Multilayer Optics Research Articles

Increased neutron reflectivity and polarization of neutron-optical engineered Fe/B411CTi multilayer optics

The concept of scattering length density tuning for improved polarization is investigated for Fe/B411CTi multilayers and compared to the commonly used Fe/Si system in polarizing multilayer neutron optics. X-ray and neutron reflectivity, magnetization, and neutron polarization were measured on such multilayers, highlighting differences from conventional Fe/Si multilayers. The multilayer systems were deposited with 25 Å period thickness, a layer thickness ratio of 0.35, and 20 periods using ion-assisted dc magnetron sputtering. Replacing Si with B411CTi for these multilayers showed an increase in reflectivity due to a reduction in interface width. Tuning the ratio between B411C and Ti in the nonmagnetic layers enabled a wide range of scattering length density contrasting and matching for spin-down neutrons, which in turn led to an improved polarization. These findings demonstrate the potential of Fe/B411CTi multilayers as a promising option for polarizing neutron optics and highlight the concept of scattering length density tuning in a large range using B411CTi. Published by the American Physical Society 2024

Statistics of Lyapunov exponent in random Fibonacci multilayer

Abstract We numerically investigated the localization properties of band-gap and band-edge modes in a one-dimensional random Fibonacci optical multilayer. The statistics of the Lyapunov Exponent (LE) reveal distinct behaviors of localization effects for band-edge and band-gap modes as a function of disorder strength. In particular, a deviation from the single parameter scaling theory (SPST) of localization was observed within a frequency window corresponding to the band-gap of an ordered Fibonacci multilayer. To provide a physical explanation for the violation of SPST, a close correlation between the frequency distribution of the resonant modes in the band-gap and the variance of the LE has been found. The spatial distribution of resonant modes has been reported and discussed. Finally, the dynamics of the gap closing of the two main band-gaps as a function of the disorder strength has been analyzed.

On the thermal stability of multilayer optics for use with high X-ray intensities

High-intensity X-ray free electron laser (XFEL) beams require optics made of materials with minimal radiation absorption, high diffraction efficiency, and high radiation hardness. Multilayer Laue lenses (MLLs) are diffraction-based X-ray optics that can focus XFEL beams, as already demonstrated with tungsten carbide/silicon carbide (WC/SiC)-based MLLs. However, high atomic number materials such as tungsten strongly absorb X-rays, resulting in high heat loads. Numerical simulations predict much lower heat loads in MLLs consisting of low atomic number Z materials, although such MLLs have narrower rocking curve widths. In this paper, we first screen various multilayer candidates and then focus on Mo2C/SiC multilayer due to its high diffraction efficiency. According to numerical simulations, the maximum temperature in this multilayer should remain below 300°C if the MLL made out of this multilayer is exposed to an XFEL beam of 17.5 keV photon energy, 1 mJ energy per pulse and 10 kHz pulse repetition rate. To understand the thermal stability of the Mo2C/SiC multilayer, we performed a study on the multilayers of three different periods (1.5, 5, and 12 nm) and different Mo2C to SiC ratios. We monitored their periods, crystallinity, and stress as a function of annealing temperature for two different heating rates. The results presented in this paper indicate that Mo2C/SiC-based MLLs are viable for focusing XFEL beams without being damaged under these conditions.

Acceleration mechanisms of energetic ion debris in laser-driven tin plasma EUV sources

Laser-driven tin plasmas are driving new-generation nanolithography as sources of extreme ultraviolet (EUV) radiation centered at 13.5 nm. A major challenge facing industrial EUV source development is predicting energetic ion debris produced during the plasma expansion that may damage the sensitive EUV channeling multilayer optics. Gaining a detailed understanding of the plasma dynamics and ion acceleration mechanisms in these sources could provide critical insights for designing debris mitigation strategies in future high-power EUV sources. We develop a fully kinetic model of tin-EUV sources using one-dimensional particle-in-cell simulations to study ion debris acceleration, which will be valuable for cross-validation of radiation-hydrodynamic simulations. An inverse-bremsstrahlung heating operator is used to model the interaction of a tin target with an Nd:YAG laser, and thermal conduction is included through a Monte Carlo Coulomb collision operator. While the large-scale evolution is in reasonable agreement with analogous hydrodynamic simulations, the significant timescale for collisional equilibration between electrons and ions allows for the development of prominent two-temperature features. A collimated flow of energetic ions is produced with a spectrum that is significantly enhanced at high energies compared to fluid simulations. The dominant acceleration mechanism is found to be a large-scale electric field supported mainly by the electron pressure gradient, which is enhanced in the kinetic simulations due to the increased electron temperature. We discuss the implications of these results for future modeling of tin-EUV sources and the development of debris mitigation schemes.

