Nanohole Arrays Research Articles

Spectral prediction of all dielectric nanopore metasurface based on DBO-DNN model

Based on the optical properties of symmetric structures independent of each other in the orthogonal direction, a class of all-dielectric nanohole array metasurfaces symmetrical along the diagonal is designed. By adding nanopores of different shapes to break the symmetry of the periodic unit structure, the double Fano resonance is excited. The spectral characteristics of metasurfaces with the same structure type are studied by finitedifference timedomain (FDTD) method. The deep neural network (DNN) is used to establish the nonlinear mapping relationship between the input structural parameters and the transmission spectrum. The number of hidden layers in the DNN and the number of neurons in each layer are optimized by the dung beetle optimization (DBO) algorithm. Therefore, the number of hidden layers of the model is determined to be 5, and the number of neurons in each layer is 120, 30, 150, 60, 90, respectively. The mean square error (MSE) is used to evaluate the training effect of DNN after optimization search. After 35,000 epochs of training, MSE is reduced to 0.0003926. The influence of different gradient descent optimization algorithms on the prediction results is explored respectively, and it is found that Adamax is the most effective. The results show that the prediction model can predict the spectrum within 1 s. Compared with the traditional simulation method, the simulation time is effectively saved. Meet the requirements of efficient and rapid design of ultra-thin lenses. For the same type of metasurface structure, the transmission spectrum can be accurately predicted without multiple data sets.

Design and fabrication of photonic crystal structures by single pulse laser interference lithography

Photonic crystal (PhC) structures formed by periodic surface nanostructuring have emerged as pivotal elements for controlling light-matter interactions. One important application is reducing losses due to the high surface reflectivity of semiconductor optoelectronic devices, such as enhancing light absorption in photovoltaic cells or improving light extraction in light-emitting diodes (LEDs). Although various methods for fabricating such structures have been documented, the utilization of single pulse laser interference lithography (LIL) using commercial photoresist and its subsequent effective use as an etch mask has not been previously reported. Rapid exposure of photoresists with single nanosecond pulses offers benefits for high throughput patterning and reduces the requirement for a stable optical platform. We have successfully employed single pulse LIL to fabricate antireflective PhC structures on GaAs substrates using a commercial photoresist. Exposure is performed with single 7 ns 355 nm pulses of relatively low energy (<10 mJ). High-quality nanohole arrays of pitch of approximately 365 nm are fabricated and depths up to 400 nm have been etched using inductively coupled plasma (ICP) through the exposed photoresist mask. Reflectivity analyses confirmed that these structures reduce the average reflectance of the GaAs to below 5 % across the 450 nm to 700 nm visible wavelength range. The fabrication of PhC structures using this approach has potential for low-cost wafer-level patterning to provide improved light extraction in LEDs and enhanced light trapping in solar cells.

Preparation of Ordered Nanohole Arrays by Two-Step Anodization of Austenitic Stainless Steel Substrates.

An anodic oxide film with a regular pore arrangement was formed by the two-step anodization of an austenitic stainless steel (JIS SUS304) substrate. In this study, we determined the anodization conditions under which the pore arrangement in the anodic oxide film became self-organized. After removing the anodic oxide film formed by the first anodization with a mixture containing CrO3 and HF, the residual substrate was anodized under the same conditions as those in the first anodization. As a result, we found that it was possible to form an anodic oxide film with pores arranged in a regular pattern from the surface to the bottom. This is the first report on the formation of anodic oxide films with ordered nanohole array structures by the two-step anodization of austenitic stainless steel. The interpore distance of the resulting nanohole array structures can be controlled by changing the anodization conditions. By measuring the capacitance of the anodic oxide film, we confirmed that its properties depended on the heat-treatment temperature and pore depth. In addition, no significant decrease in the capacity of anodic oxide films with ordered nanohole array structures was observed, even when the scan rate of the cyclic voltammogram measurement was increased. This is considered to be because the cylindrical pores facilitate ion diffusion to the bottom of the holes. Anodic oxide films obtained by the anodization of austenitic stainless steel substrates can be applied as electrodes for capacitors.

