Abstract

Abstract Localized surface plasmon resonance (LSPR) based nano-plasmonic biosensors have attracted great attentions due to rapid detection and label-free capability. Aiming to obtain a high performance LSPR sensor chip, a cauliflower-like nanopillar (CLNP) structure was fabricated based on the cyclo-olefin polymer (COP) material which could increase the sensitivity according to the “hotspots” effect theory. An oxygen plasma etching procedure was introduced to the chip fabrication process to carve the nanopillar surface prepared by nanoimprinting lithography (NIL) into the cauliflower-like nanostructures. In this paper, the cauliflower-like nanopillar structured sensor chip was successfully obtained and the results confirmed that this sensor chip has higher sensitivity compared to an untreated nanopillar structured chip. Meanwhile, the biosensing capability was verified by cell interleukin-6 (IL-6) immunoassay. This approach provides an easy way to fabricate mass-producible LSPR biosensor chips for cell cytokine secretion detection.

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