Multilayer Piezoelectric Element Research Articles

Review of the State and Prospects of Development and Application of Domestic Multilayer Piezoactuator for Rocket and Space Technology and Ground space Infrastructure

The article gives an overview of the state of development and applications of actuators in the world. A method and technology for manufacturing domestic multilayer piezoelectric elements by the method of slip casting from the piezomaterial of the PZT system and multilayer piezoelectric actuators based on them is described. It is noted that in terms of their technical level, multilayer domestic piezo products correspond to the best foreign samples. Preliminary studies of multilayer piezoelectric products in Russia and abroad have confirmed their unique capabilities when they work in space instrumentation and ground structures for monitoring and controlling space objects. The results of studies on the use of multilayer piezo products of JSC "NII "Elpa" and their foreign analogues in systems are given. The results of the study of various design options for piezoelectric platforms of angular and linear displacements with nanometric accuracy are presented. The optimal design options are selected based on the use of special multilayer piezoactuator APM-1 and APM-2 for their use in rocket and space technology instruments and ground-based space infrastructure. The technology developed at JSC Research Institute Elpa makes it possible to create promising multilayer piezo products of various classes and purposes for rocket and space equipment and ground-based space infrastructure.

Analysis of the design of ultrasonic electronic generators

The design and operation of electronic generators for ultrasonic intensification of processes in gaseous and liquid media will be considered. General requirements and new approaches to electronic generators have been developed based on the analysis of the characteristics of modern piezoelectric vibration systems that perform large amplitude oscillations (quality factor, multi-frequency, multilayer piezoelectric elements). Continuous monitoring of system parameters and setting of optimal operating modes of the electronic generator were studied.

High output power density and strong vibration durability in a modified barbell-shaped energy harvester based on multilayer Pb(In1/2Nb1/2)O3–Pb(Mg1/3Nb2/3)O3–PbTiO3 single crystals

Traditional piezoelectric energy harvesters are made of piezoelectric ceramics with a cantilever structure, which show a low output energy density. Thus, they are difficult to meet the requirements for self-powered electronics. Herein, we report a modified barbell-shaped piezoelectric energy harvester (BSPEH) based on two d33-mode cuboid Pb(In1/2Nb1/2)O3–Pb(Mg1/3Nb2/3)O3–PbTiO3 multilayer single crystal stacks (ten wafers with a thickness of 0.5 mm and d33 ∼ 1300 pC/N). Due to the electrically parallel and series connections of multilayer piezoelectric elements and the high figure-of-merit d33 × g33 of the single crystal, the maximum power density of BSPEH could reach 39.7 mW cm−3 (under an acceleration of 5 g), which is much higher than that of traditional cantilever piezoelectric energy harvesters (CPEHs), ∼0.1 mW cm−3. A maximum output voltage of 50.4 Vp–p was obtained when two crystal stacks are connected in series, and a maximum output current of 880 µA can be obtained when two crystal stacks are connected in parallel. Furthermore, the energy harvesting properties of BSPEH stay almost the same after 106 vibration cycles, while the properties of CPEH decrease 20% after 105 vibration cycles. This work indicates that BSPEH has a great potential in the application of wireless sensor networks for realizing the self-power of the equipment.

A piezoelectric energy harvesting concept for an energy-autonomous instrumented total hip replacement

To improve the clinical outcome of total hip replacements (THRs), instrumented implants with sensory functions for implant monitoring and diagnostics or actuators for therapeutic measures are a promising approach. Therefore, an adequate energy source is needed. Batteries and external power supplies bring shortcomings e.g. limited lifetime or dependency on external equipment. Energy harvesting has the clear benefit of providing continuous and independent power for fully autonomous implants. Our present study evaluates by means of finite element analysis (FEA) the capabilities of a concept of a piezoelectric energy harvesting system (ring shaped multilayer piezoelectric element of 5 mm diameter and 2.5 mm height) integrated in a femoral hip stem. The deformations from a modified load-bearing implant are used to generate electric power for various instrumentation purposes. Besides the expected amount of converted energy, the influence on the stress distribution of the instrumented implant is analysed. The results show that the local stress increase for the modified implant geometry does not exceed the stress of the original reference model. The maximum generated open circuit voltage of 11.9 V can be processed in standard energy harvesting circuitry whereas an average power output amounts up to 8.1 µW. In order to increase the electric power in an upcoming design optimization, a sensitivity analysis is performed to identify the most important influencing parameters with regard to power output and implant safety.