Rational Design and Optimization of Plasmonic Nanohole Arrays for Sensing Applications

Rational Design and Optimization of Plasmonic Nanohole Arrays for Sensing Applications

Towards a CMOS compatible refractive index sensor: cointegration of TiN nanohole arrays and Ge photodetectors in a 200 mm wafer silicon technology

In this work, we present the monolithic integration of a TiN nanohole array and a Ge photodetector towards a CMOS compatible fabrication of a refractive index sensor in a 200 mm wafer silicon technology. We developed a technology process that enables fabrication with high yields of around 90%. Ge photodetectors with a Ge layer thickness of 450 nm and an area of 1600 µm2 (40 µm x 40 µm) show dark current densities of around 129 mA/cm2 and responsivities of 0.114 A/W measured by top illumination (TE polarization; λ = 1310 nm; angle of incidence = 14 °) at a reverse bias of 1 V. Nanohole arrays were structured in a 150 nm thick TiN layer. They were integrated into the back end of line and placed spatially close to the Ge photodetectors. After the metallization, passivation, and pad opening, the nanohole arrays were released with the help of an amorphous silicon stop layer. A significant impact of the TiN nanohole arrays on the optical behavior of the photodetector could be proven on the wafer level. Photocurrent measurements by top illumination confirm a strong dependence of optical properties on the polarization of the incident light and the nanohole array design. We demonstrate very stable photocurrents on the wafer level with a standard deviation of σ &lt; 6%.

Demonstration of extrinsic chirality in self-assembled asymmetric plasmonic metasurfaces and nanohole arrays

Chirality, the lack of mirror symmetry, can be mimicked in nanophotonics and plasmonics by breaking the symmetry in light-nanostructure interaction. Here we report on versatile use of nanosphere lithography for the fabrication of low-cost metasurfaces, which exhibit broadband handedness- and angle-dependent extinction in the near-infrared range, thus offering extrinsic chiro-optical behavior. We measure wavelength and angle dependence of the extinction for four samples. Two samples are made of polystyrene nanospheres asymmetrically covered by silver and gold in one case and silver only in the other case, with a nanohole array at the bottom. The other two samples are nanohole arrays, obtained after the nanosphere removal from the first two samples. Rich extrinsic chiral features are governed by different chiro-optical mechanisms in the three-dimensional plasmonic semi-shells and planar nanohole arrays. We also measure Stokes parameters in the same wavelength and incidence angle range and show that the transmitted fields follow the extrinsic chirality features of the extinction dissymmetry. We further study the influences of the nanostructured shapes and in-plane orientations on the intrinsic vs extrinsic chirality. The nanoholes are modelled as oval shapes in metal, showing good agreement with the experiments. We thus confirm that nanosphere lithography can provide different geometries for chiral light manipulation at the nanoscale, with the possibility to extend functionalities with optimized oval shapes and combination of constituent metals.

Diffraction-limited high-efficiency extreme ultraviolet metalens at 13.5 nm wavelength based on nanohole array in molybdenum membrane

Diffraction-limited high-efficiency extreme ultraviolet metalens at 13.5 nm wavelength based on nanohole array in molybdenum membrane

Tunable high-Q resonances based on the asymmetric nanohole array of phase-change material

Dielectric metasurfaces have made great progress over the past decade to enhance light-matter interaction. Recently, dielectric nanohole structures have been employed for the creation of dielectric metasurfaces. However, the optical characteristics of most dielectric nanohole structures remain fixed once they are manufactured. This study investigates the optical properties of Ge2Sb2Te5 (GST) film perforated with a periodic dual nanohole array. The GST dual nanohole array is capable of supporting multiple guided resonances and bound states in the continuum (BICs). By introducing asymmetry in the radius, BICs can be transformed into quasi-BICs with high-Q resonances. The wavelengths of guided resonances and quasi-BICs can be dynamically controlled through the phase transition of GST. Furthermore, modifying the gap allows for the achievement of active high-Q electromagnetically induced transparency, resulting from the interaction between one guided resonance and one quasi-BIC mode. The GST asymmetric nanohole array holds potential for applications in optical modulators, slow-light devices, and nonlinear optical devices.

