Nano Positioning Research Articles

Nano Positioning of a High Power Ultrasonic Linear Motor

In this paper, we present an investigation of the noble linear stage for high power and high precision positioning. The stage is driven by a hybrid-bolt clamped Langevin-type ultrasonic linear motor, which is vibrated at its different modes of resonance frequencies in both the lateral and longitudinal directions. To obtain a high power and high-accuracy motion, the driving frequencies of the two vibration modes must be simultaneous. In this study, to obtain well-matched vibration frequencies, the contact stiffness in the tangential and the normal directions are carefully considered in designing the actuator. In addition, deviations of the electro-mechanical characteristics of the lead zirconate titanate (PZT) actuator are considered in the bolt clamping process of PZT, and the exciting frequencies are adjusted through modification of the actuator length. Finally, the stage is controlled via proportional-integral-derivative (PID) control. As a result, positioning with a resolution of 20 nm and a moving speed of 78 mm/s was achieved with a linear sensor resolution of 15 nm.

Automated inspections for dimensional micro- and nanometrology

The large number of inspection features at dimensional measurements in the micro and nanorange requires a lossless information flow within the closed quality loop. Thereby the closed quality loop comprises CAD (Computer Aided Design) and CAQ (Computer Aided Quality) and is characterised by neutral interfaces. The state-of-the-art is represented by the recently accomplished adaptation of the closed quality loop [ G. Linß, S. Töpfer, U. Nehse, Hard- and software interfaces enabling efficient inspection planning at the nano positioning and nano measuring machine, in: Proceedings of 10th IMEKO TC7 International Symposium on Advances of Measurement Science, June 30–July 2, vol. 2, Sankt Petersburg, Russia, 2004, pp. 376–381] to the nanomeasuring machine (NMM) [G. Jäger, E. Manske, T. Hausotte, Nano Measuring Machine, Invited paper at MICRO.tec 2000 – VDE Microtechnologies World Congress, Hannover, Germany, September 2000]. The originality lies with a novel system-theoretical model of a measurements process with an intelligent, adaptive sensor as part of the closed quality loop. The model is discussed in detail. The necessity and the working principle of a cascaded sensor system are outlined. The application of each sub-sensor of the cascaded sensor system can be described by the system-theoretical model. The investigated principles are applicable to all micro and nanomeasuring machines turning them into efficiently operating micro or nanocoordinate measuring machines capable of performing automated inspections.

MEMS for Optical Functionality

We discuss key features of MEMS technology which enable new functionalities of microphotonic devices, that can by summarized as “arrayability”, i.e. the ability to make massively parallel optical devices in a small form factor, “reconfigurability,” the ability to change optical properties spatially and temporaly, and “nano positioning,” the ability to position micro-scale devices with nanometer accuracy. We present an overview of cases where a combination of these features has led to commercial successes by creating new optical functionalities, and discuss materials-related challenges and future trends for optical MEMS research and commercialization.