Abstract
We present an ingenious pressure free NIL (Nanoimprint lithography) method by simply employing a very thin PDMS mold along with a Spin-on-Glass HSQ material. Fabricating nano-patterns (i.e. nano-gratings and 2 D nano-arrays) via NIL is advantageous for LSPR based biosensors for producing large working area with high-throughput. Unlike conventional NIL and other fabrication methods, no complicated equipment is required in this work; only a simple heating plate (at 100°C) was utilized for curing time reduction. Nano-pillar structure with definition down to 50–100nm has been successfully fabricated using this method. After Au-deposition, mushroom like Au-capped nano-pillar chip has been successfully validated as a LSPR bio-sensor chip for IgA detection. In addition, this method provides promising features for higher dimensional structures fabrication which is considered as a beneficial tool for LSPR based biosensor sensitivity enhancement.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