Asymmetrical Absorption and Surface‐Enhanced Raman Scattering Enhancement by Silver Nanoflower Metasurface

A metasurface composed of silver nanoflower arrays, which exhibit asymmetrical absorption and surface‐enhanced Raman scattering (SERS) due to hybrid plasmonic effects, is reported. The silver nanoflowers are fabricated by oblique deposition of silver on a polymer nanohole array on a glass substrate, forming petal‐like semicontinuous thin films on the inner walls of the holes. Depending on the deposition angle, three‐ or five‐petal nanoflowers are obtained. The nanoflower arrays show strong reflection from the air side and broadband and wide‐angle absorption from the glass side, as a result of transmission surface plasmon resonance and localized surface plasmon resonance, respectively. The three‐petal structure, which absorbs most of the incident light from the glass side, induces a localized enhancement of electric field in the center of each nanohole, providing a high‐sensitivity SERS substrate. The SERS performance of the metasurface by direct measurement and near‐field simulation is demonstrated.

Enhanced trion emission from WS2 monolayers directly exfoliated on Ag nanohole arrays

The extraordinarily large exciton binding energies of transition metal dichalcogenides (TMDs) have attracted significant attention in both fundamental scientific research and innovative technology development. TMD-metal nanostructures have been fabricated to control excitonic behaviors as well as improve the light-matter interaction in TMDs. WS2 monolayers are integrated with periodic Ag nanohole (AgNH) arrays prepared using a template stripping method. The ultrasmooth and contamination-free surface of the template-stripped Ag layer allows for the direct exfoliation of WS2 flakes on the AgNHs. Surface plasmon excitation increases optical absorption in WS2/AgNH, as evidenced by reflectance, PL, and Raman measurements, along with numerical calculations. Furthermore, the AgNH structures significantly increase the trion-to-exciton emission ratios from the WS2 monolayers on them. Nanoscopic surface photovoltage mapping of WS2/AgNH using Kelvin probe force microscopy can visualize electron accumulation at the suspended WS2 region under light illumination, which triggers the formation of trions. All the results highlight the capability of WS2/AgNH to boost trion emission through plasmon-induced concentrated light and a built-in potential gradient. This work introduces a simple and efficient strategy for fabricating TMD-metal integrated systems to control their excitonic behaviors.

Strong coupling in an asymmetric two-dimensional guided mode resonance metasurface structure and enhancement for optical third-harmonic generation

A two-dimensional guided mode resonance structure supports a transverse magnetic (TM) resonant mode in the direction of incident polarization and a transverse electric (TE) resonant mode in the direction perpendicular to the polarization. In this work, the coupling between the transverse magnetic and the transverse electric resonant modes in an asymmetric two-dimensional dielectric metasurface structure is investigated. The asymmetric structure consists of a two-dimensional square nanohole array etched in a titanium dioxide thin film on a transparent silica substrate. With finite difference time domain simulations, anti-crossing of the resonant spectra of the TM and TE modes is observed by adjusting the asymmetry of the structure. The anti-crossing indicates that the interaction between TM and TE resonant modes results in a strong coupling state. A coupled harmonic oscillator model is used to explain the strong coupling effect. The results of the coupled harmonic oscillator modeling agree well with the results of numerical simulations. Furthermore, it is shown that the strong coupling can significantly enhance the third harmonic generation intensity compared with the uncoupled TM and TE resonant modes.

Enhanced Performance of AlGaN-Based DUV-LEDs With Passivated Nano-Hole Arrays

Enhanced Performance of AlGaN-Based DUV-LEDs With Passivated Nano-Hole Arrays

Nanohole array integrated metal insulator metal (MIM) based structure employing dual mode SPR sensor for detection of Hemoglobin (Hb) in blood

