such as parts of rechargeable batteries or the electrolytic cells in electrolytes. Breaking its interaction with the environment or changing the environment leads to the disappearance of the object or alters the object so that, in its altered state, the key information relevant to its in vivo or in operando state is lost. Therefore, microscopy should be performed nondestructively, in situ.

Nanoelectronic Characterization: Using Near-Field Microwave Microscopy for Nanotechnological Research

The optical characterization of nanoscale objects is challenging due to the Abbe diffraction limit. This limit constrains the achievable spatial resolution of a conventional microscope using visible light to a 200 nm . 200 nm. The current era of nanotechnological research has been enabled by a host of experimental techniques that circumvent the diffraction limit. Since the Abbe limit scales proportional to the wavelength of electromagnetic radiation, the diffraction limit acts even more unfavorably on longer wavelengths. At 10 GHz (l = 30 mm), the best achievable resolution is around 15 mm. Thus, while traditional microwave metrology enables precision broadband measurements, conventional measurement methods are insufficient to address the host of novel and exciting phenomena that arise in nanoscale systems.

Microwave Microscopy and Its Applications

Understanding the nanoscale electrodynamic properties of a material at microwave frequencies is of great interest for materials science, condensed matter physics, device engineering, and biology. With specialized probes, sensitive detection electronics, and improved scanning platforms, microwave microscopy has become an important tool for cutting-edge materials research in the past decade. In this article, we review the basic components and data interpretation of microwave imaging and its broad range of applications. In addition to the general-purpose mapping of permittivity and conductivity, microwave microscopy is now exploited to perform quantitative measurements on semiconductor devices, photosensitive materials, ferroelectric domains and domain walls, and acoustic-wave systems. Implementation of the technique in low-temperature and high-magnetic-field chambers has also led to major discoveries in quantum materials with strong correlation and topological order. We conclude the review with an outlook of the ultimate resolution, operation frequency, and future industrial and academic applications of near-field microwave microscopy.

Ultra-subwavelength focusing and giant magnetic-field enhancement in a low-loss one-way waveguide based on remanence

The subwavelength focusing based on surface plasmon polaritons has been widely explored in tapered metallic structures. However, the efficiency of energy localization is relatively weak, largely due to high propagation loss and strong back reflection. Here, we propose a three-dimensional (3D) straight-tapered one-way surface magnetoplasmon (SMP) waveguide with the end surface of ∼10−4λ0 × 10−4λ0 to achieve energy focusing in the microwave regime. Due to low propagation loss of SMP, we achieve huge magnetic field enhancement in such an ultra-subwavelength area, by five orders of magnitude. Instead of using an external static magnetic field, our proposed SMP waveguide relies on remanence, which is very convenient for operating practical 3D applications. These results show promising applications in magnetic-field enhancing or quenching fluorescence, luminescence or nonlinearity of two-dimensional materials, novel scanning near-field microwave microscopy and energy storage.

Peculiarities of the Nonlinear Response of a Superconductor–Normal Metal Structure with a Large Ratio of Resistivities

Using the near-field microwave microscopy method, the temperature dependence of third harmonics power P3ω(T) of the MoN/Al superconductor–normal metal structures with the proximity effect is studied. The presence of a secondary (low-temperature) maximum and zeroings is detected in the P3ω(T) dependence of the MoN/Al structure, which disappear upon applying a weak magnetic field perpendicular to the plane of the structure.

High-Frequency Nonlinear Response of Superconducting Cavity-Grade Nb Surfaces

Nb Superconducting Radio-Frequency (SRF) cavities are observed to break down and lose their high-Q superconducting properties at accelerating gradients below the limits imposed by theory. The microscopic origins of SRF cavity breakdown are still a matter of some debate. To investigate these microscopic issues temperature and power dependent local third harmonic response was measured on bulk Nb and Nb thin film samples using a novel near-field magnetic microwave microscope between 2.9K-10K and 2GHz-6GHz. Both periodic and non-periodic response as a function of applied RF field amplitude are observed. We attribute these features to extrinsic and intrinsic nonlinear responses of the sample. The RF-current-biased Resistively Shunted Junction (RSJ) model can account for the periodic response and fits very well to the data using reasonable parameters. The non-periodic response is consistent with vortex semi-loops penetrating into the bulk of the sample once sufficiently high RF magnetic field is applied, and the data can be fit to a Time-Dependent Ginzburg-Landau (TDGL) model of this process. The fact that these responses are measured on a wide variety of Nb samples suggests that we have captured the generic nonlinear response of air-exposed Nb surfaces.

