Multipole Resonance Probe Research Articles

Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe

Optical emission spectroscopy (OES) and multipole resonance probe (MRP) are adopted to characterize low-pressure microwave (MW) and radio frequency (RF) discharges in oxygen. In this context, both discharges are usually applied for the deposition of permeation barrier SiOx films on plastic foils or the inner surface of plastic bottles. For technological reasons the MW excitation is modulated and a continuous wave (cw) RF bias is used. The RF voltage produces a stationary low-density plasma, whereas the high-density MW discharge is pulsed. For the optimization of deposition process and the quality of the deposited barrier films, plasma conditions are characterized using OES and MRP. To simplify the comparison of applied diagnostics, both MW and RF discharges are studied separately in cw mode. The OES and MRP diagnostic methods complement each other and provide reliable information about electron density and electron temperature. In the MW case, electron density amounts to ne = (1.25 ± 0.26) × 1017 m−3, and kTe to 1.93 ± 0.20 eV, in the RF case ne = (6.8 ± 1.8)×1015 m−3 and kTe = 2.6 ± 0.35 eV. The corresponding gas temperatures are 760±40 K and 440±20 K.

Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

The application of a multipole resonance probe (MRP) for diagnostic and monitoring purposes in a plasma ion-assisted deposition (PIAD) process is reported. Recently, the MRP was proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2011 Plasma Sources Sci. Technol. 20 042001). The major advantages of the MRP are its robustness against dielectric coating and its high sensitivity to measure the electron density. The PIAD process investigated is driven by the advanced plasma source (APS), which generates an ion beam in the deposition chamber for the production of high performance optical coatings. With a background neutral pressure of p0 ∼ 20 mPa the plasma expands from the source region into the recipient, leading to an inhomogeneous spatial distribution. Electron density and electron temperature vary over the distance from substrate (ne ∼ 109 cm−3 and Te,eff ∼ 2 eV) to the APS (ne ≳ 1012 cm−3 and Te,eff ∼ 20 eV) (Harhausen et al 2012 Plasma Sources Sci. Technol. 21 035012). This huge variation of the plasma parameters represents a big challenge for plasma diagnostics to operate precisely for all plasma conditions. The results obtained by the MRP are compared to those from a Langmuir probe chosen as reference diagnostics. It is demonstrated that the MRP is suited for the characterization of the PIAD plasma as well as for electron density monitoring. The latter aspect offers the possibility to develop new control schemes for complex industrial plasma environments.

TDR Method for Compaction Quality Control: Multi Evaluation and Sources of Error

Abstract The use of the time domain reflectometry (TDR) method, designated ASTM D6780 (ASTM D6780, 2005, “Standard Test Method for Water Content and Density of Soil in Place by Time Domain Reflectometry (TDR),” Annual Book of ASTM Standards, Vol. 04.09 ASTM International, West Conshohocken, PA), to measure water content and soil density is relatively new with both successful and unsatisfactory results being reported. This paper reexamines the TDR method from various aspects, including laboratory investigation of the relation between TDR-measured electrical properties and soil phase parameters, full scale laboratory evaluation of the standardized methods, real world performance evaluation at construction sites of earth dams, and theoretical reexamination. Laboratory calibration reveals the effect of soil type on soil electrical properties, and its implication on the TDR method is discussed. The full scale laboratory evaluation supports the validity of both the one-step and two-step TDR methods. But the field evaluation at construction sites of earth dams indicates otherwise, particularly in the measurement of soil density. The errors in the two-step method are attributed to the penetration disturbance of the field multipole resonance probe (MRP). An additional source of error in the One-Step method is found to be a theoretical flaw in the current empirical adjustment process for correcting the variation of pore-fluid conductivity from the calibration test to field measurements. Remediation for the two-step method and updating of the ASTM D6780 to overcome the shortcomings of the one-step testing are in progress.

The multipole resonance probe: characterization of a prototype

The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements.

The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas

A diagnostic concept is presented which enables the simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure gas discharges. The proposed method utilizes a radio-frequency driven probe of particular spherical design which is immersed in the plasma to excite a family of spatially bounded surface resonances. An analysis of the measured absorption spectrum S(ω) of the probe provides information on the distribution of the plasma in its vicinity, from which the values of the plasma parameters can be inferred. In its simplest realization, the probe consists of two dielectrically shielded, conducting hemispheres, which are symmetrically driven by an radio-frequency source, and the excited resonances can be classified as multipole fields, which allows an analytical evaluation of the measured signal. The proposed method is robust, calibration free, economical, and can be used for ideal and reactive plasmas alike.