The possibility of measuring small pressure variations of the order of 1.33 �9 10 "~ N/m s on a background of 1.33.10 -3 N/m s by using the thermoelectrical principle has been shown in [1] and [2]. The sensitivity threshold of thermoelectric vacuum gauges can be lowered still further by raising the temperature sensitivity of the thermoelectric system and by reducing the electrical thermal fluctuations, as well as the fluctuations of the background pressure. The thermoelectric vacuum gauge designed by us has a sensitivity threshold of 1.33 �9 10 -8 N/m 2 with a background pressure of a nitrogen atmosphere in the range of 13.3-0.133 N/m s. As distinct from the existing thermoelectric vacuum gauges used for the same purpose [1, 2], our instrument can register reliably relative pressure variations of the order of 10-7-10 -5 Pb, where Pb is the background pressure. The sensing thermoelectric system (Fig. la) consists of the heated filament a-b, whose temperature is measured with the thermistor Tr, which is in a thermal and electrical contact with the filament. The filament is made of a 0.02-ram platinum wire. The miniature thermistor T r has the shape of a pearl 0.1 mm in diameter. The element which provides the heat exchange with the rarified gas consists of the filament a-b heated with an electrical current. The thermistor is used only for measuring the filament temperature, but it is not a thermally-active element as in the existing semiconductor vacuum gauges [3]. Therefore, the system shown in Fig. la can be considered as a semiconductor analog of the classical thermoelectric system used in measuring low pressures. The laboratory technology for making such a system is similar to the one described in [4]. Figure lb shows the version of this system which has been adopted in our instrument shown schematically in Fig. 2. The part a-Tr of the heated filament and the thermistor form the two adjacent arms 1 and 2 of a balanced bridge and are located in a hot-wire gauge bulb. The remaining two bridge arms 3 and 4 consist of set resistances of two decade boxes. The bridge is symmetrical and, at room temperature and normal atmospheric pressure, R 1 = R 4 = 18 2 and R z = R 3 = 3,7003. If the decade resistance boxes in the arms 3 and 4 are replaced by another system simiIar to the one shown in Fig. lb, a differential vacuum gauge will be obtained for measuring pressure differences. Such a vacuum gauge was used as a monometric transducer for measuring the intensity of molecular beams in light gases [5]. The particular feature of the bridge shown in Fig. 2 consists of the fact that two temperature-sens itive elements with reversed-sign temperature coefficients of resistance constitute its two adjacent arms. The metal filament cools with increasing pressure, and its resistance is reduced. The thermistor which is in thermal and electrical contact with the filament is also cooled, but its resistance increases. Thus, the bridge is embalanced owing to a simultaneous variation in opposite directions of the bridge arms 1 and 2 resistances. The temperature coefficient of platinum is apt = +0.039/~ and that of the thermistor is aTr = -0.30/~ Therefore, an increased sensitivity of the bridge depends above all on the large temperature coefficient of the thermistor. It has been shown in [5] that the sensitivity of such a bridge, with the remaining conditions being equal, is (apt + aTr)/2 aTr times higher than that of a bridge whose opposite arms consist of two metal resistors. The bridge is fed with a direct current from a high-resistance source with an adequately large stabilization factor. The constant-current bridge supply ensures a stable operation of the vacuum gauge and reduces the effect of the fluctuations of the current and of the ambient temperature as compared with constant voltage or constant power bridge supplies [6]. In existing vacuum gauges [3, 7, 8] the thermistors are connected to the bridge as active elements which are heated by the current flowing through them and, according to the heat-exchange conditions, their resistance is changed as well as the electrical condition of the bridge. This method leads to the following difficulties.
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