International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 215-219 (2003) Actuators and SensorsNo AccessSTUDY ON BIMORPH AND MULTIMORPH MICROACTUATORSAJAY AGARWAL, TERENCE GAN, JANAK SINGH, YUE K. HOH, and ANDREW A. O. TAYAJAY AGARWALInstitute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685, Singapore Search for more papers by this author , TERENCE GANInstitute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685, Singapore Search for more papers by this author , JANAK SINGHInstitute of Microelectronics, 11 Science Park Road, Singapore Science Park II, Singapore 117685, Singapore Search for more papers by this author , YUE K. HOHDepartment of Mechanical Engineering, National University of Singapore, Singapore Search for more papers by this author , and ANDREW A. O. TAYDepartment of Mechanical Engineering, National University of Singapore, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303000934Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractThis paper presents the simulation and the experimental results of various bimorph and multimorph structures, which are formed using Si, SiO2, and Al. These results include effects of thickness variation of the single/ composite material. The effect of multiple heat cycles, on the stress of various structural materials is investigated. The cantilever tip bending mainly due to intrinsic stresses, is measured using Optical Interferometer and compared with the simulated data which is obtained by an analytical model developed using ANSYS. A combination of various materials is predicted that are suitable for released cantilevers with variable bending. Finally, the bimorph and multimorph structures that have yielded the high and low intrinsic stresses are also discussed.Keywords:BimorphCantileverintrinsic stresscoefficient of thermal expansion References S. P. Timoshenko, Journal of the Optical Society of America 11, 233 (1925). Crossref, Google ScholarW. Riethmuller and W. Benecke, IEEE Trans. Electron Devices 35, 758 (1988). Crossref, Google Scholar C. Doering, T. Grauer, J. Marek, M. S. Mettner, H.-P. Trah and M. William, Micromachined thermoelectrically driven cantilever structures for fluid deflection, Proc. Micro Electromechanical Systems '92 (Travemuende) (1992) 12-18 . Google ScholarJ. Buehleret al., Sensors Actuators A 46-47, 572 (1995). Google Scholar S. Schweizer, P. Cousseau, S. Calmes and Ph Renaud, Two dimensional thermally actuated optical microscanner Proc. Eurosensors XIII (The Hague) (1999) 11-12 . Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 02 Metrics History KeywordsBimorphCantileverintrinsic stresscoefficient of thermal expansionPDF download