Spectroscopic and electronic diagnostics are applied to determine the temporal and spatial evolution of excited species created in He or Ne-N2 plasmas produced by a microwave surfaguide at a pressure of a few Torr. The excited-states population has a maximum near the wall. Electron density is maximum on the axis (1013 cm-3 at 10 Torr). Its radial distribution is well fitted by a Bessel J0(r) function. As a consequence the metastable population is also maximum along the axis.
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