AbstractElectrical properties, Fe concentration, and deep centers in semi‐insulating Fe‐doped GaN substrates grown by hydride vapor phase epitaxy (HVPE) were characterized by temperature‐dependent Hall‐effect measurements, secondary ion mass spectroscopy, and thermally stimulated current (TSC) spectroscopy. Five adjacent samples from a low‐[Fe] wafer displayed very high resistivity, dominated by a center at 0.94 eV. At least six traps were observed in the samples by TSC, with trap B (0.56‐0.60 eV) being dominant. A metastable trap A1 at ∼0.82 eV appeared after white‐light illumination at 300 K. A sample from a high‐[Fe] wafer displayed a lower resistivity, dominated by a center at 0.58 eV. The largest TSC peak in this sample was trap A1, although trap B also appeared. These TSC traps are compared with deep‐level‐transient‐spectroscopy traps reported in conductive epitaxial and bulk HVPE‐GaN. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)