Dust Sensor with Large Sensitive Area Using Multi-Layer Insulation and Piezoelectric Elements

Dust Sensor with Large Sensitive Area Using Multi-Layer Insulation and Piezoelectric Elements

Complete passive vibration suppression using multi-layered piezoelectric element, inductor, and resistor

This paper describes passive technique for suppressing vibration in flexible structures using a multi-layered piezoelectric element, an inductor, and a resistor. The objective of using a multi-layered piezoelectric element is to increase its capacitance. A piezoelectric element with a large capacitance value does not require an active electrical circuit to simulate an inductor with a large inductance value. The effect of multi-layering of piezoelectric elements was theoretically analyzed through an equivalent transformation of a multi-layered piezoelectric element into a single-layered piezoelectric element. The governing equations were derived using this equivalent transformation. The effect of the resistances of the inductor and piezoelectric elements were considered because the sum of these resistances may exceed the optimum resistance. The performance of the passive vibration suppression using an LR circuit was compared to that of the method where a resistive circuit is used assuming that the sum of the resistances of the inductor and piezoelectric elements exceeds the optimum resistance. The effectiveness of the proposed method and theoretical analysis was verified through simulations and experiments.

Development of impact-type rotary actuator and application for MEMS microrobot by bare chip IC of hardware neuron model

This paper proposes an impact-type microelectro mechanical systems (MEMS) rotary actuator and application for a millimeter-scale MEMS microrobot. The rotational motion of the actuator was generated by vibration of a multilayer piezoelectric element. The size of the fabricated actuator was 1.0 mm × 4.4 mm × 3.2 mm. The fabricated actuator was controlled by the pulse-type hardware neuron model (P-HNM) as the biomimetics technology, and it was integrated in a CMOS IC. The maximum rotational speed was 37.5 rpm when an applied neuron frequency was 39.6 kHz and an input voltage was 3.48 V. The actuator showed the low power consumption of 96.4 mW. The fabricated actuator and the fabricated control circuit that included the P-HNM were built in the MEMS microrobot. The size of the fabricated microrobot was 4.0 mm × 4.6 mm × 4.8 mm.

Resonance frequency ratio control with an additional inductor for a miniaturized resonant-type SIDM actuator

A smooth impact drive mechanism (SIDM) is one type of piezoelectric actuator that converts a saw-shaped piezoelectric displacement to linear (or rotational) motion. For sufficient displacement, a soft-type multilayered piezoelectric element is essential; however, such a piezoelectric element prevents efficient driving due to its low quality factor. To overcome this problem, we proposed a resonant-type SIDM using a hard-type single-layered piezoelectric element. In this resonant-type SIDM, the first and third longitudinal resonant sinusoidal vibration modes were combined to obtain a quasi-saw-shaped waveform. To realize such a saw-shaped waveform, precise adjustment of the resonance frequency ratio is essential. However, it is not easy to regulate the resonance frequency ratio by just the transducer design because of the fabrication error. As a solution for this issue, this study proposes to adjust the frequency ratio by inserting an electrical inductor in series with the piezoelectric transducer. With this method, the resonance frequency ratio was controlled, and the rotor velocity increased as expected.

A Millimetre-Sized Robot Realized by a Piezoelectric Impact-Type Rotary Actuator and a Hardware Neuron Model

Micro-robotic systems are increasingly used in medicine and other fields requiring precision engineering. This paper proposes a piezoelectric impact-type rotary actuator and applies it to a millimetre-size robot controlled by a hardware neuron model. The rotary actuator and robot are fabricated by micro-electro-mechanical systems (MEMS) technology. The actuator is composed of multilayer piezoelectric elements. The rotational motion of the rotor is generated by the impact head attached to the piezoelectric element. The millimetre-size robot is fitted with six legs, three on either side of the developed actuator, and can walk on uneven surfaces like an insect. The three leg parts on each side are connected by a linking mechanism. The control system is a hardware neuron model constructed from analogue electronic circuits that mimic the behaviour of biological neurons. The output signal ports of the controller are connected to the multilayer piezoelectric element. This robot system requires no specialized software programs or A/D converters. The rotation speed of the rotary actuator reaches 60 rpm at an applied neuron frequency of 25 kHz during the walking motion. The width, length and height of the robot are 4.0, 4.6 and 3.6 mm, respectively. The motion speed is 180 mm/min.

