In the present study, we have used a simulation program based on the kinetic Monte Carlo (KMC) method able to describe the self-organized growth process of silver nanoparticles (AgNPs) in a titanium dioxide (TiO2) thin film. First, the deposition process of TiO2 films prepared by a sol–gel technique is investigated. Obtained simulated TiO2 nanostructures and numerical results are given and discussed according to the deposition rate as the main influent parameter. Next, a new simulation pattern describing the spontaneous periodic array formation of smaller spherical AgNPs in a TiO2 matrix is developed. The origin of the transmission spectra is analyzed in terms of the polarization nature, incident angle and excitation wavelength.