With the development of the technology, the wireless systems are becoming more heterogeneous with the introduction of various power nodes including femtocells, relays, or distributed antennas. Among the research of wireless network performance, the meta distribution of the signal-to-interference ratio (SIR) has attracted significant attention. Compared to the standard success (coverage) probability, the meta distribution provides much more fine-grained information about the network performance. In this paper, we analyze the meta distribution of the SIR in the multi-tier heterogeneous and hybrid networks, where each tier is based on a homogeneous independent Poisson point process model. For the open tiers (the users can associate with any tier) and the closed tiers (the users can only associate with a certain tier), we study the b th moment of the conditional success probability for the typical user and give the beta approximation of the meta distribution from analysis and simulations. Furthermore, we analyze the per-link rate control for open tiers and closed tiers, which answers the question: “how to set the SIR threshold to meet a target reliability?”. We give the approximate value of the SIR threshold to meet a target reliability and show how the value is related to the path loss exponent and densities.