The present work examines the surface finishing of AISI P20 tool steel, average hardness of 31.5 HRc, in the polishing process by ultrasonic erosion by loose abrasive particles. The study was performed in laboratory equipment, using various alumina and diamond hard particle sizes, ultrasonic frequencies and times. P20 steel is widely employed in the fabrication of polymer injection mould cavities due to its good machinability, homogeneous microstructure, hardness, corrosion and abrasion wear resistance. Mould cavity polishing processes represents the second longest manufacturing process time required to achieve the mould surface finish for good quality polymer parts. This time-consuming and largely artisanal polishing process contributes to high mould costs. Thus, several studies have been carried out in the literature to automate the mould polishing process, aiming to reducing surface roughness and polishing time. Present investigation was carried out in a surface cleaning equipment by the ultrasonic technique with commercial paste of abrasive hard particles used in mould polishing. Three factors were investigated: abrasive particle size, ultrasonic frequency and polishing time. The investigated alumina particle sizes were 0.05, 0.3, and 1.0 micron and the diamond particle size was 1.5 micron, which are the common sizes available in commercial paste for polishing metallography samples. The studied frequencies of the ultrasonic polishing process were 28 and 40 kHz, and the times of polishing process were 15, 30, and 45 minutes. Analysis of variance (ANOVA) of factor effects and two types of DOE analysis were employed to obtain the roughness Ra outcomes by empirical response surface modelling: 3x3 partial factorial design and 4x2 factorial design were used to investigate the surface roughness. The response surface modelling results indicate that the minimum surface roughness Ra of 0.21 micron obtained by ultrasonic polishing correspond to the frequency of 40 kHz, 20 minutes of polishing and alumina particle size of 0.7 microns.