Surface Plasmon Resonance (SPR) based optical biosensors are recently the most attractive sensing devices that can detect minor changes in refractive index. Multiple methods have been developed to design SPR based biosensors with high-performance and ease of fabrication. This research is about a grating based biosensor that utilizes Silver (Ag) and Titanium (Ti) to produce the SP resonance state. The structure has a resonance wavelength, which displays sensitivity to changes in the surrounding medium of the refractive index. The study has been conducted using numerical simulations, utilizing the finite-difference-time-domain (FDTD) method.The simulation results shows a sharp resonance peaks in the wavelength range of 450–700 nm with a remarkable sensitivity of 172 nm/RIU (for mode 1 at SPR peak 465 nm) and 515 nm/RIU (for mode 2 at SPR peak 585 nm), which is superior to other on-chip device. The investigation involves a comparative analysis of sensing performance, focusing on parameters like transmission, reflection, FWHM and Quality factor to measure the detection accuracy of the proposed material combination. Later, we employed this miniature biosensor device to detect hemoglobin concentrations in the blood. Our findings indicate that this developed structure has great potential for detecting any biomolecule, such as proteins, glucose, fructose, nucleic acids, and cells.

High-Temperature Anomalous Metal States in Iron-Based Interface Superconductors.

The nature of the anomalous metal state has been a major puzzle in condensed matter physics for more than three decades. Here, we report systematic investigation and modulation of the anomalous metal states in high-temperature interface superconductor FeSe films on SrTiO_{3} substrate. Remarkably, under zero magnetic field, the anomalous metal state persists up to 20K in pristine FeSe films, an exceptionally high temperature standing out from previous observations. In stark contrast, for the FeSe films with nanohole arrays, the characteristic temperature of the anomalous metal state is considerably reduced. We demonstrate that the observed anomalous metal states originate from the quantum tunneling of vortices adjusted by the Ohmic dissipation. Our work offers a perspective for understanding the origin and modulation of the anomalous metal states in two-dimensional bosonic systems.

Visible Light-Illuminated Gold Nanohole Arrays With Tunable On-Chip Plasmonic Sensing Properties

Since the discovery of the extraordinary optical transmission phenomenon, nanohole arrays have attracted much attention and been widely applied in sensing. However, their typical fabrication process, utilizing photolithographic top-down manufacturing technologies, has intrinsic drawbacks including the high costs, time consumption, small footprint, and low throughput. This study presented a low-cost, high-throughput, and scalable method for fabricating centimeter-scale (1×2 cm2) nanohole arrays using the improved nanosphere lithography. The large-scale close-packed polystyrene monolayers obtained by the hemispherical-depression-assisted self-assembly method were employed as colloidal masks for the nanosphere lithography, and the nanohole diameter was tuned from 233 nm to 346 nm with a fixed period of 420 nm via plasma etching. The optical properties and sensing performance of the nanohole arrays were investigated, and two transmission dips were observed due to the resonant coupling of plasmonic modes. Both dips were found to be sensitive to the surrounding environment, and the maximum bulk refractive index sensitivity was up to 162.1 nm/RIU with a 233 nm hole diameter. This study offered a promising approach for fabricating large-scale highly ordered nanohole arrays with various periods and nanohole diameters that could be used for the development of low-cost and high-throughput on-chip plasmonic sensors.

Large-Area Near-Infrared Emission Enhancement on Single Upconversion Nanoparticles by Metal Nanohole Array.

Single lanthanide (Ln) ion doped upconversion nanoparticles (UCNPs) exhibit great potential for biomolecule sensing and counting. Plasmonic structures can improve the emission efficiency of single UCNPs by modulating the energy transferring process. Yet, achieving robust and large-area single UCNP emission modulation remains a challenge, which obstructs investigation and application of single UCNPs. Here, we present a strategy using metal nanohole arrays (NHAs) to achieve energy-transfer modulation on single UCNPs simultaneously within large-area plasmonic structures. By coupling surface plasmon polaritons (SPPs) with higher-intermediate state (1D2 → 3F3, 1D2 → 3H4) transitions, we achieved a remarkable up to 10-fold enhancement in 800 nm emission, surpassing the conventional approach of coupling SPPs with an intermediate ground state (3H4 → 3H6). We numerically simulate the electrical field distribution and reveal that luminescent enhancement is robust and insensitive to the exact location of particles. It is anticipated that the strategy provides a platform for widely exploring applications in single-particle quantitative biosensing.

