Model based system engineering (MBSE) is a systematic approach of modeling which is frequently used to support requirement specification, design, verification and validation activities of system development. However, it is difficult to customize MBSE approach for the development of embedded systems due to their diverse behavioral aspects. Furthermore, appropriate tools selection to perform particular MBSE activities is always challenging. This paper focuses on the identification and classification of recent research practices pertaining to embedded systems development through MBSE approach. Consequently, a comprehensive analysis of various MBSE tools has been presented. Systematic literature review (SLR) has been used to identify 61 research practices published during 2008–2014. The identified researches have been classified into six different categories to analyze various aspects of MBSE approach for embedded systems. Consequently, 39 preliminary tools are identified that have been used in recent researches. Furthermore, classification and evaluation of tools have been presented. This research highlights important trends and approaches of MBSE to support development of embedded systems. A comprehensive investigation of tools in this article facilitates researchers, practitioners and developers to select appropriate tools according to their requirements.