Особенности нелинейного отклика структуры сверхпроводник-нормальный металл с большим отношением удельных сопротивлений

Using the method of near-field microwave microscopy, we investigated the temperature dependence of the third harmonic power P3ω (T) of superconductor – normal metal MoN / Al structures with proximity effect. The presence of an additional (low-temperature) maximum and vanishing in the dependence P3ω (T) for the MoN / Al structure, which disappear when a weak perpendicular magnetic field is applied.

In-situ Near-Field Probe Microscopy of Plasma Processing.

There exists a great necessity for in situ nanoscale characterization of surfaces and thin films during plasma treatments. To address this need, the current approaches rely on either 'post mortem' sample microscopy, or in situ optical methods. The latter, however, lack the required nanoscale spatial resolution. In this paper, we propose scanning near-field microwave microscopy to monitor plasma-assisted processes with a submicron spatial resolution. In our approach, a plasma environment with an object of interest is separated from the near-field probe and the rest of the microscope by a SiN membrane of a few-10s nm thickness, and the imaging is performed through this membrane. As a proof of concept, we were able to monitor gradual transformations of carbon nanotube films upon plasma-induced oxidation by a low-pressure air plasma. In the implemented approach with the near-field probe in contact with the membrane, the plasma processing should be interrupted during imaging to preserve the membrane integrity. Possible solutions to achieve in situ real-time imaging during plasma conditions are discussed.

Measurement of the Charge-Carrier Mobility in Gallium Arsenide Using a Near-Field Microwave Microscope by the Microwave-Magnetoresistance Method

The possibility of contactless nondestructive local measurements of the microwave carrier mobility in gallium arsenide using a near-field scanning microwave microscope and the effect of microwave magnetoresistance is shown. The need to consider the effect of a shift of the microwave field in processing the result of the measurements is noted.

Disentangling topographic contributions to near-field scanning microwave microscopy images

We develop empirical models to predict the contribution of topographic variations in a sample to near-field scanning probe microwave microscopy (NSMM) images. In particular, we focus on |S11| images of a thin Perovskite photovoltaic material and a GaN nanowire. The difference between the measured NSMM image and this prediction is our estimate of the contribution of material property variations to the measured image. Prediction model parameters are determined from either a reference sample that is nearly free of material property variations or directly from the sample of interest. The parameters of the prediction model are determined by robust linear regression so as to minimize the effect of material property variations on results. For the case where the parameters are determined from the reference sample, the prediction is adjusted to account for instrument drift effects. Our statistical approach black is fully empirical black and thus complementary to current approaches based on physical models that are often overly simplistic.

Specific Features of the Nonlinear Microwave Response of the (Na0.3K0.7)xFe2 – ySe2 Sodium–Potassium Ferroselenide-Based Multiband Superconductors

Abstract—Temperature dependences of the third-harmonic power for the (Na0.3K0.7)xFe2 – ySe2 sodium–potassium ferroselenide single crystals have been investigated by nonlinear near-field microwave microscopy. The temperature dependence of magnetic susceptibility at a frequency of 100 kHz for this compound has been measured. The experimental results suggest a double-gap structure of the (Na0.3K0.7)xFe2 – ySe2 superconductor.

Detection of biological abnormalities using a near-field microwave microscope

Microwave and millimeter-wave reflectometry is one of the potential techniques for the diagnosis and detection of biological abnormalities, such as subcutaneous masses or cancerous tumors in human body. In this paper, a high-quality microwave sensor based on planar misrostrip resonator is designed, fabricated, and successfully tested with different kinds of biological samples. The proposed sensor has unique properties such as small size, simple fabrication, non-contact with a sample, excellent de-coupling from surroundings, and high microwave power is directly coupled into the tissue. Two experiments are performed for the detection of visible and hidden “lipoma” (fat masses), and minimum size of “lipoma” that is diagnosed by the sensor is obtained as well. In this regard, a two-dimensional image of hidden “lipomas” with amplitude contrast about 30 dB and frequency shifts contrast about 60 MHz at aλ/10 (at 13.5 GHz) stand-off distance is provided. Finally, a measurement scenario for the detection of skin cancer based on the artificial model using different layers of raw chicken with different water content is described. Results show that the proposed microscope is easy to fabricate and provide a low-cost solution for fast and accurate skin cancer detection.