Multilayer Optics for Synchrotron Applications

AbstractX‐ray multilayer optics play a vital role in synchrotron optics due to their ability to generate constructive interference. These devices typically consist of several tens to hundreds of periods of alternating layers coated on a substrate. In contrast to single‐layer mirrors that reflect X‐rays within a specific energy range, multilayer optics can be tailored to achieve a high reflection over a broad energy spectrum. This is a sought‐after property for many beamlines and has led to the development of numerous new X‐ray applications and capabilities. This review highlights advances in multilayer optics, including fabrication techniques, layer structure design, material choice, and strategies to enhance performance. This is placed in the context of recent applications of such multilayers as monochromator and gratings, focusing devices, and polarizers. Current challenges and the future outlook within this field are also proposed. This comprehensive summary of a rapidly advancing field highlights recent achievements and is intended to promote practical applications in terms of the use of multilayer synchrotron optics.

Sub-micrometre focusing of intense 100 keV X-rays with multilayer reflective optics.

A high-flux sub-micrometre focusing system was constructed using multilayer focusing mirrors in Kirkpatrick-Baez geometry for 100 keV X-rays. The focusing mirror system had a wide bandwidth of 5% and a high peak reflectivity of 74%. Performance was evaluated at the undulator beamline BL05XU of SPring-8, which produced an intense 100 keV X-ray beam with a bandwidth of 1%. When the light source was focused directly in both vertical and horizontal directions, the beam size was measured to be 0.32 µm (V) × 5.3 µm (H) with a flux of 1 × 1012 photons s-1. However, when a limited horizontal slit was used to form a secondary source, the focusing beam size decreased to 0.25 µm (V) × 0.26 µm (H) with a flux of 6 × 1010 photons s-1. The 200 nm line and space patterns of a Siemens star chart made of tantalum were clearly resolved by the absorption contrast of the focused beam. This 100 keV focusing system is applicable to various fields of nondestructive analyses with sub-micrometre resolutions.

Crystallographic Data Collection Using a Multilayer Monochromator on an Undulator Beamline at the Shanghai Synchrotron Radiation Facility

To resolve photons hungry for weak diffraction samples by the crystallographic method, a double-multilayer monochromator (DMM) was employed on an undulator beamline (BL17UM) at the Shanghai Synchrotron Radiation Facility (SSRF) to provide a focused sub-micron beam with high brightness for macromolecular crystallography experiments. High-quality crystallographic datasets from model protein crystal samples were collected and processed by an existing crystallographic program for structure solution and refinement. The data quality was compared with datasets from a normal silicon crystal monochromator to evaluate the bandwidth of the DMM effect on these crystallographic data. This experiment demonstrates that multilayer optics on an undulator beamline may play a valuable role in satisfying the demands of structure-related research, which requires novel methods.

Reflective, polarizing, and magnetically soft amorphous neutron optics with 11B-enriched B4C.

The utilization of polarized neutrons is of great importance in scientific disciplines spanning materials science, physics, biology, and chemistry. However, state-of-the-art multilayer polarizing neutron optics have limitations, particularly low specular reflectivity and polarization at higher scattering vectors/angles, and the requirement of high external magnetic fields to saturate the polarizer magnetization. Here, we show that, by incorporating 11B4C into Fe/Si multilayers, amorphization and smooth interfaces can be achieved, yielding higher neutron reflectivity, less diffuse scattering, and higher polarization. Magnetic coercivity is eliminated, and magnetic saturation can be reached at low external fields (>2 militesla). This approach offers prospects for substantial improvement in polarizing neutron optics with nonintrusive positioning of the polarizer, enhanced flux, increased data accuracy, and further polarizing/analyzing methods at neutron scattering facilities.

Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics.

High-resolution imaging of buried metal interconnect structures in advanced microelectronic products with full-field X-ray microscopy is demonstrated in the hard X-ray regime, i.e., at photon energies > 10 keV. The combination of two multilayer optics-a side-by-side Montel (or nested Kirkpatrick-Baez) condenser optic and a high aspect-ratio multilayer Laue lens-results in an asymmetric optical path in the transmission X-ray microscope. This optics arrangement allows the imaging of 3D nanostructures in opaque objects at a photon energy of 24.2 keV (In-Kα X-ray line). Using a Siemens star test pattern with a minimal feature size of 150 nm, it was proven that features < 150 nm can be resolved. In-Kα radiation is generated from a Ga-In alloy target using a laboratory X-ray source that employs the liquid-metal-jet technology. Since the penetration depth of X-rays into the samples is significantly larger compared to 8 keV photons used in state-of-the-art laboratory X-ray microscopes (Cu-Kα radiation), 3D-nanopattered materials and structures can be imaged nondestructively in mm to cm thick samples. This means that destructive de-processing, thinning or cross-sectioning of the samples are not needed for the visualization of interconnect structures in microelectronic products manufactured using advanced packaging technologies. The application of laboratory transmission X-ray microscopy in the hard X-ray regime is demonstrated for Cu/Cu6Sn5/Cu microbump interconnects fabricated using solid-liquid interdiffusion (SLID) bonding.

Phonon Characteristics of Gas-Source Molecular Beam Epitaxy-Grown InAs1−xNx/InP (001) with Identification of Si, Mg and C Impurities in InAs and InN

The lattice dynamical properties of dilute InAs1−xNx/InP (001) epilayers (0 ≤ x ≤ 0.03) grown by gas-source molecular beam epitaxy were carefully studied experimentally and theoretically. A high-resolution Brüker IFS 120 v/S spectrometer was employed to measure the room-temperature infrared reflectivity (IRR) spectra at near-normal incidence (θi = 0). The results in the frequency range of 180–500 cm−1 revealed accurate values of the characteristic In-As-like and In-N-like vibrational modes. For InAs1−xNx alloys, a classical “Drude–Lorentz” model was constructed to obtain the dielectric functions ε~ω in the far IR regions by incorporating InAs-like and InN-like transverse optical ωTO modes. Longitudinal optical ωLO phonons were achieved from the imaginary parts of the simulated dielectric loss functions. The theoretical results of IRR spectra for InAs1−xNx/InP (001) epilayers using a multi-layer optics methodology provided a very good agreement with the experimental data. At oblique incidence (θi ≠ 0), our study of s- and p-polarized reflectance (Rs,p(ω)) and transmission (Ts,p(ω)) spectra allowed the simultaneous perception of the ωTO and ωLO phonons of the InAs, InN and InAs0.97N0.03 layers. Based on the average t-matrix Green’s function theory, the results of local vibrational modes for light SiIn+ donors and SiAs−, CAs− acceptors in InAs were found in good agreement with the existing Raman scattering and infrared spectroscopy data. InInN, however, the method predicted an in-band mode for the MgIn− acceptor while projecting an impurity mode of the SiIn+ donor to appear just above the maximum ωmaxInN[≡595 cm−1] phonon frequency region. In InAs1−xNx/InP (001) epifilms, the comparison of reflectivity/transmission spectra with experiments and the predictions of impurity modes for isoelectronic donor and acceptor impurities in InAs and InN can be valuable for appraising the role of defects in other technologically important semiconductors.

Nanoscale spectromicroscopy with the full-field X-ray microscope at the BESSY II electron storage ring in the soft and tender X-ray range

In this paper, we give an overview of the nanoscale spectromicroscopy studies performed with the full-field X-ray microscope at the BESSY II electron storage ring. We do not consider spectromicroscopy studies performed with X-ray microscopes operated at other synchrotron sources. Such studies can be found in the literature. To our knowledge, the full-field X-ray microscope at the BESSY II storage ring is the first one operating with both a plane-grating-monochromator (PGM) beamline equipped with multi-layer optics for the tender X-ray range, as well as with standard optical elements for the soft X-ray range. We discuss how this instrument has been used in various published NEXAFS-TXM studies to probe low dimensional nanostructures. This research work paves the way for understanding electronic structures approaching the atomic scale, and will thereby help in the design of tailored functional systems.

