Nanofocus X-ray Diffraction Research Articles

In situthree-dimensional reciprocal-space mapping during mechanical deformation

Mechanical deformation of a SiGe island epitaxically grown on Si(001) was studied by a specially adapted atomic force microscope and nanofocused X-ray diffraction. The deformation was monitored during in situ mechanical loading by recording three-dimensional reciprocal-space maps around a selected Bragg peak. Scanning the energy of the incident beam instead of rocking the sample allowed the safe and reliable measurement of the reciprocal-space maps without removal of the mechanical load. The crystal truncation rods originating from the island side facets rotate to steeper angles with increasing mechanical load. Simulations of the displacement field and the intensity distribution, based on the finite-element method, reveal that the change in orientation of the side facets of about 25° corresponds to an applied pressure of 2-3 GPa on the island top plane.

Elastic relaxation and correlation of local strain gradients with ferroelectric domains in (001) BiFeO3 nanostructures

We report an elastic relaxation and increase in local strain variation correlated with ferroelectric domains within epitaxial BiFeO3 thin film nanostructures fabricated by combined electron-beam and focused ion-beam nanolithography. Nano-focused x-ray diffraction microscopy provided new insights into the relationship between film strain and ferroelectric domains in nanostructures, namely: (i) an out-of-plane (C-axis) elastic relaxation of as much as −1.8% Δc/c in a BFO film-based nanostructure relative to the planar film lattice constant; (ii) an out-of-plane rotation trending from the center towards all released edges of the nanostructure; and (iii) an increase of inter-domain strain variation within the nanostructure of approximately 10 times the inter-domain variation found within the planar film, correlated with ferroelectric domain boundaries as confirmed by piezoresponse-force microscopy. These results indicate that the release of in-plane BFO/SRO mismatch strain in a planar film is taken up by the local ferroelectric domain structure after patterning, resulting in greatly increased mechanical strain gradients within the structure.

Three-dimensional diffraction mapping by tuning the X-ray energy

Three-dimensional reciprocal-space maps of a single SiGe island around the Si(004) Bragg peak are recorded using an energy-tuning technique with a microfocused X-ray beam with compound refractive lenses as focusing optics. The map is in agreement with simulated data as well as with a map recorded by an ordinary rocking-curve scan. The energy-tuning approach circumvents both the comparatively large sphere of confusion of diffractometers compared with nanostructures and vibrations induced by motors. Thus, this method offers new possibilities for novel combinations of three-dimensional micro- and nano-focused X-ray diffraction with complex in situ sample environments such as scanning probe microscopes.