Acoustic scattering measurements by an ultra-broadband transducer using multilayer piezoelectric elements

A Langevin-type broadband transducer has been built using multilayer piezoelectric elements. The resonance frequency of this element was 138 kHz, but the quality factor was very low and the transducer had broadband sensitivities due to Langevin structure. The useful frequency band was 20-150 kHz and the beam widths at 38 and 120 kHz were 21.2 and 6.6 degrees, respectively. An echo-sounding system has been constructed using commercially available equipments and the system calibration and acoustic scattering measurements have been conducted using a 2-ms linear-frequency-modulated signal. The system response has been successfully determined using a 20.6-mm-diameter tungsten carbide sphere as a standard target. Furthermore, the target strength (TS) spectrum of a 38.1-mm-diameter tungsten carbide sphere has been measured and the measured TS spectrum was in good agreement with the predicted TS spectrum based on the exact modal series solution. [Work supported by Grant-in-Aid for Scientific Research and TUMSAT.]

The Design and Test of a New Kind of Piezoelectric Motor Based on Standing Wave and Multilayer

Based on the previous research on multilayer piezoelectric micromotor, an improved standing wave piezoelectric micromotor is designed and fabricated. Multilayer piezoelectric elements are sandwiched as a stator of piezoelectric motor by screw thread structure to provide prestress for high power acoustic vibration. In this study, the micro-vibration and mode shapes were measured and investigated using the finite element method and Doppler Polytec300-F scanning vibrometer. The motor performance has been experimentally tested. Results showed that standing wave driving mode can bring the advantages of multilayer ceramic into play, thereby improve the output performance of piezoelectric micromotor.

DESIGN ISSUES OF MULTILAYER PIEZOELECTRIC BIOSENSORS

International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 431-434 (2003) Design, Modelling and SimulationNo AccessDESIGN ISSUES OF MULTILAYER PIEZOELECTRIC BIOSENSORSW. Z. LI, J. M. XUE, Z. H. ZHOU, J. WANG, H. ZHU, J. M. MIAO, and S. J. O'SHEAW. Z. LIDepartment of Materials Science, National University of Singapore, Singapore Search for more papers by this author , J. M. XUEDepartment of Materials Science, National University of Singapore, Singapore Search for more papers by this author , Z. H. ZHOUDepartment of Materials Science, National University of Singapore, Singapore Search for more papers by this author , J. WANGDepartment of Materials Science, National University of Singapore, Singapore Search for more papers by this author , H. ZHUMicromachines (MEMS) Centre, Nanyang Technological University, Singapore Search for more papers by this author , J. M. MIAOMicromachines (MEMS) Centre, Nanyang Technological University, Singapore Search for more papers by this author , and S. J. O'SHEAMicro- & Nano-System Lab, Institute of Materials Research & Engineering, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001447Cited by:0 Previous AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractOne of the work kind modes of the multilayer piezoelectric biosensors is to detect changes in resonant frequency resulted from binding and hybridization of biomolecules. In this work, mechanical design issues of multilayer piezoelectric biosensor (consisting of Si, SiO2, PZT, Pt electrode and biolayer) with high sensitivity are investigated. Piezoelectric effect matrices are included in the finite element simulation model. Harmonic response analysis is employed to determine the geometry parameters of the multilayer biosensor and predict the piezoelectrical signals subjected to base vibration. The relationships between the dimensions of the multilayer and the resonance frequency, mass sensitivity, piezoelectrical response are studied. At the same time, the thermal mismatch effects on the mechanical and electrical characteristics of the multilayer biosensor are also investigated. It is shown that the frequency of the sensor increase by the thermal mismatch bending, while it is small in the application temperature range of the biosensors. Simulation results also showed that the multilayer piezoelectric biosensor can have a greatly enhanced minimum detectable mass density (MDMD) of 0.05 ng/cm2, as compared to 10 ng/cm2 from the quartz crystal microbalance (QCM).Keywords:Multilayer piezoelectric biosensorsFinite Element Analysis (FEA)Sensitivity References A. M. Moulin, S. J. O'Shea and M. E. Welland, Ultramicroscopy 82, 23 (2000). Crossref, Google ScholarR. Raiteriet al., Sensors and Actuators B 61, 213 (1999). Google ScholarJ. Fritzet al., Science 288, 316 (2000). Crossref, Google ScholarF. Shenet al., Sensors and Actuators A 95, 17 (2001). Crossref, Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 02 Metrics History KeywordsMultilayer piezoelectric biosensorsFinite Element Analysis (FEA)SensitivityPDF download