Bioinspired Photonic Microchip with Molecularly Imprinted Polymer for Single Recognition of c-Myc Protein in Predictive Medical Diagnostics.

Monitoring of trace c-Myc protein as the biomarker of ubiquitous cancers is critical in achieving predictive medical diagnostics. However, qualitative and quantitative detection of c-Myc protein with superior single selectivity and sensitivity is still challenging. Herein, a bioinspired photonic sensing microchip for single recognition of c-Myc protein is outlined with two synergistic aspects involving chemical and physical design criteria. Chemical design uses specific molecularly imprinted polymer (MIP) with exquisite complementarity in its chemical functions and spatially geometries to targeted c-Myc protein, leading to excellent sensitivity and selectivity for single identification. Physical design involves optical geometrical double-reflection polarization rotation and multilayer interference of the fabricated periodic photonic architecture inspired by Papilio palinurus butterfly wings to enhance the spectral diversity of reflectance. Therefore, a one-of-a-kind sensing platform integrated the advantages of MIP and bioinspired photonic structure is demonstrated to actualize distinctive signal conversion and amplification for qualitative and quantitative detection of trace c-Myc protein, accompanied with superior sensitivity (detection limit is 0.014μg mL-1 ), selectivity, stability, anti-interference ability as well as rapid response/recovery time. This sensor microchip uniquely ventures into the territory of functionally combining bioinspired photonic structure with MIP absorbers, proven promising for prevention or diagnosis of cancers in medical field. This article is protected by copyright. All rights reserved.

A Convenient All-Cell Optical Imaging Method Compatible with Serial SEM for Brain Mapping.

The mammalian brain, with its complexity and intricacy, poses significant challenges for researchers aiming to understand its inner workings. Optical multilayer interference tomography (OMLIT) is a novel, promising imaging technique that enables the mapping and reconstruction of mesoscale all-cell brain atlases and is seamlessly compatible with tape-based serial scanning electron microscopy (SEM) for microscale mapping in the same tissue. However, currently, OMLIT suffers from imperfect coatings, leading to background noise and image contamination. In this study, we introduced a new imaging configuration using carbon spraying to eliminate the tape-coating step, resulting in reduced noise and enhanced imaging quality. We demonstrated the improved imaging quality and validated its applicability through a correlative light-electron imaging workflow. Our method successfully reconstructed all cells and vasculature within a large OMLIT dataset, enabling basic morphological classification and analysis. We also show that this approach can perform effectively on thicker sections, extending its applicability to sub-micron scale slices, saving sample preparation and imaging time, and increasing imaging throughput. Consequently, this method emerges as a promising candidate for high-speed, high-throughput brain tissue reconstruction and analysis. Our findings open new avenues for exploring the structure and function of the brain using OMLIT images.

Human Coronary Plaque Optical Coherence Tomography Image Repairing, Multilayer Segmentation and Impact on Plaque Stress/Strain Calculations.

Coronary vessel layer structure may have a considerable impact on plaque stress/strain calculations. Most current plaque models use single-layer vessel structures due to the lack of available multilayer segmentation techniques. In this paper, an automatic multilayer segmentation and repair method was developed to segment coronary optical coherence tomography (OCT) images to obtain multilayer vessel geometries for biomechanical model construction. Intravascular OCT data were acquired from six patients (one male; mean age: 70.0) using a protocol approved by the local institutional review board with informed consent obtained. A total of 436 OCT slices were selected in this study. Manually segmented data were used as the gold standard for method development and validation. The edge detection method and cubic spline surface fitting were applied to detect and repair the internal elastic membrane (IEM), external elastic membrane (EEM) and adventitia-periadventitia interface (ADV). The mean errors of automatic contours compared to manually segmented contours were 1.40%, 4.34% and 6.97%, respectively. The single-layer mean plaque stress value from lumen was 117.91 kPa, 10.79% lower than that from three-layer models (132.33 kPa). On the adventitia, the single-layer mean plaque stress value was 50.46 kPa, 156.28% higher than that from three-layer models (19.74 kPa). The proposed segmentation technique may have wide applications in vulnerable plaque research.

