Carbon based thin films in its various forms is becoming very attractive for a wide range of applications ranging from simple protective coatings to biocompatible coatings and even conformal coatings. Cathodic arc is emerging as a viable technology for a wide range of applications especially low temperature coating. Presented in this paper is some of the initial results of low temperature nanocarbon thin films and nanocluster carbon (NC) grown using cathodic arc process. The films were deposited on aluminium foil and glass substrates. The process and growth parameters were varied to establish the material properties and presented in this paper are the surface morphological, compositional and electrical properties of the nanocarbons thin films and possible correlation to the process parameters. The surface morphology and composition were studied using SEM (SU-1500 HITACHI), Raman Spectroscopy & AFM, NSOM (ALPHA 100RAS), and the electrical and electronic properties were measured using Kiethly Semiconductor device analyzer.
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