Development of High-Power Micropump Using Inertia Effect of Fluid for Small-Sized Fluid Actuators

The authors have been developing a high output micropump for the small but powerful fluid actuator which has a source of fluid power individually. In this paper, a novel piezoelectric micropump is proposed, which utilizes the pipeline element saving kinetic energy and generated inertia effect of fast outflow, instead of the outlet check valve. Through experiments on load characteristics using water as a working fluid, the newly devised micropump attained a higher fluid output power than 70mW and the volumetric efficiency of the pump exceeds 100% with the pump chamber diameter of 3mm. Furthermore, by measuring the internal pressure of the pump, the above-mentioned principle is confirmed based on the relation of the driving voltage of a multilayered piezoelectric element and the internal pressure of the pump. Moreover, it is proved that bending operation of a finger-type flexible actuator is possible using the developed micropump. Next, a micro-bender which uses the fluid power is developed, as another example of application of the micropump.

A single-element tuning fork piezoelectric linear actuator.

This paper describes the design of a piezoelectric tuning-fork, dual-mode motor. The motor uses a single multilayer piezoelectric element in combination with tuning fork and shearing motion to form an actuator using a single drive signal. Finite-element analysis was used in the design of the motor, and the process is described along with the selection of the device's materials and its performance. Swaging was used to mount the multilayer piezoelectric element within the stator. Prototypes of the 25-mm long bidirectional actuator achieved a maximum linear no-load speed of 16.5 cm/s, a maximum linear force of 1.86 N, and maximum efficiency of 18.9%.

Gas and Pellet Injection Systems for JT-60 and JT-60U

Designs and operations of the gas system and pellet injection systems for JT-60 and JT-60U are described. A gas injection valve that is a key component of the gas injection system was developed using a multilayer piezoelectric element. The maximum flow rate of this system is 43.3 Pa⋅m3/s. The valve has mechanism for adjustment at atmospheric side meaning that a repair and an adjustment can be conducted without ventilation inside a vacuum vessel. It was confirmed that the effect of magnetic field and temperature change on the valves in the JT-60U environment was negligible.In JT-60U, two systems of pellet injector – a pneumatic drive and a centrifugal one – were developed. The pneumatic type attained a pellet velocity of 2.3 km/s, which was the world record at the time in 1988. On the other hand, the centrifugal one was developed in 1998. This injector can eject trains of up to 40 cubic (2.1 mm3) pellets at frequencies of 1 to 10 Hz and speed of 0.1 to 1.0 km/s. A guide tube for a magnetic high field side injection (HFS) (top) was also developed in 1999. The pellet injection experiment with the HFS system started in 2000. In addition, another guide tube for HFS(mid) injection was newly developed and installed in March 2001. These systems are working well.

Improved signal-to-noise ratio in hybrid 2-D arrays: experimental confirmation.

2-D array transducers have shown significant promise for medical ultrasound over conventional linear arrays, at the cost of increasing the number of channels, difficulty of fabrication and array element impedance. The increase in element impedance reduces the power coupled to a 2-D array element from a conventional 50 omega source in transmit mode. If the array is sparse, which is typical of 2-D arrays, then the net power coupled into the front acoustic load is reduced when compared to a fully sampled aperture. Furthermore, the received signal-to-noise ratio (SNR), when measured through a nonideal amplifier, is degraded because the high impedance 2-D array transducer element cannot efficiently drive the coaxial cable. The reduction in transmit sensitivity and received SNR can be circumvented with the application of multilayer piezoelectric elements. The improvement in transmit occurs because the transducer impedance is better matched to the impedance of the source. In receive, multilayer elements allow more of the open circuit received voltage to fall across the input of the high impedance preamplifier. In this case, the same number of layers are used in transmit and receive. Recently, it has been suggested that separate optimization of the transmit channel and receive channel (a hybrid array) would further improve the pulse-echo SNR. In this paper, we fabricated and tested a hybrid array operating at 1 MHz using a multilayer transmit element and single layer receive element. A 7 omega transmitter and high impedance preamplifier were placed adjacent to the transmit and receive elements within the transducer assembly. The hybrid pulse-echo SNR improved by 26.4 dB over the conventional array. The experimental result showed good agreement with the KLM model. Furthermore, KLM simulations showed that as the operating frequency of the array increases, the overall improvement over the conventional array increases. For example, a 1.5-D array operating at 2 M Hz had an improvement of 30 dB whereas a 7.5 M Hz 1.5-D array showed an increase of approximately 38 dB. The separate optimization of the transmit and receive channel for 2-D arrays showed even greater improvement than for 1.5-D arrays. For example, a 2 MHz 2-D array had an improvement of over 44 dB.

