Abstract
Based on the previous research on multilayer piezoelectric micromotor, an improved standing wave piezoelectric micromotor is designed and fabricated. Multilayer piezoelectric elements are sandwiched as a stator of piezoelectric motor by screw thread structure to provide prestress for high power acoustic vibration. In this study, the micro-vibration and mode shapes were measured and investigated using the finite element method and Doppler Polytec300-F scanning vibrometer. The motor performance has been experimentally tested. Results showed that standing wave driving mode can bring the advantages of multilayer ceramic into play, thereby improve the output performance of piezoelectric micromotor.
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