Patterning and epitaxy of large-area arrays of nanoscale complex oxide epitaxial heterostructures

A combination of block copolymer (BCP) lithography and solid-phase epitaxy can be employed to form large areas, on the order of square centimeters, of a high density of epitaxial crystalline complex oxide nanostructures. We have used BCP lithography with a poly(styrene-block-methyl methacrylate) (PS-b-PMMA) copolymer to template a nanohole array either directly on an (001)-oriented SrTiO3 (STO) single crystal substrate or on a 20 nm-thick Si3N4 layer deposited on the STO substrate. BCPs with the selected compositions assembled in a cylindrical phase with 16 nm diameter PMMA cylinders and a cylinder-to-cylinder spacing of 32 nm. The substrate was modified with an energetically non-preferential polymer layer to allow for the vertical alignment of the cylinders. The PMMA cylinders were removed using a subtractive process, leaving an array of cylindrical holes. For BCPs assembled on Si3N4/STO, the pattern was transferred to the Si3N4 layer using reactive ion etching, exposing the underlying STO substrate in the nanoholes. An amorphous LaAlO3 (LAO) layer was deposited on the patterned Si3N4/STO at room temperature. The amorphous LAO epitaxially crystallized within the nanoscale-patterned holes with fully relaxed lattice parameters through solid phase epitaxy, resulting in the formation of nanoscale LAO/STO epitaxial heterostructures.

Angle-Resolved Fluorescence of a Dye Coupled to a Plasmonic Nanohole Array

Gold nanohole arrays are periodic metasurfaces that are gathering huge interest in biosensing applications. The bi-dimensional grating-like structure defines their plasmonic response, together with the corresponding mode of angular dispersion. These properties can be used to investigate the interaction processes with the fluorescence features of a properly chosen emitting molecule. By employing a custom gold nanohole array alongside a commercial organic dye, we conducted an accurate angle-resolved optical characterization resorting to fluorescence, reflectance, and transmittance spectra. The coupling between the plasmonic modes and the fluorescence features was then identified as a modification of the dye fluorescence signal in terms of both spectral redistribution and enhancement. By carefully analyzing the results, different measurement efficiencies can be identified, depending on the set-up configuration, to be properly engineered for sensitivity maximization in plasmon-enhanced fluorescence-based applications.

Scalable Nanophotonic Structures Inside Silica Glass Laser‐Machined by Intense Shaped Beams

AbstractAll‐dielectric nanophotonic devices are usually fabricated by engraving arrays of nanoholes at the surface of high‐index materials, to engineer dedicated optical functions. However, their direct 3D integration in the volume of a material is challenging, inaccessible to current planar nanolithography methods. Here is introduced an ultrafast laser‐machining method that opens the possibility to realize scalable arrays of hollow nanochannels directly inside the bulk of silica glass within a single‐step, maskless, and digital approach. Using a custom‐shaped micro‐Bessel beam and by tuning laser pulse durations from femtoseconds to picosecond to boost processing versatility, dense assemblies of nanochannels with adjustable lengths (up to 30 µm), and submicron lattice periodicity (down to 0.7 µm) are achieved. As a proof‐of‐principle demonstration, a gradient‐index metaphotonic structure is realized and its performance is experimentally characterized, demonstrating its relevancy for imprinting phase functions with magnitude up to in the short‐wave infrared spectral range. Results show that the unique flexibility and scalability provided by individual control of each channel opens a new realistic alternative approach for 3D fabrication of monolithic integrated nanophotonic devices inside a wide range of low‐index standard optical materials.

Enhanced photoelectron emission in a large area aluminum nanohole array via a deep-UV surface plasmon

We measured the photoelectron emission efficiency of aluminum (Al) nanohole arrays fabricated by colloidal lithography and demonstrated the enhancement of photoelectron emission in the deep-UV region via surface plasmon resonances. The Al nanohole arrays for increasing absorption in the deep-UV region were designed using the finite-difference time-domain method and used as photocathodes to enhance the photoelectron emission efficiency. The enhancement factor improved by up to 3.5 times for the optimized nanohole array. Using a two-dimensional mapping system, we demonstrated that the photoelectron emission depended on the uniformity of the sample and diameter of the nanohole arrays. Al nanohole arrays fabricated by colloidal lithography can be used to develop highly sensitive surface-detecting optical sensors and highly efficient surface-emitting electron sources. The two-dimensional mapping system can facilitate the development of highly efficient photocathodes.