High-fluence and high-gain multilayer focusing optics to enhance spatial resolution in femtosecond X-ray laser imaging

With the emergence of X-ray free-electron lasers (XFELs), coherent diffractive imaging (CDI) has acquired a capability for single-particle imaging (SPI) of non-crystalline objects under non-cryogenic conditions. However, the single-shot spatial resolution is limited to ~5 nanometres primarily because of insufficient fluence. Here, we present a CDI technique whereby high resolution is achieved with very-high-fluence X-ray focusing using multilayer mirrors with nanometre precision. The optics can focus 4-keV XFEL down to 60 nm × 110 nm and realize a fluence of >3 × 105 J cm−2 pulse−1 or >4 × 1012 photons μm−2 pulse−1 with a tenfold increase in the total gain compared to conventional optics due to the high demagnification. Further, the imaging of fixed-target metallic nanoparticles in solution attained an unprecedented 2-nm resolution in single-XFEL-pulse exposure. These findings can further expand the capabilities of SPI to explore the relationships between dynamic structures and functions of native biomolecular complexes.

Bortolanite, Ca2(Ca1.5Zr0.5)Na(NaCa)Ti(Si2O7)2(FO)F2, a New Rinkite-Group (Seidozerite Supergroup) TS-Block Mineral from the Bortolan Quarry, Poços de Caldas Massif, Minas Gerais, Brazil

ABSTRACT Bortolanite (IMA 2021–040a), ideally Ca2(Ca1.5Zr0.5)Na(NaCa)Ti(Si2O7)2(FO)F2, is a rinkite-group (seidozerite supergroup) TS-block mineral from Poços de Caldas massif, Minas Gerais, Brazil. Associated minerals are götzenite, nepheline, alkali feldspar, aegirine, natrolite, analcime, and manganoan pectolite. Bortolanite shows complex compositional zoning with götzenite and is visually indistinguishable from götzenite. Bortolanite is pale-yellow to brown and has a vitreous luster. Cleavage is perfect parallel to {100}. Mohs hardness is 5. Bortolanite fluoresces weak yellow under ultraviolet light (100–280 nm). Dcalc. = 3.195 g/cm3. Bortolanite is biaxial (+) with refractive indices (λ = 589.3 nm) α = 1.673(2), β = 1.677(2), γ = 1.690(2); 2Vmeas. = 56(2)°, 2Vcalc. = 58.4°. Chemical analysis by electron microprobe gave Nb2O5 1.07, HfO2 0.20, ZrO2 6.70, TiO2 9.94, SiO2 32.49, Gd2O3 0.12, Nd2O3 0.37, Ce2O3 1.25, La2O3 0.65, Y2O3 0.31, FeO 0.59, MnO 1.46, CaO 31.15, Na2O 8.36, F 6.95, O=F –2.93, sum 98.68 wt.%. The empirical formula based on 18 (O + F) apfu is (Ca1.88La0.03Ce0.06Nd0.02Gd0.01)Σ2[Ca1.56(Zr0.41Hf0.01Y0.02)Σ0.44]Σ2(Na0.85Ca0.15)Σ1(Na1.18Ca0.60Mn0.16Fe2+0.06)Σ2(Ti0.94Nb0.06)Σ1(Si4.07O14)(O1.24F0.76)Σ2F2, Z = 1. The simplified formula is Ca2(Ca,Zr)2Na(Na,Ca)2Ti(Si2O7)2(O,F)2F2. Bortolanite is triclinic, space group P, a 9.615(3), b 5.725(2), c 7.316(2) Å, α 89.91(1), β 101.14(1), γ 100.91(1)°, V 387.7(3) Å3. The crystal structure was refined to R1 = 3.19% on the basis of 2194 unique reflections [F &amp;gt; 4σ(F)] measured using a Bruker APEX II ULTRA three-circle diffractometer with a rotating-anode generator (MoKα), multilayer optics, and an APEX II 4K CCD detector. The crystal structure of bortolanite is a framework of TS (Titanium-Silicate) blocks [structure type B3(RG)], where the TS block consists of HOH sheets (H-heteropolyhedral, O-octahedral). The TS block exhibits linkage and stereochemistry typical for the rinkite group where Ti (+ Nb + Zr) = 1 apfu. The O sheet is composed of Ti-dominant MO(1) octahedra, [8]Na-dominant MO(2) polyhedra and (Na,Ca) MO(3) octahedra. In the H sheet in bortolanite, Si2O7 groups link to (Ca1.5Zr0.5) MH and Ca-dominant AP octahedra. Along a, TS blocks link directly through common edges of MH and AP polyhedra and common vertices of MH, AP, and Si polyhedra of the H sheets belonging to two TS blocks. The name bortolanite is after the locality: the Bortolan quarry in the Poços de Caldas massif, Brazil. Bortolanite is isostructural with three rinkite-group minerals: fogoite-(Y), hainite-(Y), and götzenite.

