Abstract
Diffraction-limited high-efficiency extreme ultraviolet metalens at 13.5 nm wavelength based on nanohole array in molybdenum membrane
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https://doi.org/10.1117/1.oe.63.6.067105
Journal: Optical Engineering | Publication Date: Jun 26, 2024 |
Diffraction-limited high-efficiency extreme ultraviolet metalens at 13.5 nm wavelength based on nanohole array in molybdenum membrane
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