An 18 GHz coplanar waveguide (CPW) monolithic voltage controlled oscillator (VCO) has been demonstrated using InAlAs/InGaAs HBT technology. The VCO achieves 6% frequency tuning range using a varactor diode constructed from the HBT base-emitter junction. A CPW design was employed to increase the Q-factor of the monolithic resonator as well as reduce the chip size. The VCO obtains an output power of +10/spl plusmn/0.5 dBm over the tuning range and a collector efficiency of 11.5%. A SSB phase noise of -72 and -96 dBc/Hz at 100 kHz and 1 MHz offset frequency from the carrier were achieved, respectively. This represents the first reported phase noise results of an InAlAs/InGaAs-based HBT VCO with a monolithic integrated varactor and are comparable to other MMIC HBT varactor-tuned VCO's reported in this frequency band.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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