Assessing thermodynamical properties of Al1−xGaxSb alloys and optical modes for Al1−xGaxSb/GaAs epifilms and (AlSb)m/(GaSb)n superlattices

A generalized Green's function (GF) theory is adopted in the framework of a realistic rigid-ion-model (RIM) to assess the composition, x-dependent lattice dynamics, and thermodynamical characteristics of ideal random Al1−xGaxSb alloys. For simulating phonons, the alloy parameters are achieved by interpolating the values of the RIM force constants between AlSb and GaSb without requiring any additional interactions. The outcomes of phonon dispersions ωj(q→), Debye temperature ΘD(T), and specific heat Cv(T) compare favorably well with the existing experimental and theoretical data. An established methodology of multilayer optics is also employed for modeling the far-infrared reflectance and transmission spectra of ultrathin GaSb/GaAs, AlSb/GaAs, Al1−xGaxSb/GaAs epilayers, and (AlSb)m/(GaSb)n/GaAs superlattices at near normal (θi = 0) incidence and oblique (θi ≠ 0) incidence. An accurate appraisal of the x-dependent longitudinal-optical [ωLO(Γ)] and transverse-optical [ωTO(Γ)] phonon splitting by Berreman's effect, along with the calculated GF results of localized vibrational mode (GaSb:Al) and gap mode (AlSb:Ga), is carefully integrated into the modified-random-iso-displacement model to validate the two-phonon mode behavior in Al1−xGaxSb ternary alloys.

Inverse Design of Few-Layer Metasurfaces Empowered by the Matrix Theory of Multilayer Optics

Few-layer metasurfaces, which are planar artificial arrays composed of more than one functional layer, have been showing unprecedented capabilities for the implementation of integrated and miniaturized optical devices with high efficiency and broad working bandwidth. However, the rich design freedoms of few-layer metasurfaces severely challenge their design and optimization. A universal strategy for the design of few-layer metasurfaces with different desired optical functionalities and an arbitrary number of layers, which can lower the design complexity and the time cost for structural optimization, is still eagerly anticipated by the scientific community. Here, we demonstrate an inverse design strategy based on deep-learning technology for the design of few-layer metasurfaces. By combining the matrix theory of multilayer optics, the proposed algorithm can predict the entire scattering matrix of a few-layer metasurface in tens of seconds with an acceptable accuracy and realize the inverse design of few-layer metasurfaces with different desired functionalities. Thus, the proposed inverse design strategy provides an efficient solution for the reduction of the design complexity of few-layer metasurfaces and significantly lowers the time cost for the structural optimization when compared with the numerical simulation methods based on an iterative process of trial and error, which will be of benefit to and expand the related research.

Prospective wavelengths for projection lithography uing synchrotron radiation

Promising wavelengths for next-generation lithography with a wavelength shorter than 13.5 nm based on a synchrotron X-ray source are discussed. Theoretical and experimental values of the reflection coefficients of multilayer X-ray mirrors providing the maximum reflectivity in the range of 11.4-3.1 nm are presented. The theoretical efficiency of multilayer optics is compared for different wavelengths. Keywords: X-ray lithography, multilayer X-ray optics, multilayer X-ray mirrors.

Research progress of multilayer X-ray imaging optics for plasma diagnostics

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