Hydraulic Actuators Driven by Piezoelectric Elements. 4th Report. Construction of Mathematical Models for Simulation.

In this paper we present mathematical models for hydraulic actuators which consist of a reciprocating pump driven by a multilayered piezoelectric element, a sigle-rod cylinder, a variable throttle valve and an accumulator, where the control input is the amplitude of rectangular wave voltages applied to the piezoelectric element. The mathematical model of the actuator was derived by considering the compressibility of the working liquid, the nonlinear characteristics of the piezoelectric element, the time delayed motion of the pumping valves, and the viscous and coulomb frictions of the cylinder. In order to confirm the validity of the proposed model, various simulations were carried out for the output power of the piezoelectric pump, the dynamic behavior of the actuator and the performance of the position control system, and good agreement with the experimental results was obtained. These simulations show that the precise description of pumping valve characteristics is crucial to the evaluation of actuator performance.

Hydraulic Actuators Driven by Piezoelectric Elements. 3rd Report. Position Control Using Piezoelectric Pump and Hydraulic Cylinder.

This paper presents the working principle and the control performance of a hydraulic actuator system driven by a multilayered piezoelectric element. The main parts of the system are an accumulator, a reciprocating pump driven by the piezoelectric element, a single-rod cylinder and a control valve. The control valve is a variable throttle valve inserted between the rod-side and the head-side ports of the cylinder. When the pump is driven by its maximum voltage, the control valve is shut off, and the piston rod is then drawn into the cylinder by the working liquid supplied from the pump. Inversely, when the voltage becomes zero, the control valve is open, and the piston rod is pushed out of the cylinder by the working liquid supplied from the accumulator. Thus, the velocity of the rod is manipulated by changing the voltage applied to the pump. The experimental device was constructed using a piezoelectric element of 22 mm diameter and 55. 5 mm length, and a cylinder of 12 mm inner diameter and 6 mm rod diameter. The positioning controller was desinged using PD, feedforward and phase-lag compensators and a disturbance observer. Then, the positioning accuracies of about l0 μm and 50 μm were obtained for the external load forces of 0N and 60N, respectively, where the response frequency was about l0 Hz. Numerical simulations based on a set of mathematical models were also carried out to confirm the control performance of the proposed actuator system.

Method of producing a multilayer piezoelectric element

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Hydraulic Actuators Driven by Piezoelectric Elements. 2nd Report. Enlargement of Piezoelectric Pumps' Output Power Using Hydraulic Resonance.

This paper presents a scheme to obtain large output power from a hydraulic reciprocating pump in which the diaphragm is driven by a multilayer piezoelectric element (MLPE). The scheme is summarized as follows : (i) reduction of the spring constant of the diaphragm for elongation of the MLPE, (ii) application of static pressure on the working liquid in the hydraulic circuit, and (iii) connection of pumping valves and pressure chambers with pipes having the same resonant frequency. When the MLPE is driven at a frequency near the resonant frequency of the pipes, the pressure behind the exhaust valve fluctuates violently such that it decreases at the exhaust stroke. Similarly, the pressure in front of the intake valve increases at the intake stroke. Then, due to the elasticity of the MLPE, the flow rate of the pump increases considerably compared with the case of no resonance. To illustrate the effectiveness of the scheme, it was applied to improve the performance of a pump (max. power 34 W, efficiency 27%) which was driven by the MLPE of 22 mm diameter, 55.5 mm length and 170 g mass. Consequently, its maximum power and efficiency were increased to 62 W and 35%, respectively. Since the efficiency of the valves was only 51% in this experiment, further improvement should be achieved in the future by using better valves.