In this work, a novel smartphone-based electroporation (EP) system integrated with 3D scalable and robust gold-coated silicon-nanopillar Electroporation (Au-Si NP-EP) chip using projection photolithography is developed, for the first time, for both EP and electric cell lysing (ECL) at low voltages. Au-SiNP-EP chip consists of silicon nanopillars fabricated by using ASML stepper, Deep Reactive Ion Etching (DRIE) process and coated with a gold microelectrode. The silicon nanopillars were optimized based on theoretical analysis and numerical simulations to enhance the electrical field intensity and mechanical strength. The fabricated Au-SiNP-EP chips are tested with both permeable (Acridine Orange (AO) and impermeable (Propidium Iodide (PI)) molecules for HeLa cells at different volts (1–8 V) and pulse duration (1–9 μs). The fabricated chip achieved an optimized EP efficiency of 84.3% and cell viability of 81.4% at a much smaller voltage (4.5V) than reported planar electroporation (PEP) devices (8–100V). Compared with nanostructures-based devices (2–20 V), our devices show both higher mechanical strength and fabrication yield. Besides, a smartphone app integrated with a low-cost open-source portable Arduino-based system is developed to provide optimized electrical protocols for both EP and ECL. The electric cell lysing with ECL efficiency of 97.0% at 7 V and pulse duration of 9 ms has been successfully demonstrated. The experimental results show that the proposed smartphone-based EP system with Au-SiNP EP chips is promising for various applications, including intracellular delivery of various biomolecules, drugs, and release of DNA/RNA molecules from biological cells.
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